CNA

Chromated Tie-rod Carbon steel @8 Bushing Lead-bronze casted @9 9-7-27 28 Series CNAW Dimensions Basic style (B): CNAWBN Rc BP unlocking port Rc BQ Rc P Plug with breathing hole GA Rc P Rod side cylinder port GB M GD GC 4-J Width across flats KA Cylinder port W Width across flats B1 With rod boot MM MM GL GR Q GL1 D e E D E T H1 8 f l AL AL F N F h + l W V K A M BN ZZ + l + 2 stroke C K A

Electric Actuator with Integrated Guide

P.68 Non-standard Motor Mounting P.69 Deflection Data P.71 Part Number Designations P 1 E F G LTF 6 100 R 2 X10 Motor specification Lead screw lead Series Series 6 Nil X10 F H L 6 8 Standard motor 6mm Cable length Non-standard motor 10mm Series 8 2 3 4 5 2m 20mm Motor specification 3m Motor output Nil G R Y Standard motor 4m Brake Matsushita Electric Industrial Co., Ltd. 5m Nil K E

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

Lock operation Number of auto switches E Spring locking (Exhaust locking) P Pneumatic locking (Pressure locking) D Spring and pneumatic locking Bore size Nil 2 pcs.

High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A

Rotary Actuator/Vane Type

F E Y2 F Y2 CRQ2X MSQX L L E MRQ 2 x Q4 2 x Q4 K K C B D G D G B C U H U H M T N M T 25.5 N (34.5: Connector type) 2 x R 1 2 x R Auto switch P P W1 W Auto switch Size: 20, 30 Size: 40 W W 2 67 8 15 8 When D-M9m is used 32.5 1.

HEC_W-E

Alarm Sequence Setting range : On, Off Indicated content : Use of temp. upper/lower limit alarm U p p e r / L o w e r T e m p . A l a r m S e q u e n c e M O D E < O f f sequence(Ex. : Off) Function : Determines whether or not temp. upper/lower limit alarm is output when power is turned on.

CM2

Dimensions are the same as the standard model. 2.35J 11.8 40 Construction: Refer to p.1.4-9 Dimensions: Refer to p.1.4-10 to 1.4-18 Construction: Refer to p.1.4-9 Dimensions: Refer to p.1.4-10 to 1.4-18 Refer to p.1.4-4 for other specifications.

Thermo-chiller

for Lasers Water-cooled refrigeration Air-cooled refrigeration Thermo-chiller HRLE Series How to Order/Specifications Air-cooled refrigeration . p. 9 Water-cooled refrigeration . p. 11 Cooling Capacity. p. 13 Pump Capacity. p. 13 Dimensions. . p. 14 Parts Description. p. 14 Recommended External Piping Flow. . p. 16 Cable Specifications. p. 16 Operation Display Panel. . p. 17 Alarm. p. 17

Integrated Controller

p. 44 Construction p. 46 Dimensions p. 47 Auto Switch Mounting p. 29, 53 Solid State Auto Switch, Normally Closed Solid State Auto Switch, 2-Color Indicator Solid State Auto Switch p. 30, 54 e-Actuator Electric Specifications p. 59 Wiring Examples p. 60 Operation Data Setting p. 61 Options p. 62 Slider Type Specific Product Precautions p. 33 Rod Type Specific Product Precautions

MG

0 r o @2 e !

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

How to Order w e r q t y u i o !

2 Phase Stepper Motor/Without Motor Brake Series LXS

B Cross section C-C D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 LXSH5SB-50B LXSH5SB-75B LXSH5SB-100B LXSH5SB-125B LXSH5SB-150B Refer to page 301 for mounting.

Cylinder with Lock

Lock unit Rod 4 C O N T E N T S Cylinder with Lock CP96N/C96N Series Model Selection p. 6 Working Principle p. 8 CP96N Series VCP96N Series/Double Acting, Single Rod/Double Rod How to Order p. 9 Specifications p. 10 Construction (Single Rod) p. 12 Dimensions (Single Rod) p. 13 Construction (Double Rod) p. 16 Dimensions (Double Rod) p. 17 Auto Switch Mounting p. 23 VAccessories p

CC

The speed will be approximately 1.4 times the date given on p.4.12-3.

This is a legacy product, and replaced byZSE20-P-01-L, SWITCH, VACUUM SERIES, ZSE30 VACUUM SWITCH, JC, ZSE30 1/8 PORTED, .28287 lb, ModelRated pressure rangeSet pressure rangeWithstand pressureMinimum unit settingApplicable fluidPower supply voltageCurrent consumptionSwitch output--RepeatabilityHystere- sisAnalog outputDisplayDisplay accuracyIndicator lightEnviron- ment resistanceTemperature

Stations: 01 (1 Station), Piping: B (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: P (w/o Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 40 (5 to 40 L/min), Return Unit Components: W (w/Flow Adj.

Stations: 01 (1 Station), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Supply Unit Components: S (w/Flow Adj. Valve; Stop Valve: None), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 20 (2 to 16 L/min), Return Unit Components: P (w/o Flow Adj.

Stations: 01 (1 Station), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Supply Unit Components: P (w/o Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 40 (5 to 40 L/min), Return Unit Components: W (w/Flow Adj.

Air Fittings Fitting Series For Special Environment

Male elbow: KRL Inch e l b a c i l p p A . D .

JXCx-OMU0004

RESET B 8.3 P.41 RESET C OFF I/O STOP OFF OFF 8.5 ONP.44 RESET C D RESET C RESET D 66 No.JXC-OMU0004-A (M24V) RESET D RESET D 3.4 P.14 (C24V) RESET D RESET D ( E ) 67 No.JXC-OMU0004-A E ON E BK RLS E EEPROM EEPROM E 10 CPU CPU E 68 No.JXC-OMU0004-A 13. / 50mm ( ) 5m 5m 10% 15m 20% 69 No.JXC-OMU0004-A 14. / 14.1.