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Exanll) A73LO-A73L Hosv6r,3m is applid to D-FTNTLand D-F7BAL bv (Pleas consull SMC in case or5m lenglh.)

) (44) W T R (Y) Z T 25 IN port 2-3/8 l=280 l=300 (V) (X) 2.5 (N) (U) E C D G Q S A C B L1 L2 16 L3 D side U side Stations 1 2 3 4 5 n 21 16 H H P=J (Pitch) OUT port n-1/4 n-1/8 2 5.5 : Thread type L dimensions (mm) n (stations) Model Dimension 4 3 5 9 2 6 10 7 8 138 103.5 172.5 310.5 L1 69 207 345 241.5 276 VV2CW2 150 115.5 184.5 322.5 L2 81 219 357 253.5 288 162 127.5 196.5 334.5 L3 93

The vacuum aspiration fluence shows the fluence immediately before piping in the actuator. 6 - How to Order Step motor (servo 24VDC) / Servo motor (24VDC) 11-LEFS 25 B 6N 1 100 1 ize Controller mounting Screw mounting type Screw mounting type Nil Nil 16 16 DIN rail mounting type DIN rail mounting type D D 25 25 I/O cable length 32 32 40 40 Without cable Without cable Nil Nil Motor 1.5m

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2001 SMC CORPORATION All Rights Reserved 1st printing October, 2001 D-SMC.L.A. P-80 (D) All specifications in this catalog are subject to change without notice. Printed in Japan. This catalog is printed on recycled paper with concern for the global environment.

, A80, D-A7lH, A80H D-A73C, A80C 54 12 Reed switch D-A79W D-J79, J79W 53 49 11 11 12 2 wire 3 wire 56 Solid state switch D-F7 4 wire 56 14 Write "L" at the end of the part number for 3 meters of lead wire.

Note 16 CJ-L016B CJ-F016B CJ-T016B 10 16 Foot bracket Flange bracket T-bracket Common for models D-C7, D-C8, and D-H7 BJ2-010 BJ2-016 Caution 1. For Series CJ2X, up to 0.1Nl/min (ANR) of internal leakage is anticipated due to cylinder structure. T-bracket is applicable to double clevis type (D). 2

A1 L1 MM NX NDH10 R1 U1 Dd9 d L m t l 3 15.2 12.2 CD-J010 10 1.2 0.3 Type C 3.2 3.3 0.030 0.060 CM2 10 4.8 22.7 18.3 CD-Z015 16 I-J010B 10 CD-J010 1.5 0.7 Type C 5 8 21 M4 x 0.7 3 15.2 12.2 1.2 0.3 Type C 3.2 5.3 3.3 3.3 +0.048 0 0.030 0.060 0.030 0.060 3.1 8 9 CD-JA010 16 3 18.2 15.2 10 I-J016B 16 IY-J015 1.2 0.3 Type C 3.2 8 25 M5 x 0.8 4.8 16.6 12.2 1.5 0.7 Type C 5 3.3 5.3 5.3 +0.048

Refer to back page 50 for Safety Instructions and pages 13 to 16 for Temperature Control Equipment Precautions.

Grommet type (G) DIN terminal type (D) Symbol Without indicator light With indicator light Without indicator light With indicator light Without indicator light With indicator light Varistor Varistor S Non-locking push type (Tool required) Coil Coil 5 AC Varistor Neon bulb None Z Coil Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650)

Vacuum Pressure Switch: ZSE2-0R-15 ZSE2-0R-15 ZSE2-0R-15L ZSE2-0R-15C ZSE2-0R-15CL ZSE2-0R-15CN Indicator light (Red) Pressure setting trimmer Indicator light (Red) Pressure setting trimmer H L SET L SET H 15 15 9 9 2-M2.5 Mounting thread 2-M2.5 Mounting thread 25 25 31 31 600(3000) 42 600(3000) 49.5 40 40 3 3 20 20 18 18 16 16 13 11 13 11 9 9 Vacuum supply port 3.3 Vacuum supply port 3.3

TF G 1/8 G 1/8 G 1/8 G 1/4 G 1/4 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 NPT 1/4 Nil M3 x 0.5 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 1/4 12-CY3B6 12-CY3B10 12-CY3B15 12-CY3B20 12-CY3B25 12-CY3B32 12-CY3B40 12-CY3B50 12-CY3B63 25 30 35 50 50 50 60 60 70 10 16 19 25 30 40 40 60 70 16 16 78 81 103 132 137 156 182 180 192 d C H B H 4 4 8 8 10 B 8 14 26 32 41 C 9.2 16.2

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-15 Connection of RS-232C HRS Series 3.3Installation 3-27 HRX-OM-S004 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

Add the symbol at the beginning of part numbers for solenoid valves, etc. to be mounted, and enter these together in order from the D side.

cable O.D. 6 to 8 (D, DL) Pilot port B (Air operated) L (Terminal with indicator light: DL) M (Conduit terminal: T) K (DIN terminal: D) I (Grommet: G) J (Conduit: C) 4 x 2-18 mounting hole Applicable flange Pilot port Rc A B C D E F G H I J K L M Model VNB5-32F VNB6-40F VNB7-50F 1 8 1 4 1 4 130 150 180 210.5 226 250 135 140 155 134 146 162.5 20 24 24 100 105 120 36 42 54 12 12 14 244 259.5

Communication example Device Address : No.1 Read 16 pieces data from register 0030h.

W (44) T R (Y) Z VC T 25 VDW IN port 2-3/8 : Thread type l=280 l=300 VQ VX2 (X) (V) S Q 2.5 (N) VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com C E A (U) VX3 D G C B VXA L1 L2 L3 16 VN LVC D side U side Stations 1 2 3 4 5 n LVA LVH LVD LVQ 21 5.5 16 OUT port n-

Auto Switch Proper Mounting Position (mm) (mm) Auto Switch Mounting Height D-M9 D-M9W D-M9 D-M9W D-A9 Auto switch model Auto switch model D-A9 B A B A Bore size Bore size 20 25 32 40 Hs 30.5 59.5 34 55.5 20 25 32 40 Note) The above values are a guide in the stroke end detection of the mounting positions of the auto switch.

Ensure input branch current does not exceed the specification range. 3 Mode No.4 Number of branch Valid port A OFF 16 points per port COM A and B B ON 8 points per port COM A to D Check the connection of UNLIT COM port branch to input unit. 4 COM A-D is not LIT 23 22 Troubleshooting (continued) CC-Link compatible communication No.