X16 Liquid contact seals SF7000 (Perfluoropolyether rubber) 1 3 01 X16 PB101 A Actuation Symbol 3 Actuation Air operated X16 Made to Order Liquid contact seals SF7000 Thread type Option Symbol Type Rc NPT G Symbol Nil B Option None With foot Nil N F q e Seal material of the liquid contact parts is changed to SF7000 (Perfluoropolyether rubber).
: f = 1/t [Hz] FC2W520 (Graph 2) 2.0 Blue 703 Frequency: f [Hz] Flow rate command value [L/min] 0 91 16.0 16.8 LED Status When an Error is Detected Status LED status Action to be taken EEPROM error Stays lit.
Construction 3 1 Component Parts Description Material No. q w e r t y u 4 Solenoid coil Body Fixed armature Armature Return spring Poppet Diaphragm assembly Resin Stainless Steel Stainless Steel Stainless Steel NBR NBR, Resin 2 5 6 7 4.3-5 Series VQ20/30 Dimensions/Series VQ20 In-line style/Grommet(G) VQ21A1-mGm-m Dotted line: Bracket mounting style (-F) 4.3-6 Series VQ20/30 For Dry Air,
JIS Symbol 15-9-43 2 Series AS-FG How to Order AS 1 0 3 2 F G 01 06 Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Option Type Nil S None With seal 2 3 Elbow Universal M5 and U10/32 are not available with seal. Control type Applicable tubing O.D.
JIS Symbol How to Order 1 F 06 3 200 AS Flow Direction Symbols on Body JIS Symbol Body size Panel mount type Symbol M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard 100 200 205 300 400 Applicable tubing O.D.
Rc G NPT Nil F N Port size 04 1/2 (Female thread) 14-20-51 2 Series ADH4000 Construction Component Parts q o i u !1 No.
Note 2) AS1000, AS2000 are not applicable. 8 3 2 1 Bore size 2 1 Bore size Applicable series M3 M5 01 02 03 04 M3 x 0.5 M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 AS1000 AS1000 AS2000 AS2000/3000/4000/5000 AS3000/4000/5000 AS4000/5000 Thread type Nil Metric thread (M3, M5) Rc NPT G N F Caution Be sure to read before handling.
JIS Symbol How to Order 1 F 06 3 200 AS Flow Direction Symbols on Body JIS Symbol Body size Panel mount type Symbol M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard 100 200 205 300 400 Applicable tubing O.D.
Description Material Note q Electroless nickel plated Brass Body B w Electroless nickel plated Brass Body A e Electroless nickel plated Brass Needle r Electroless nickel plated Brass Lock nut t Electroless nickel plated Brass Handle y HNBR U seal u Electroless nickel plated Brass Needle guide i NBR O-ring o NBR O-ring !0 Chromium bearing steel Steel ball !
Material Note Description Body Needle Bottom cover Handle Component Parts Chromated Aluminum alloy Brass Aluminum alloy Zinc alloy q w e r No. Description Material Note Body Valve guide Check valve Needle Handle Chromated Chromated Rubber lining Chromated Black painted Aluminum alloy Aluminum alloy Brass Brass Carbon steel q w e r t AS Replacement Parts ASP No. Description Part no.
Description Material Note q w e r t y u i o !0 !1 !2 !3 !4 !
5 q u o Material Note Parts list !
Base Mounted Wiring: 20 (Individual Pilot EXH), Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 7 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 03 (3/8), Thread: F (G), Control Unit: None, Voltage of Air Release Valve: w/o Air Release Valve, Q: Q (CE Marked)
Base Mounted Wiring: 01CU (Base Mounted Plug-in w/Multi-connector on U Side), Pilot Type: Internal Pilot or None, Junction Cover: 1 (One-piece Junction Cover), Stations: 5 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 02 (1/4), Thread: F (G), Control Unit: None, Voltage of Air Release Valve: w/o Air Release Valve, Q: Q (CE Marked)
Base Mounted Wiring: 01CU (Base Mounted Plug-in w/Multi-connector on U Side), Pilot Type: Internal Pilot or None, Junction Cover: 1 (One-piece Junction Cover), Stations: 8 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 02 (1/4), Thread: F (G), Control Unit: None, Voltage of Air Release Valve: w/o Air Release Valve, Q: Q (CE Marked)
Base Mounted Wiring: 01FU (Plug-in w/D-sub Connector, U Side Mtg, Unit Style), Pilot Type: Internal Pilot or None, Junction Cover: 1 (One-piece Junction Cover), Stations: 8 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 02 (1/4), Thread: F (G), Control Unit: None, Voltage of Air Release Valve: w/o Air Release Valve, Q: Q (CE Marked)
Base Mounted Wiring: 10 (Non Plug-in Individual Lead Wire Entry), Pilot Type: R (External Pilot), Junction Cover: Separate Junction Cover or None, Stations: 3 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 02 (1/4), Thread: F (G), Control Unit: None, Voltage of Air Release Valve: w/o Air Release Valve, Q: Q (CE Marked)
Base Mounted Wiring: 10 (Non Plug-in Individual Lead Wire Entry), Pilot Type: R (External Pilot), Junction Cover: Separate Junction Cover or None, Stations: 13 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 02 (1/4), Thread: F (G), Control Unit: None, Voltage of Air Release Valve: w/o Air Release Valve, Q: Q (CE Marked)
Base Mounted Wiring: 10 (Non Plug-in Individual Lead Wire Entry), Pilot Type: R (External Pilot), Junction Cover: Separate Junction Cover or None, Stations: 6 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 02 (1/4), Thread: F (G), Control Unit: None, Voltage of Air Release Valve: w/o Air Release Valve, Q: Q (CE Marked)