Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

6 8 6 8 8 10 8 10 8 10 10 12 10 12 10 12 10 R 1/8 23.4 27.4 39.8 45.8 17.6 14 R 1/4 25.4 31.4 39.8 45.8 17.6 12 R 1/8 26.7 30.7 45.3 52.8 24 14 R 1/4 28.7 34.7 45.3 52.8 24 17 R 3/8 30.4 36.7 45.3 52.8 24 17 R 1/4 33.8 39.8 49.6 55.6 30 17 R 3/8 35.5 41.8 49.6 55.6 30 22 R 1/2 37.6 45.8 49.6 55.6 30 Dimension with cover Reference dimension of R thread after installation.

Series SY100 3 Port Solenoid Valve Rubber Seal

Solenoid Specifications 3 (R) 1 (P) 1 (R) 3 (P) Order Made P.2.1-15 13 24 SY1 A 13 24 SY1 Series Grommet (G), (H), L plug connector (L), M plug connector (M) Electrical entry Coil rated voltage (V) DC 24, 12, 6, 5, 3 AC 50/60Hz 100, 110, 200, 220 Allowable voltage 10 to +10% Power consumption (W) (1) DC 0.75W (With light: 0.8W) 0.5W (With light: 0.55W) 0.9 (With light: 1.0) 100V 110V [115V

ZMA

10 8 5 4 ZZMA Stations 04 ZQ 10 10 8 6 ZZMA Stations 04B Effective area of external silencer is 160 mm2.

CS1

Calculation example: CS1L160-500 Basic weight27.57 (Foot style, 160) Additional weight2.39/100 stroke Cylinder stroke500 stroke 27.57 + 2.39 X 500/100 = 39.52kg Weight/Steel tubing (kg) Bore size (mm) 125 140 160 180 200 250 300 Basic 15.20 18.38 25.24 34.16 42.66 79.78 115.94 Foot 16.83 20.90 28.04 38.36 47.54 89.28 133.22 Front flange 17.88 23.38 31.63 43.99 54.57 101.62 146.14 Rear

A

143 3/4, 1 74 46 06 10 06 10 90 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 5 Soft Start-up Valve AV2000/3000/4000/5000 Modular F.R.L.

PSxx-OMU0008CN

DC1224 V10% DC1224 V 10 DC(+) DC(-) 8 DC1224 V10% DC1224 V 10% DC(+) DC(-) 9 ( ) 10 11 -73No.PS-OMU0008CN-D No. / 5m / 12 1015 10 SI (kPaMPa) ( ) 13 SI kPa,MPa 14 15 16 FUNC 17 -74No.PS-OMU0008CN-D No. 4 m 4 m FUNC (Er13) 18 10 10 () 19 () / ( ) () -75No.PS-OMU0008CN-D 80 mA 7 F.S.(3.5F.S.) 1 1F.S. 1 -76No.PS-OMU0008CN-D ZSE20C ZSE20CF ISE20C ISE20CH () () () () SUS630SUS304

Tube One Touch Fitting VPMW-701-100-FM-B80 N.C., 100 PSI, Flush Mount, Nylon 1/16" ID Barbed Fitting VPMW-701-100-FM-B85 N.C., 100 PSI, Flush Mount, Nylon 1/8" ID Barbed Fitting VPMW-701-100-FM-OT1 N.C., 100 PSI, Flush Mount, 1/8" O.D. Tube One Touch Fitting VPMW-701-100-FM-OT2 N.C., 100 PSI, Flush Mount, 5/32" O.D.

Tube One Touch Fitting VPMW-701-100-FM-B80 N.C., 100 PSI, Flush Mount, Nylon 1/16" ID Barbed Fitting VPMW-701-100-FM-B85 N.C., 100 PSI, Flush Mount, Nylon 1/8" ID Barbed Fitting VPMW-701-100-FM-OT1 N.C., 100 PSI, Flush Mount, 1/8" O.D. Tube One Touch Fitting VPMW-701-100-FM-OT2 N.C., 100 PSI, Flush Mount, 5/32" O.D.

Tube One Touch Fitting VPMW-701-100-FM-B80 N.C., 100 PSI, Flush Mount, Nylon 1/16" ID Barbed Fitting VPMW-701-100-FM-B85 N.C., 100 PSI, Flush Mount, Nylon 1/8" ID Barbed Fitting VPMW-701-100-FM-OT1 N.C., 100 PSI, Flush Mount, 1/8" O.D. Tube One Touch Fitting VPMW-701-100-FM-OT2 N.C., 100 PSI, Flush Mount, 5/32" O.D.

Tube One Touch Fitting VPMW-701-100-FM-B80 N.C., 100 PSI, Flush Mount, Nylon 1/16" ID Barbed Fitting VPMW-701-100-FM-B85 N.C., 100 PSI, Flush Mount, Nylon 1/8" ID Barbed Fitting VPMW-701-100-FM-OT1 N.C., 100 PSI, Flush Mount, 1/8" O.D. Tube One Touch Fitting VPMW-701-100-FM-OT2 N.C., 100 PSI, Flush Mount, 5/32" O.D.

Tube One Touch Fitting VPMW-701-100-FM-B80 N.C., 100 PSI, Flush Mount, Nylon 1/16" ID Barbed Fitting VPMW-701-100-FM-B85 N.C., 100 PSI, Flush Mount, Nylon 1/8" ID Barbed Fitting VPMW-701-100-FM-OT1 N.C., 100 PSI, Flush Mount, 1/8" O.D. Tube One Touch Fitting VPMW-701-100-FM-OT2 N.C., 100 PSI, Flush Mount, 5/32" O.D.

Tube One Touch Fitting VPMW-701-100-FM-B80 N.C., 100 PSI, Flush Mount, Nylon 1/16" ID Barbed Fitting VPMW-701-100-FM-B85 N.C., 100 PSI, Flush Mount, Nylon 1/8" ID Barbed Fitting VPMW-701-100-FM-OT1 N.C., 100 PSI, Flush Mount, 1/8" O.D. Tube One Touch Fitting VPMW-701-100-FM-OT2 N.C., 100 PSI, Flush Mount, 5/32" O.D.

Tube One Touch Fitting VPMW-701-100-FM-B80 N.C., 100 PSI, Flush Mount, Nylon 1/16" ID Barbed Fitting VPMW-701-100-FM-B85 N.C., 100 PSI, Flush Mount, Nylon 1/8" ID Barbed Fitting VPMW-701-100-FM-OT1 N.C., 100 PSI, Flush Mount, 1/8" O.D. Tube One Touch Fitting VPMW-701-100-FM-OT2 N.C., 100 PSI, Flush Mount, 5/32" O.D.

Tube One Touch Fitting VPMW-701-100-FM-B80 N.C., 100 PSI, Flush Mount, Nylon 1/16" ID Barbed Fitting VPMW-701-100-FM-B85 N.C., 100 PSI, Flush Mount, Nylon 1/8" ID Barbed Fitting VPMW-701-100-FM-OT1 N.C., 100 PSI, Flush Mount, 1/8" O.D. Tube One Touch Fitting VPMW-701-100-FM-OT2 N.C., 100 PSI, Flush Mount, 5/32" O.D.

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zoo ~ ) 2 ~ i 100 E 12 z ,; 2 ~ E , E :; 100 V ~ " I ~ , , " , f< ' ~ 0 u: , ' l ~ ~ 0 w 0 5 10 ~ V " ~ 0 ] w 0 5 10 Needle revolullOOs (RevolutIOns) Needle revolutions (Revolutions) ASP530F ASP630F 12. 1500 'E 20 E 12 11~14:l~ z ~ ~ ~IOOO 15 . , g j " . 000 14 'E ' , ' h E cr z 12 ,; "'500 . l/ : 4 i 1,(" 0 to, 1~ OS, D9 10 ~ E ~ " , "' g 10 : ; ~.; 0 --:' 500 ~ ~ 5 :J" ~ -r ~ 0 w

I/O Configurator (NFC version)

Setting range: Auto/100 Mbps/10 Mbps -24No.EX-OMV0017 (C) System setting System setting display. -25No.EX-OMV0017 System setting items Description Explanation Define the I/O assignment of the entire wireless system including the wireless slave unit registered to the wireless master unit.

Soft Start-up Valve AV2000/3000/4000/5000

143 3/4, 1 74 46 06 10 06 10 90 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 5 Soft Start-up Valve AV2000/3000/4000/5000 Modular F.R.L.

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

N1: 1/8" N3: 5/32" N7: 1/4" N5T: 10-32UNF NM: Mixed Top ported elbows are LN and bottom ported elbows are BN. 2.

End Lock Cylinder Series CBJ2

105 60 60 15 10 105 65 65 15 10 115 75 65 25 15 35 10 5 45 10 5 40 15 10 45 5 5 30 5 5 55 15 10 40 15 10 60 15 15 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 D-C7 D-C80 D-A7H D-A80H D-H7 D-H7W D-H7BAL D-H7NF Band mounting D-A79W Rail mounting D-F7 D-J79 D-C73C D-C80C D-H7C (16) D-F7V D-J79C (16) D-F7W D-J79W D-F7BAL D-F79F D-H7LF D-F7WV D-F7BAVL D-F7LF In addition to the models in the

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16Mcm of deionized water at class 10 clean room (1l/min flow rate).