Fieldbus System

Stations 1 station Symbol 01 I/O Unit stations 16 Note) 16 stations Nil None 1 station Note) Max. number of stations depends on the wiring specifications. 1 9 9 stations Note 1) Without SI Unit, the symbol is nil. Cylinder port size Note 2) SI Unit is not included in I/O Unit stations.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Note 2) ( ): Denotes without sub-plate. 267 Single Unit/Sub-plate Type 10-SV Dimensions: Series 10-SV1000 2 position single/double, 4 position dual 3 port [M12 waterproof connector type] 10-SV100(R)-W-01 Directional Control Valves Air Grippers Modular F. R.

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

Model Option 10-/21-AR20(K)-B 10-/21-AR25(K)-B 10-/21-AR30(K)-B 10-/21-AR40(K)-B 10-/21-AR40(K)-06-B 10-/21-AR50(K)-B 10-/21-AR60(K)-B Bracket assembly Note 1) AR50P-270AS Note 2) AR20P-270AS Note 3) Note 3) AR25P-270AS AR30P-270AS AR40P-270AS Set nut AR20P-260S AR25P-260S AR30P-260S AR40P-260S 10: G49-10-01, 21: G49-10-01-MS-X3 Standard Pressure gauge Note 4) 10: G49-4-01, 21: G49-4-01

Series 10-, 21- AW-B Filter Regulator

Model Option 10-/21-AW20(K)-B 10-/21-AW30(K)-B 10-/21-AW40(K)-B 10-/21-AW40(K)-06-B 10-/21-AW60(K)-B Bracket assembly Note 1) AW23P-270AS AR33P-270AS AR43P-270AS AW62P-270AS Set nut Note 2) AR23P-260S AR33P-260S AR43P-260S 10: G49-10-01, 21: G49-10-01-MS-X3 Round type Note 3) Pressure gauge Note 4) Standard 10: G49-4-01, 21: G49-4-01-MS-X3 0.02 to 0.2 MPa setting Note 1) Assembly of a bracket

Manifold Regulator ARM1000/2000 Series

Note 4) When a regulator is not mounted on the manifold, use the following blank plate assembly (with mounting screws and O-ring) For ARM1000: Part no. 136114A For ARM2000: Part no. 136214A VBA VBAT AP100 ARM2000-4A2-01G Option / Pressure Gauge: G15-10-01 How to Order Symbol Individual IN Common IN G15 10 01 IN 1 Max. display pressure OUT IN 2 1 OUT 2 10 1.0 MPa Not able to set the pressure

Speed Controller: Standard Type Series AS Elbow Type (Metal Body) 1

(N specifications) How to Order AS4200-04 AS3200-03 01 S AS 2 2 0 0 AS2200-02 AS2200-01 Option Body size AS1200-M5 None With seal Nil 1 2 3 4 M3, M5 standard S K N 1 8 1 4 , standard standard standard AS1400-M3 Hexagonal lock nut 8 3 Electroless nickel plated 2 1 If more than one option is required, write option part numbers in the order of S, K, N.

PS-OMH0005CN

) 48(ZS-26-D) 48 (ZS-26-D) () (ZS-26-01) (ZS-26-B) 90 IP65(48IP40) 1/41/2 0.58 mm -13No.PS-OMH0005CN-D 2 -14No.PS-OMH0005CN-D FG () AWG No.

PSxx-OMS0004CN

-2No.PS-OMS0004CN-D / 1 1.5 *3) *3)1 1 [] -3No.PS-OMS0004CN-D () () () () -4No.PS-OMS0004CN-D () * C3604+AI203(96)FKM () ZS-31-X175 X188 () NG NG -5No.PS-OMS0004CN-D * (Nm) R1/8 35 R1/4 812 (50N ) () * () 6 33 ( ) () 10 m DC(-)() FG -6No.PS-OMS0004CN-D * ( ) () CE -1060 * 2030 10 1% * -7No.PS-OMS0004CN-D 0 01 PSE57 / M12(3m) 0 (01MPa) L M12(3m) 3 (-100100kPa) N 4

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Lead Wire Clamp/Lead Wire Cap (Option) CNS Series Lead wire clamp LC-01 Lead wire cap LP-01 ML1C CLS Lead Wire Clamp/Lead Wire Cap (Option) (mm) CLQ 25 32 40 Mounting position Series Series Lead wire clamp Lead wire cap A 124.8 148.8 173.8 LP-01 ML1C LC-01 ML1C MLGP B 113.2 137.2 162.2 25 32 40 Series Mounting position RLQ ML1C 177.5 A 128.5 152.5 B 123.5 147.5 172.5 MLU Operating Range Minimum

ML1C

LP-01 ML1C LC-01 25 32 40 Series Mounting position A B ML1C 177.5 128.5 152.5 123.5 147.5 172.5 D-M5 D-M5W D-M5T Lead wire cap Lead wire clamp Auto switch 14 11 Lead Wire Clamp/Lead Wire Cap (Option) 22 22 B A Lead wire clamp Lead wire cap Series LC-01 LP-01 ML1C (mm) 25 32 40 Mounting position Series A B 124.8 148.8 173.8 ML1C 113.2 137.2 162.2 Minimum Stroke for Auto Switch Mounting Operating

Speed Controller with Residual Pressure Release Valve: Standard Type Series AS



E In-line Type (Metal Body) 1

Specifications Air 1.5 MPa 1.0 MPa 0.05 MPa 5 to 60C (No freezing) 8 turns 0.8 mm2 Fluid Proof pressure Max. operating pressure Min. operating pressure Ambient and fluid temperature Number of needle rotations Effective area of residual exhaust valve How to Order JIS Symbol 01 AS 2 000 E Body size Port size 2 3 4 Port size Applicable series 01 02 03 04 1/8, 1/4 standard 3/8 standard 1/2 standard

Mist Separator Series AM Model Series AM can separate and Model AM850 AM250 AM350 AM450 AM550 AM650 AM150 remove oil mist in compressed air Rated flow 750 1500 2200 3500 6000 12000 300 (1) (l/min (ANR)) which is difficult to remove by Port size ordin

Please refer to p.4.5-7 for with pressure differential gauge (GD40-2-01). 4.6-6

Microspeed Cylinder

Elbow/Universal Type Flow rate and effective area AS221FM-02 AS221FM-01 Model AS121FM-M5 AS231FM-02 AS231FM-01 AS131FM-M5 3.2, 4, 6 6, 8 Metric sizes 3.2, 4 8, 10 4 6 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch sizes 1/8", 5/32" 5/32" 3/16" 38 (1.33) 7 (0.25) Flow rate l/min (ANR) (CFM) 12 (0.42) Controlled flow 0.6 (0.03) 0.2 (0.01) 0.1 (0.006) Effective area

ML1

40 Mounting position Series Series Lead wire clamp Lead wire cap A 124.8 148.8 173.8 LP-01 ML1C ML1C LC-01 B 113.2 137.2 162.2 25 32 40 Mounting position Series ML1C 177.5 A 128.5 152.5 B 123.5 147.5 172.5 4.7-11

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported 1

VS3135 A01-01 A01-02 A07-52 q Description Electrical entry VS3145 Solenoid cover Body 100 VAC 200 VAC Grommet A12-01 A12-02 A08-52 w e Spool/Sleeve 24 VDC A01-01-63 A01-02-63 A07-52-63 100 VAC 200 VAC Conduit terminal 24 VDC A12-01-63 A12-02-63 A08-52-63 Replacement Parts Material Part no. VS3135 XT019-6 XT013-13-2 XT010-15 Description VS3145 No.

VP4

exhaust center Closed center Exhaust center Silencer (AN101-01) Component Parts No.

Modular Type Air Filter Series AF

Drain guide 1/4 Note 4) AFM30, 40 Rc NPT G Nil C AFM20 to 40 1/8 1/4 3/8 1/2 3/4 01 02 03 04 06 R Flow direction: Right to left AFM20 to 40 N Note 1) Float type auto drain (N.O.)

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

A A1 MM U1 L1 RR1 A1 L1 E1 MM RR1 U1 0.4 0.2 + 0.2 + 0 0.2 0.4 0.2 0.4 10 12 16 20 +0.002 0 5 6.4 8 10 0.2 0.4 0.1 0.3 0.2 0.4 0.2 0.4 +0.002 0 5 6.5 8 10 #8-32UNC 10 12 16 20 12 16 20 25 10 12 16 20 14.6 16.6 21 25.6 RCS-01 RCS-015 RCS-02 RCS-025 RCD-01 RCD-015 RCD-02 RCD-025 21.5 32 34 41 6 6 6 8 16 25 25 30 #8-32UNC #8-32UNC #10-32UNF 1/4-28UNF 6.3 12 10.3 18 7 14 11.5 14

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Elbow/Universal Type Flow rate and effective area AS221FM-02 AS221FM-01 Model AS121FM-M5 AS231FM-02 AS231FM-01 AS131FM-M5 3.2, 4, 6 6, 8 Metric sizes 3.2, 4 8, 10 4 6 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch sizes 1/8", 5/32" 5/32" 3/16" l/min (ANR) {Nl/min} 38 7 Flow rate 12 Controlled flow Effective area mm 0.6 0.2 0.1 l/min (ANR) {Nl/min} 230 Flow rate

Digital Flow Switches, Series PF2A, Series PF2W

How to Order Integrated Display Type PF2A7 10 01 27 Flow rate range Thread type Unit specification 1 to 10l/min 5 to 50l/min 10 to 100l/min 20 to 200l/min 50 to 500l/min 10 50 11 21 51 Nil M Wiring specification With unit switching function Fixed SI unit Note) Nil N F Rc NPT G 3m lead wire with connector Without lead wire Nil N Note) Fixed units: Real-time flow rate: l/min Accumulated flow