Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Clean Room Specification 11-LEFS Series LEFS16, 25, 32, 40

How to Order 11 LEFS 100 B 1 1 S K 6N 16 w e r t u y o i !0 !1 !2 !

Step Motor (Servo/24 VDC) Electric Actuator Miniature Rod Type LEPY Series LEPY6, 10

Step Motor (Servo/24 VDC) Electric Actuator Miniature Rod Type LEPY Series LEPY6, 10 How to Order LEPY 10 K 50 1 1 R 6N q w e r t y u i o !

Series 12-REA Sine rodless cylinder

x10 12REA 50/63 0 -0.2 L NA 33 2-Rc, NPT, G 1/4 14 14 E(h8) E(h8) X D I 4-TC 14 14 Effective thread depth R 23 22 K W 23 25 2 4-M8 x 1.25 25 8-Q 14.5 C 0.1 + Effective thread depth 12 Effective thread depth R B S + Stroke 2 ZZ + Stroke Q x R S TC x R Model L 122 110 K 38 32 C 70 60 X ZZ NA E D B 72.2 58.2 I 70 60 W 12-REA63 12-REA50 100 86 66 53 30-0.033 69 55 M10 x 1.5 x 16 M8 x 1.25 x

CYP

60 100 Q 105 138 QW 48 87 R 45 79.5 T 23 29 TA 13 17 TB 18 22 W 69 115 WA 32 46 WB 17 27 Y 2.5 3.5 Z 118 155 L 67 90 Model CYP15 CYP32 Note 1) These dimension drawings indicate the case of piping port position "Nil".

VNB

Description Material Bronze Note Clear coated Cover assembly Body q Platinum silver painted Aluminum alloy Brass w e Plate assembly Valve element Piston assembly Return spring Pilot solenoid valve Valve material (NBR, FKM, EPR) Stainless steel or brass Valve material (NBR, FKM, EPR) r t y u Aluminum alloy Piano wire Note) Parts e and r are for selection of valve composition.

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

0oi q w e r t y u i !1 !2 No.

Ejector Valve Unit Series ZYY/ZYX

Note 2) V, S and R specifications are 45T, 45T1.

Air Slide Table/Long Stroke Type Series MXY

q r u #0 MXH MXU !

Cylinder with Lock Series CLS

0 i o @1 @0 @3 q w !9 %7 $1 $2 $3 $6 %2 %3 %4 %6 $8 $9 ^6 $0 #3 y u !1#1 @9 #4^2^7^5^1 ^3 ^4 ^8 #0 @5 #2 $5 $4 %0 %1 t y CLJ2 !2 !1 !3 u CLM2 !4 !6 !7 CLG1 !5 CL1 e !8 r ^2 t #6 #7 #8#5#9 $7 %5 ^0 MLGC CNG $2 ^3 ^9 ^0 &0 180, 200, 250 Steel tube Component Parts Component Parts MNB No. Description Material Note No.

IC

Note 2) Since the electro-pneumatic regulator connection cable w and the cable for external Sensor pressure port (M5 x 0.8 x 7) IC e e r sensor r are identical in shape, take precautions against erroneous connection. w VBA w Internal Circuit and Connection VE VY1 Brown SW1_OUT power supply(+) Red 12 to 24 VDC Load For the setting procedure and detailed cable connection specifications, please

ZSE1/ISE1

ZS-20-A 16 NPN open collector 2 output w/o analog output, 3 turns adjustment With lead wireZS-20-5A17 NPN open collector 2 output w/o analog output, 200 degrees adjustment Note) When ordering switch with 5 m long lead wire, indicate both part numbers. Lead wire length 18 NPN open collector 1 output w/analog output, 3 turns adjustment 0.6 m Nil Ex.) ZSE1-01-15CN1 pc.

Compact Pressure Switch Series ZSE1 (For Vacuum)/ISE1 (For Positive Pressure)

1/8 M5 x 0.8 depth 5 Piping port 2 x 3.5 Mounting hole T1: NPTF 1/8 01: R 1/8 13 13 777

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

= 26n + 172 11 to 16 stations: W = 26n + 199 2 to 10 stations: W = 54n + 227 11 to 16 stations: W = 54n + 264 Note 3) SY3000 Weight W (g) n: Stations (D-sub connector) Main valve/pilot valve common exhaust type Internal pilot External pilot Pilot exhaust type Pilot valve individual exhaust type SY5000 Lubrication Not required Unrestricted 150/30 Dust proof Mounting orientation Impact/Vibration

Rubber Seal 5 Port Solenoid Valve Series SX3000/5000

= 26n + 172 11 to 16 stations: W = 26n + 199 Note 3) SX3000 Weight W (g) n: Stations Lubrication Not required Unrestricted 150/30 Dust proof 2 to 10 stations : W = 54n + 227 11 to 16 stations: W = 54n + 264 SX5000 Mounting orientation Impact/Vibration resistance m/s Note) Note 1) Available with up to 16 solenoids.

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

R.

IDX-OM-W035

IDX-OM-W035-B / Series IDFB22E-11 IDFB22E-11 K,R,S,T,V IDFB22E-23 IDFB22E-23 K,R,T,V IDFB37E-23 IDFB37E-23 K,R,T,V IDFB55E-46 IDFB55E-46 L,R,T,V IDFB75E-46 IDFB75E-46 L,R,T,V URLhttps://www.smcworld.com/ English instruction manual can be downloaded from our URLhttps://www.smcworld.com/ SMC () * 1 ) JIS B8370 * 2 ) ISO4414 *1) ISO4414Pneumatic fluid power General rules and safety requirements

Manifold Specifications

VVZS3000-4-1 VVZS2000-4 14.4 x 12 x 1.2 7.5 x 4.5 x 1.5 VVZS2000-11-n (1) q Description Material Seal B Seal A NBR NBR NBR NBR Carbon steel Carbon steel Note 1) n: Stations Note 2) Manifold block assembly is attached with tie-rod for increasing stations. w e O-ring O-ring r t Tie-rod y Tie-rod for station addition VVZS2000-11-1-1 (2) Assembly part no.

Manifold Specifications

VVZS3000-4-1 VVZS3000-4-2 18 x 15 x 1.5 7.5 x 4.5 x 1.5 VVZS3000-5-n (1) Seal B Seal A NBR NBR NBR NBR Carbon steel Carbon steel w e O-ring O-ring r t Tie-rod y Tie-rod for station addition VVZS3000-5-1-1 (2) Note 1) n: Stations Note 2) Manifold block assembly is attached with tie-rod for increasing stations. Assembly part no.

HRX-OM-R016

A Cooling capacity Note 4) The cooling capacity reduces about 300 W from the value in the catalog.

CEx-OMQ0011

ML2B32 15N Va 0.25m/s 0.5MPa L1 0.05m L2 0.05m W W 1 L L1 W W W M We M3 V M1 V <> W max=60N( Va P 19) a1= W = 15 =0.25 W max 60 M 2 max=2Nm( Va P 19) a2= M = 0.75 =0.375 M max 2 <> We=1.410VaW=1.4100.2515=52.2N M max=3.5Nm( V=1.4Va) M 3 WeL 1 =52.50.05 1 =0.88Nm 3 3 a3= M 3 = 0.88 =0.25 M 3max 3.5 M max=12Nm( V=1.4Va) M 1 WeL 1 1 =52.50.05 1 =0.88Nm 3 3 a4= M 1 =