Programless Controller (With Stroke Study) ® Specialized for Series LEM Series LECP2

Power supply ON/Servo OFF: Green flashes. q q PWR Power supply LED y w With alarm : Red turns on. Parameter setting : Red flashes. w ALM Alarm LED Change and protection of the mode switch (Close the cover after changing switch.) u i e Cover o !0 Frame ground (Tighten the bolt with the nut when mounting the controller. Connect the ground wire.) r FG !1 !2 t y u i o !0 !1 !2 !3 !4 !5 !

Ionizer Nozzle type IZN10 Series IZS

Static Neutralization Characteristics (Discharge Time from 1000 V to 100 V) q Energy saving static neutralization nozzle with right angles: IZN10-01-X367 wHigh flow rate nozzle with right angles: IZN10-02-X367 5 5 0.1 MPa 0.05 MPa 0.3 MPa 0.1 MPa 0.05 MPa Discharge time (Static neutralization time) [s] Discharge time (Static neutralization time) [s] 4 4 3 3 0.3 MPa 0.7 MPa 2 2 0.5 MPa 0.5

AS-FPQ/AS-FPG

Relation of Operating Temperature and Maximum Operating Pressure Particulate Generation Grade Classifications 1.2 10 Average particle concentration Particles/ft Grade 4 Max. operating pressure MPa 1.0 10 0.8 Grade 3 10 0.6 10 Grade 2 10 0.4 Grade 1 100.2 0 5 0 20 40 60 1 0.1 0.2 Particle size m or less 0.3 0.5 Operating temperature C 1 Series AS-FPQ/FPG How to Order AS 2 1 1 2 F P Q 01 06

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Relation of Operating Temperature and Maximum Operating Pressure Particulate Generation Grade Classifications 1.2 10 Average particle concentration Particles/ft Grade 4 Max. operating pressure MPa 1.0 10 0.8 Grade 3 10 0.6 10 Grade 2 10 0.4 Grade 1 100.2 0 5 0 20 40 60 1 0.1 0.2 Particle size m or less 0.3 0.5 Operating temperature C 1 Series AS-FPQ/FPG How to Order AS 2 1 1 2 F P Q 01 06

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Indicator/Pilot port direction XMA Rear flange surface XYA Symbol Nil A F J K M Rear flange surface Indicator Without indicator Pilot port direction Indicator Without indicator Pilot port direction Symbol Nil A F G J K L M Right flange surface Left flange surface Right flange surface Left flange surface Rear flange side Rear flange side Left flange surface Right flange surface Left flange

IDX-OM-W014

E D A B P G [AC200V] C F J M K L N H 4x13 [AC100V] [AC200V] 10 (:1.9m) (17) :0.8m mm A B C D E F G H J K L M N P Q IDU3E Rc3/8 440 498 285 2751 15 455 IDU4E Rc1/2 13 483 31 568 470 270 3001 80 2402 15 32 230 802 355 422 IDU6E Rc3/4 15 485 IDU Series 6-3 6 3 IDX-OM-W014 6 6-4 IDU3E4E AC100/100,110 (50/60Hz) CM 1 2 ILS FM PTC OLR PC 1 PTC PTC ILS CM AC200/200 (50/60Hz) AC230V

IDX-OM-W023

Guige Guige G C Guige Guige [AC200V] [AC200V] Guige Guige F 10 (10) (820) J H K P L N M 4x13 [AC200V] 17) [AC200V] [AC100V] [AC100V] Guige 17 Guige mm A B C D E F G H J K L M N P Q 859 IDU8E Rc3/4 270 485 31 902 365 1302 230 42 3002 80 3001 328 15 IDU11E Rc3/4 909 14 IDU15E1 Rc1 300 620 960 79 54 425 93 258 43 330 66 470 358 16 IDU Series 6-3 6 4 IDX-OM-W023 6 6-4 IDU8E-10

VNH

Electrical entry/With light/surge voltage suppressor Nil F N T Rc G NPT NPTF Valve type T TS TZ Conduit terminal Conduit terminal with surge voltage suppressor Conduit terminal with light/surge voltage suppressor 1 3 N.C./3.5 MPa N.C./7.0 MPa TL Conduit terminal with indicator light Rated voltage: Except 6, 7, 9.

ZCUK

20, 25, 30 20, 25, 32 5, 10, 15, 20, 25, 30, 40, 50 TN TF R Rod piping/ Pad direct mounting 32 32 mm Note) In the case of rod piping (Q, R), TF (G1/8) is not available.

Air Suction Filter In-line Type with One-touch Fittings Series ZFC 1

L O L ZX G H F K ZR J ZM ZH E D I A ZU B C Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL 2-4.5 ZY ZQ A B C D E F G H I J K L Model 4 ZFC100-04 ZF 6 ZFC100-06 53.2 9.1 30 14.1 10 18 11.6 19.5 23 20 29 5/32" ZFC101-03 ZP 1/4" ZFC101-07 6 ZFC200-06 ZCU 8 ZFC200-

The SYJ Valve is an innovative combination of space efficiency and performance superiority which provides real value to the design solution. Whether designed in a manifold or used as a single valve, this small profile increases design flexibility and m, VALVE/SOL, 4/5 PORT SOLENOID VALVE, 53 lb

Type of Actuation: 2 (2 Position Double), Manifold Type: 20 (Body Ported Plug-in Integrated), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal w/Connector), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: E (Push-turn Locking Lever Style), A, B Port Size: C6 (Body Ported ø6 One-touch Fitting), Thread

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Drip-Proof / Lubrication Free, Valve Type: 5-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Retaining, Valve Positions: 2-Position Exhaust, Applicable Cylinder Diameter(Ø): 63 or less, Pipe Port Type: One-Touch Plumbing, Port Size: -, Connecting Tube

Type of Actuation: 2 Position Single, Manifold Type: Body Ported Plug-in Integrated, Pilot: Internal Pilot, Specifications: Standard, Voltage: 24VDC, Electrical Entry: DIN Terminal w/Connector, Lead Wire Length: None, Surge Suppressor: Light & Surge Suppressor, Manual Override: Push-turn Locking Lever Style, A, B Port Size: Body Ported ø6 One-touch Fitting, Thread: Rc (or None), Option: Side

Type of Actuation: 2 Position Double, Manifold Type: Body Ported Plug-in Integrated, Pilot: Internal Pilot, Specifications: Standard, Voltage: 24VDC, Electrical Entry: DIN Terminal w/Connector, Lead Wire Length: None, Surge Suppressor: Light & Surge Suppressor, Manual Override: Push-turn Locking Lever Style, A, B Port Size: Body Ported ø6 One-touch Fitting, Thread: Rc (or None), Option: Side

Type of Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported Plug-in Integrated), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal with Connector), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: E (Push-turn Locking Manual Override), A, B Port Size: C6 (Body Ported ø6 One-touch Fitting

Type of Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported Plug-in Integrated), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal w/Connector), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: E (Push-turn Locking Lever Style), A, B Port Size: C6 (Body Ported ø6 One-touch Fitting), Thread

ITVH

Therefore, supply pressure regulated by a built-in regulator e passes through the air supply solenoid valve q and is applied to the pilot chamber r. The pressure in the pilot chamber r increases and operates on the upper surface of the diaphragm t. As a result, the air supply valve y linked to the diaphragm t opens, and a portion of the supply pressure becomes output pressure.

Nozzle Type Ionizer

Description of LEDs q w e No. Description LED Color Contents q Power supply display PWR Green Lights up when the power supply is turned on. w Discharge/Irregular high voltage display ION/HV Green/Red Lights up when static electricity is discharged. (Green)/Lights up if an abnormal high voltage discharge occurs.

High Speed Pilot Operated

Description Material 1 Body Aluminum die-casted 2 (B) 4 (A) 2 Spool assembly Aluminum/FKM e 3 Plug (For the -X1) Steel 1 High Speed Pilot Operated Solenoid Valve DXT1215 Series How to Order Valves DXT1215 T 5 Wm U 01 N X1 w y e r t u q q Coil type w Rated voltage e Electrical entry M8 connector1 T With power-saving circuit 5 24 VDC Wm WO With straight connector cable Without connector cable