Modular Pressure Control Equipment F.R.L. Replacement Procedure

Nickel plating 1 8 Complete product No. indicated Hexagon socket head plug Handle R(PT) 1/4 Nickel plating 1 2 Flat washer Adjustment screw 10.5 x 20 x 1.2 Zinc chromate treatment 1 1 Zinc chromate treatment 447 Series AMR3000 to 6000 Replacement Procedure of Element 1 1.

1% F.S.30 msAir/Inert gas0 to 50C (With no condensation)0.88 MPa0.05 MPa to supply pressureSet pressure to 0.88 MPa (VY1 01)1 to 5 VDC, 0 to 10 VDC, 4 to 20 mA DC, 0 to 20 mA DC12 VDC ? 10%, 24 VDC ? 10%, 1.8 W or lessDIN terminalCable O.D. ?

ZSE30/ISE30

System error Brown DC(+) Internal data error 12 to 24VDC + Black OUT Load Internal data error Blue DC() 6 Series ZSE30/ISE30 Dimensions 20 0.1 2-M3 x 0.5 Thread depth 4 Lead wire with connector 9.5 25 8 30 3.6 M5 x 0.8 MPa PRESSURE 20 0.1 10 SMC OUT Width across flats 12 SET 1.5 01: R 1/8 T1: NPT 1/8 With bracket 42.5 10 15 4.2 3 22 30 20 25 20 SMC 45 30 1.8 35 35 Panel mount 8 17.8 7.2

VXA21/22

4.5 6 8 250 1.0 3 8 (10A) 340 0.4 10 10 1 2 (15A) 420 Note) Refer to Glossary on page 17-3-15 for details of max. operating pressure differential and max. system pressure.

asilltr

Series NCQT Male Rod End NGOQTOOO-OOM Threaded Mounting Holes (Both Ends) NCOQTOAO'OOO f. 056 (s16") #a-32 07s (31) *10-32 106 (11/re") 5/rc-24 150 (11/r-) 3la-24 200 (2) 1/z-20 250 (21/z\ 1/z-20 300 (3) 5/e-18 ,100 (4') e/+-16 MThreaded r06 (r-rlr6") i50 (r.r/2) M-Threaded 25O (2-1f2'l 3(xr (3') 4OO {4') 150 (11/r) Series NCDQT Constnrction / Autn Suitch Capable Double Acting Spring Return

ø 32, ø 40, ø 50, ø 63 Compact Cylinder With Solenoid Valve Series CVQ

S, Z type 24 VDC: 7% to +10% 12 VDC: 4% to +10% Operating pressure (MPa) Bore size (mm) 0.3 Operating direction 0.5 0.7 181 IN 302 422 32 241 OUT 402 563 Standard Stroke 317 IN 528 739 40 (mm) Bore size (mm) Standard stroke 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 377 OUT 628 880 IN 495 825 1150 32 1 50 OUT 589 982 1370 40 50 2 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15,

Air Slide Table ø 4, ø 6, ø 8 Series MXJ

Adjuster option Both ends (C) MXJ6 5, 10, 15 MXJ8 5, 10, 15, 20 Stroke adjuster is mountable on the axial piping.

ZK2-C

NO.ZK2-OM00801-B // ZK2-ZSV-A A 2 9 10 11 14 14 15 16 16 17 17 20 20 20 F0 22 F1 OUT1 23 F2 OUT2 25 F3 27 F4 28 F6 30 F11 31 F80 32 F81 33 F90 34 F96 36 F98 37 F99 39 40 B 43 44 45 51 52 52 -1NO.ZK2-OM00801-B (ISO/IEC)(JIS)1)2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems.

Air Cylinder NCQ7 Series Compact Cylinder

Series NCQT Male Rod End NGOQTOOO-OOM Threaded Mounting Holes (Both Ends) NCOQTOAO'OOO f. 056 (s16") #a-32 07s (31) *10-32 106 (11/re") 5/rc-24 150 (11/r-) 3la-24 200 (2) 1/z-20 250 (21/z\ 1/z-20 300 (3) 5/e-18 ,100 (4') e/+-16 MThreaded r06 (r-rlr6") i50 (r.r/2) M-Threaded 25O (2-1f2'l 3(xr (3') 4OO {4') 150 (11/r) Series NCDQT Constnrction / Autn Suitch Capable Double Acting Spring Return

KFx-OMV0011

NPT, R1/8 3 to 5 NPT, R1/4 8 to 12 NPT, R3/8 15 to 20 NPT, R1/2 20 to 25 8 - Precautions for use with non-SMC Caution (1) When using the KFG2 series with tubing other than those from SMC, the products are not subject to warranty. 3.

Digital Pressure Switch

kPa 25 kPa 50 kPa Electrical Power supply voltage 12 to 24 VDC (10%), and power supply ripple (p-p) 10% at max. spec.

SI Unit for Vacuum Manifold

Vacuum/ReleaseInstruction Table 4-10.

JXCx-OMT0030CN

3 21 2 4 2147483647 0.01mm 22 1 23 0 ID1 24 H 2 065500 mm/s2 25 L 26 H 2 065500 mm/s2 27 L 28 1 030 10% 29 1 030 10% 30 1 0255 mm/s 31 1 030 10% 32 H 2 065500 0.01mm 33 L ID2 3453 ID1 ID3 5473 ID1 ID4 7493 ID1 ID5 94113 ID1 012 38 - 122 IF IN Data IDIF ID=1 ID=1 bit 7 6 5 4 3 2 1 0 I_Address 32 33 1 LEC1ON 0OFF 2 LEC0OFF 1ON 3 1 LEC1ON 0OFF 4 LEC1ON 0 0OFF 123 IN Data

SI unit for CC-Link

node number setting 1 to 64 Station type Remote I/O node Transmission speed 156 kbps 625 kbps 2.5 Mbps 5 Mbps 10 Mbps Min. cable length between nodes 20 cm or more Max. total cable length 1200 m 900 m 400 m 160 m 100 m Rated voltage 24 VDC Power supply for SI unit: 24 VDC 10% Power supply for the solenoid valves: 24 VDC +10/-5% Power supply voltage range (Voltage drop warning is generated

1% F.S.30 msAir/Inert gas0 to 50C (With no condensation)0.88 MPa0.05 MPa to supply pressureSet pressure to 0.88 MPa (VY1 01)1 to 5 VDC, 0 to 10 VDC, 4 to 20 mA DC, 0 to 20 mA DC12 VDC ? 10%, 24 VDC ? 10%, 1.8 W or lessDIN terminalCable O.D. ?

1% F.S.30 msAir/Inert gas0 to 50C (With no condensation)0.88 MPa0.05 MPa to supply pressureSet pressure to 0.88 MPa (VY1 01)1 to 5 VDC, 0 to 10 VDC, 4 to 20 mA DC, 0 to 20 mA DC12 VDC ? 10%, 24 VDC ? 10%, 1.8 W or lessDIN terminalCable O.D. ?

SMC CORPORATION OF JAPAN

6.15 The Schmitt Trigger .6-10 6.16 The Hour Meter .6-11 7.

® SEMI Thermo-chiller Series HRW Fluorinated Fluid Type

Note 10) Weight in the dry state without circulating fluids 108

2-Color Display Type High-Precision Digital Pressure Switch Series ZSE30/ISE30

System error Brown DC(+) Internal data error 12 to 24VDC + Black OUT Load Internal data error Blue DC() 6 Series ZSE30/ISE30 Dimensions 20 0.1 2-M3 x 0.5 Thread depth 4 Lead wire with connector 9.5 25 8 30 3.6 M5 x 0.8 MPa PRESSURE 20 0.1 10 SMC OUT Width across flats 12 SET 1.5 01: R 1/8 T1: NPT 1/8 With bracket 42.5 10 15 4.2 3 22 30 20 25 20 SMC 45 30 1.8 35 35 Panel mount 8 17.8 7.2

Manifold Specifications

Flow Characteristics at the Number of Manifold Stations (Operated single/double type individually) Passage/Stations Station 1 Station 5 Station 10 Station 15 Station 20 2.7 0.15 0.62 2.8 0.10 0.65 C [dm3/(sbar)] b Cv 2.7 0.16 0.61 2.8 0.12 0.66 2.7 0.16 0.61 2.9 0.12 0.66 2.7 0.15 0.61 2.9 0.12 0.66 2.6 0.20 0.63 2.9 0.12 0.66 1 4/2 (P A/B) C [dm3/(sbar)] b Cv 4/2 5/3 (A/B R1/R2) Manifold