Material: T (SCS14 Cover, SS 316 Case, Fluororesin Gasket/O-ring, Fluororesin Seal), Element Length: B [ℓ500 (ℓ250 x 2)], Port Size: 04 (1/2 Rc), Element Type: T [Fiber (Honeycomb), Polypropylene Material], Nominal Filtration Accuracy: 50 μm, Element Seal Material: T (Fluororesin)

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

4 @2 !2 !3 @5 q @3 t r u e o y @1 i !7 !1 Component Parts Material NBR NBR Stainless steel Stainless steel POM, Stainless steel (1) Note Description DY seal DY seal Spring Spring Cassette Seal Spacer O-ring O-ring O-ring O-ring Ring Description No. !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 Note Material PBT PBT PBT Brass Brass Brass Brass Brass Brass Brass No. q w e r t y u i o !0 !1 !2 !

IC

0 q CONTROLLER PRESSURE OUT w e w r RUN 4 3 2 1 F.R.L. CH kPa 4 3 2 1 SW t e AV y D-IN RUN UP SET P-ON AU DOWN STOP READ r u AF i AR o Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com t y u i o IR !

Speed Controller: Standard Type In-line Type AS Series

Dimensions: AS2000/3000 Dimensions: AS4000 KE AS-FG 2 x 1/4 to 1/2 AS-FP 68.5 (Max.76.5) AS-FM 2 x Port size AS-D AS-T ASP ASN 2 x D AQ Dimensions Max.

MHT2

11 B 6.5 9 12 15 A 9.5 13.5 11.5 14 B 6 8.5 11.5 14.5 A 9 13 11 13.5 32 40 50 63 2.7-6

Series DXT474

Side Thread Type Nil Rc G NPT NPTF T F F 1 2 3 4 N.O. N.C. N.O. N.C. N.O. N.C. N.C. N.O. Manifold Type 1 0 Side Ported Top Ported Rated Voltage, Elec.

NAMUR Interface 3 Port Solenoid Valve VFN200N Series [Option]

Note 2) Use turbine oil No.1 (ISO VG32), if lubricated.

HRX-OM-T004

Communication specification . 2-2 2.3 Terminal block explanation . 2-2 2.4 Setting and checking . 2-4 2.4.1 Setting and checking . 2-4 2.4.2 Setting and checking . 2-5 2.5 Contact input signal . 2-16 2.5.1 Run/stop signal inputRemote signal input . 2-16 2.5.2 External switch signal input . 2-18 2.6 Contact output signal . 2-19 Chapter 3 Serial communication . 3-1 3.1 Precautions wiring communication

Digital Flow Switch Series PFA For Air Series PFW For Water

ON H OFF Blue 50msec PFA7H-(-M) 28 29 B C D E F G H I J A Model Brown PFA703H PFA706H PFA712H 55 160 40 92 67 55 Rc 1, NPT 1, G 1 36 M5 x 0.8 8 OUT1 80mA Load Black 65 180 45 104 79 65 Rc 1 1/2, NPT 1 1/2, G 1 1/2 46 M6 x 1 9 ON OFF 75 220 55 114 89 75 Rc 2, NPT 2, G 2 56 M6 x 1 9 50msec PFA7H-(-M) 68 69 Analog output 1 to 5VDC 4 to 20mADC 5 20 Analog output [mA] Analog output [V] 1 4 Min

CG1-SMV13_en

Poloneza 89 Page 2 of 2

180 ° Angular Type Air Gripper Rack & Pinion Type MHW2 Series ø 20, ø 25, ø 32, ø 40, ø 50

2 !6 !4 o t !8 i !9 !0 !7 !3 !5 u y q e w @2 !1 Open condition MHZ MHF MHL MHR MHK MHS MHC Component Parts MHT No.

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

Refer to pages 15-18-3 to 15-18-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 15-8-6 to 15-8-8 for Precautions on every series. 3 Construction w r y t u !2 e !1 No. q w e r t y u i o !0 !1 !

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

ASV AK ASS ASR ASF 15-9-73 3 Construction w r y t u !2 e !1 No. q w e r t y u i o !0 !1 !

3 Port Air Operated Valve Series SYJA300 1

N.O. 0.4 0.3 0.2 0.1 0.2 0.3 0.4 0.5 0.6 Operating pressure (MPa) Flow Characteristics/Weight C [dm 3/(s bar)] b Cv C [dm 3/(s bar)] b Cv 1 2 (P A) 2 3 (A R) Valve model Flow characteristics Weight (g) Effective area (mm2) Pilot port size Type of actuation Port size SYJA312-M3 SYJA322-M3 SYJA314-M5 0.41 0.18 0.086 0.35 0.33 0.086 Body ported N.C. N.O. N.C.

Speed Controller with One-touch Fitting Series AS Elbow Type (Metal Body) 1

Electroless nickel plated q w e r t y u i o !0 !1 !2 !3 !4 !5 !

Speed Controller: Standard Type Series AS In-line Type 1

Note 2) AS1000, AS2000 are not applicable. 8 3 2 1 Bore size 2 1 Bore size Applicable series M3 M5 01 02 03 04 M3 x 0.5 M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 AS1000 AS1000 AS2000 AS2000/3000/4000/5000 AS3000/4000/5000 AS4000/5000 Thread type Nil Metric thread (M3, M5) Rc NPT G N F Caution Be sure to read before handling.

Slit Valve

2 t !0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

ASP-X352

Metric size Inch size M D1 Model number Piping thread 6 1/4 3/8 1/2 10 12 8 Pilot port (5/16) ASP330F-U01-X352 1/8 Uni-fit G 1/8 L1 T ASP430F-U02-X352 1/4 Uni-fit G 1/4 ASP530F-U03-X352 3/8 Uni-fit G 3/8 D2 ASP630F-U04-X352 1/2 Uni-fit G 1/2 H L2 Note) Additional models are possible (i.e. thread form/tubing size combinations), please contact L4 your SMC representative for availability.

Speed Controller with One-touch Fittings In-line Type/Panel Mount Type AS  1F-3 Series

AS2001F-04-3-X214 622 AS1F-3 Series Speed Controller with One-touch Fittings In-line Type/Panel Mount Type Construction No. 1 2 3 4 5 6 7 8 9 10 11 12 Material Note Description Body A Handle Body B Needle Needle guide Lock nut Panel nut U seal Spacer Cassette Packing O-ring PBT PBT Brass Brass Brass Steel (1) Electroless nickel plated Electroless nickel plated Electroless nickel plated Zinc

MHT2

5 V 12 V Diagnosis (2-color indication) 3-wire (PNP) 24 V F7PW F9PWV F9PW J79W F7BA F7BWV F9BWV F9BW F9BA Grommet Water resistant (2-color indication) 12 V 2-wire F7BAV With diagnosis output (2-color indication) 4-wire (NPN) 5 V 12 V IC circuit F79F Lead wire length symbols: 0.5 m Nil (Example) F9BW 3 m L (Example) F9BWL 5 m Z (Example) F9BWZ None N (Example) J79CN marked solid state