) w/Connector (w/Connector Cover)], Check Valve: None, Fitting (V Port): 0 [w/o Fitting (M5 x 0.8)], Fitting (P Port): 0 [w/o Fitting (M5 x 0.8)]

Size: 3 (3 Port Valve), Handle Prevention: A (w/Handle Prevention Function), P Side Port Size: M5, A Side Port Size: M5, Knob Color: R (Red), Bracket: L (L Bracket)

Digital Flow Switch (Integrated display type)

L/min Instantaneous Setting/display flow range 1 2 125 to 3025 L/min 250 to 6050 L/min 550 to 12050 L/min flow Min. setting/display unit 5 L/min 10 L/min Flow Accumulated Setting/display flow range 0 to 9 L Flow Min. setting/display unit 1 L Reference condition 3 Standard condition, Normal condition 4 Pressure Rated pressure range 0.1 to 1.5 MPa Proof pressure 2.25 MPa NPN open collector

HRX-OM-R026

[mg/L] 70 or less 200 or less Calcium hardness [mg/L] 50 or less 150 or less Ion silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Not detected Not detected Referential Ammonium ion [mg/L] 0.1 or less 1.0 or less item Residual chlorine [mg/L] 0.3 or less 0.3 or less Separation carbonic acid [mg/L] 4.0 or less

XL-OMY0001

XLA-16-2 XLA-25-2 XLA-40-2 XLA-50-2 XLA-63-2 XLA-80-2 16 25 40 50 63 80 5605150 -6 Pa(abs) 110 l/s 1 5 14 45 80 160 200 10 FKM1.310 3/s Pam -11 FKM1.310 KFNW KFNW KDN SUS316L,SUS304,FKM MPa(G) 0.40.7 3 2 0.5MPa 31 61 220 390 680 1420 cm M5 Rc1/8 kg 0.28 0.47 1.1 1.7 3.1 5.1 1 21 9 XL-OMY0001 4-2 XLA-25-2 XLA-40-2 XLA-50-2 AC90240V XL1A25-60S-1 XL1A25-60S-1 1 1 H4 AC100V 200

XSA Series

Exterior dimensions Grommet: G Face seal fitting / compression fitting Terminal part Flat terminal connector 250 Series Model A B Bs C D E F L M P [inch] Grommet: G Grommet: GS Conduit: C Fast on: F DIN terminal: D Terminal: T G H G H G H G H G H J G H J XSA1-2S 22 55 24 63 30 8.5 20 3 8 27 53.5 30 40 47.5 47.5 23 53.5 64.5 45.5 52.5 99.5 47.5 68.5 -2V 50 1/4 XSA2-2S 63 31.5 73.5 63 32.5

Magnet Gripper Unit for Collaborative Robots

Refer to P.18 for assembling method. PNP output Conversion cable M8 8 Pin connector (Plug) PIN No.

Magnet Gripper Unit for Collaborative Robots

Refer to P.18 for assembling method. NPN output M8 8 Pin connector (Plug) PIN No.

High Pressure Coolant Valve

) 301 (303) 60 77 96 113 46 60 76 85 34 40 50 60 24 36 41 50 135 164.5 200 219 50 60 79 90 77 1 8 1 2 3 x 3 4 3 x 1 1 4 95.5 111 119 VNH VNH 1 4 VND Note) ( ): CE-compliant product (-Q) VCC Model J K L M N O P Q R S T U VNH1 -10A A B VNH2 -15A A B VNH3 -20A A B VNH4 -25A A B M5 x 0.8 depth 5.5 M6 x 1 depth 6 M8 x 1.25 depth 6 M8 x 1.25 depth 6 20 24 24 29 36 48 51 25 30 35 38 30 40 50 56

Size: 2 (2 Port Valve), Handle Prevention: A (w/Handle Prevention Function), P Side Port Size: M5, A Side Port Size: 04F (Ø4), Knob Color: 2 Port Valve: Gray/3 Port Valve: Blue; w/Exception of P Port 11F and A Port 11F/36S Valve Gray, Bracket: L (L Bracket)

Size: 2 (2 Port Valve), Handle Prevention: A (w/Handle Prevention Function), P Side Port Size: 06F (Ø6), A Side Port Size: M5, Knob Color: 2 Port Valve: Gray/3 Port Valve: Blue; w/Exception of P Port 11F and A Port 11F/36S Valve Gray, Bracket: L (L Bracket)

Size: 3 (3 Port Valve), Handle Prevention: A (w/Handle Prevention Function), P Side Port Size: 04F (Ø4), A Side Port Size: M5, Knob Color: 2 Port Valve: Gray/3 Port Valve: Blue; w/Exception of P Port 11F and A Port 11F/36S Valve Gray, Bracket: L (L Bracket)

HRX-OM-W032

less 200 or less Calcium hardness [mg/L] 50 or less 150 or less Ionic silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Should not be Should not be Referential detected any detected any item Ammonium ion [mg/L] 0.1 or less 1.0 or less Residual chlorine [mg/L] 0.3 or less 0.3 or less Free carbon dioxide [mg/L]

Guide Table Series MGF ø40, ø63, ø100 Low-profile compact cylinder utilizes a large concentric guiding sleeve to provide excellent eccentric load resistance.  Mounting height greatly reduced  Built-in non-rotating mechanism Internal guide pin prevents

40 50 100 200 300 400 1 5 4 MGG 10 20 30 40 50 100 200 300 400 10 50 100 5 10 50 100 Eccentric distance : l (mm) Eccentric distance : l (mm) Stroke (mm) Stroke (mm) MGC l = 200 mm Graph l = 300 mm Graph v = 150 mm/s or less Graph v = 200 mm/s or less Graph MGF 20 300 300 MGZ 200 200 MGF100 MGF100 20 MGT 100 100 MGF100 MGF100 10 MGF100 MGF100 50 40 50 40 MGF63 MGF63 Load mass: m0 (kg) Load

KK

fitting Elbow with One-touch fitting Bulkhead with One-touch fitting Symbol M F N H L E Socket/Plug designation S P Socket Plug Piping port size variation Male/Female thread type One-touch fitting type Nut fitting type Thread size M5 x 0.8 R, Rc 1/8 R, Rc 1/4 R, Rc 3/8 R, Rc 1/2 R, Rc 3/4 Symbol M5 01 02 03 04 06 Symbol 23 04 06 08 10 12 16 Symbol 50 60 65 80 85 110 Applicable tubing O.D

Guide Table Series MGF ø40, ø63, ø100 1

40 50 40 DMGF63 Load weight m0 (kg) Load weight m0 (kg) Load weight m (kg) Load weight m (kg) 30 30 20 -X 20 20 MGF40 MGF40 20MGF40 MGF40 10 10 10 MGF40 Data MGF40 10 5 4 3 5 4 3 2 2 5 5 1 10 20 30 40 50 100 200 300 400 1 5 4 10 20 30 40 50 100 200 300 400 5 10 50 100 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) l = 200 mm l = 300 mm Graph (3) Graph

ZPT/ZPX

H A 30 ZPNA-M22 34.6 Bolts Dimensions (mm) A 11 d M3 x 0.5 12 7 M4 x 0.7 B 5.5 L 8 8 10 15 8.5 M5 x 0.8 13-11-82

Air cylinder

L 100mm, or stroke 1 2 1 7 5 4 6 2 6 5 7 3 L L Fig. 14 Position for application of grease Table 9 Amount of grease units: g Stroke 40 50 63 80 100 P o s i t i o n f o r Bore g r e a s e At 100st 3 to 4 3 to 5 4 to 5 6 to 8 8 to 10 50st added 1 1 1.5 2 3 28 3-2-4. Mounting of seals 1) Rod seal, Cushion seal (Fig.14, ) Pay attention to the mounting direction of the seal.

Series 10-, 21- AF-A Air Filter

Fittings & Tubing Air Cylinders Rotary Actuators Bracket (Option) Bracket (Option) R R V Q V Q IN OUT B C IN OUT Clearance for maintenance G B C 2 x P (Port size) 2 x P (Port size) Hexagon width across flats 14 1/8 Drain Hexagon width across flats 17 1/4 E A Clearance for maintenance G Drain A AF50/60-A 1021J D M U S N T Bracket (Option) R V Q C B IN OUT 2 x P (Port size) Hexagon width across

EX260-SEN_eng

Designation Description Fieldbus interface connector (BUS IN) EtherNet/IPTM connection PORT 1 (M12 4-pin socket, D-coded) 4 2 SI24 V +24 V for SI unit operation 2 1 SV24 V +24 V for solenoid valve 2 Power supply connector Power supply with load voltage for valves and operating voltage for SI unit (M12 4-pin plug, A-coded) 3 1 3 SI0 V 0 V for SI unit operation MS NS L/A1 L/A2 PWR(V) 4 Ground