100

9 ZL6 Without valve or pressure switch, Silencer exhaust ZL6 With valve and pressure switch, Port exhaust @1 !2 !3 !1 !6 !8 !7 q !4 r y w t e t u i @0 !5 y !9 Component Parts No. Description Material Note No.

ML2B

9 !8 !7 !1 r #6 @3 #9 @7 y u t !5 #8 #9 @7 w !6 e q #5 #4 $9 $1 $0 ^1 ^0 $7 $8 ^0 !2 #2 @4 !3 %0 %1 %2 !0 @2 ^3 @1 #3 ^6 $6 %3 @6 $5 ^2 %5 %6 @5 $4 ^0 $3 #1 ^5 %7 @8 $2 o %8 ^7 #0 %9 ML2BS %4 ^4 !

Multi-channel Digital Sensor Monitor ( compatible)

Incorrect internal data processing of the product (Er0, 4, 6, 7, 8 and 9) Check if there is a noise source nearby. System error (Er0, 4, 6, 7, 8, 9) is displayed. (2) Check if the power supply voltage is in the range 12 to 24 VDC 10%. (2) Supply power in the range 12 to 24 VDC 10%.

Low-Speed Rotary Actuator

Description Qty. 9 Wear ring 4 9 Wear ring 4 9 Wear ring 4 9 Wear ring 4 9 Wear ring 4 Parts includid 19 Gasket for cover 2 19 Gasket for cover 2 19 Seal 1 19 Seal 1 19 Seal 1 in seal kit 20 Gasket for end cover 1 20 Gasket for end cover 1 20 Gasket 4 20 Gasket 4 20 Gasket 4 21 Piston seal 4 21 Piston seal 4 21 Piston seal 4 21 Piston seal 4 21 Piston seal 4 22 Seal washer 2 22 Seal washer

LEC-OM038xx

Outlines of Product. 7 2. 1 Features. 7 2. 2 How to Order . 7 2. 3 Structure of the product . 8 2. 4 Procedure How to start the actuator) . 9 (1) Checking the content of the package . 9 (2) Mounting the unit. 9 (3) Initial setting of the connect controller. 9 (4) Setting the unit. 9 (5) Unit wiring / Connection. 9 (6) Power supply .10 (7) Operation .10 3.

Air Combination

Note) -23- 9. Disassembly Drawing 9-1. F.R.L. Combination Lubricator Spacer with bracket Regulator Spacer with bracket Air filter 9-2. Spacer with bracket 9-3. Spacer (1) Seal Retainer A Retainer B (1) Seal Retainer A Bracket Hexagon socket head cap screws Spacer Hexagon socket head cap screws Spacer -24- 10. Dimensions 10-1.

High Vacuum L Type Valve

-2-9-1A ** XLD100-2-9-1A ** XLD160-2-9-1A ** Assy (4) Initial pumping Standard AS568-020V valve seal (5).

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

50 9 Speed Controller with One-touch Fittings Stainless Series, In-line Type Series AS-FG Construction Component Parts No.

Wedge Cam Operation Provides

9 are supplied in one unit for each seal kit. Designate the part number for each bore size when ordering.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

1/4, 3/8-2 port 2, 4 port 1/8 12 port 1/8 14 port VQ7 VV71-(M Connector type) EVS VFN 100 80 100 80 37 23 U-side 9 2n-1/4, 3/8 14 9 U-side 15 PE port Indicator light Manual override R 4.5 R 4.5 53.5 53.5 9 9 38 9 B B 20 14 12 P = 43 A P = 43 PA 23 A A B B 14 12 A PA PA L1 L2 L2 L1 B B B 14 12 A A A A B 14 A A PA B B (2n 1/8) 4n-1/4, 3/8 2, 4 port PA L-side R-side L-side R-side D-side D-side

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 VP7 285.5 21 273 No.

,,: ,.

7 t16-20 718 1.54 . 1 8 9 5/16 1t8 1/2-20 1/2 . 1 4 .220 5/r 6 'l 14 1t2-20 9/16 1.32 .220 5/16 318 'lt2-20 1 1 / 1 6t.!

o

Body Ported TUpe: Single Solenoid inch (mm) crommet (G) : NvJ3120O-CGO-M3 NVJ31200-OHO-M3 With Foot Bracket (F) (NVJ3i2C) (for loot type bEckel order with "F" suffix) Note: Factory installed only. _ l I I t : t Body B.ackel (D NVJ3(2,3,4,5)2O vJ300G13-1 9,!9!! 1r sr {3ool vJ3000 + 13 I Lead wn lenqlh 4.23 {5 al I 95r19!

o

Body Ported TUpe: Single Solenoid inch (mm) crommet (G) : NvJ3120O-CGO-M3 NVJ31200-OHO-M3 With Foot Bracket (F) (NVJ3i2C) (for loot type bEckel order with "F" suffix) Note: Factory installed only. _ l I I t : t Body B.ackel (D NVJ3(2,3,4,5)2O vJ300G13-1 9,!9!! 1r sr {3ool vJ3000 + 13 I Lead wn lenqlh 4.23 {5 al I 95r19!

48

9 !9 t @0 @1 !0 !6 !8 !5 o Component Parts Description No.

Cylinder with Lock Series CLS

Unlocked condition (when air is supplied.) 788 Double Acting, Single Rod Series CLS Cylinder with Lock Construction @7 @4 @8 @6 %8 @2 %9 @7 !0 i o @1 @0 @3 q w !9 %7 $1 $2 $3 $6 %2 %3 %4 %6 $8 $9 ^6 $0 #3 y u !1#1 @9 #4^2^7^5^1 ^3 ^4 ^8 #0 @5 #2 $5 $4 %0 %1 t y CLJ2 !2 !1 !3 u CLM2 !4 !6 !7 CLG1 !5 CL1 e !

Compact Cylinder with Air Cushion Series RQ

K ( across flats) YB-03 32, 40 11.5 depth 7.5 34 9 25 7 12 H (With locking) YB-05 50, 63 14.5 depth 8.5 42 11 32 9 12 YB-08 80 18 depth 12 52 13 38 11 16 d1 d2 YB-10 100 21 depth 14 62 17 50 14 19 L UT Mass (g) Bore size (mm) RS W T1 V T2 Part no. C UA DMaterial: Chrome molybdenum steel (Nickel plated) YB-03 32, 40 9 50 80 18 6.5 10 Part no.

/

M 33 33 36 36 L 72.5 80.5 92.5 99 M 51.5 51.5 54 54 L 73.5 81.5 93.5 100 M 68.5 68.5 71 71 N 56.5 56.5 59 59 L 72.5 80.5 92.5 99 M 103.5 103.5 106 106 N 72.5 72.5 75 75 1/4, 3/8 1/2 3/4 1/1 28 35 43 45 7.5 8.5 9 9 5.5 6.5 6.5 6.5 26 33 40 45.5 1.6 2.3 2.6 2.6 14 17 22 22 67 75 87 92 52 60 68 73 77.5 85.5 97.5 104 VXEZ2230 VXEZ2240 VXEZ2350 VXEZ2360 42 Series VXE21/22/23 For Air/Water/Oil

Rotary Actuator/Vane Style Series CRB1

Free mount type Series CRBU2 CDRBU2W20,30 P611060-8 P611010-8 P611010-9 P411020-8 P411020-9 P411040-8 P411040-9 CDRBU2W40 Vane type Model CDRB2BWU10 CDRB2BWU15 CDRB2BWU20 CDRB2BWU30 CDRB2BWU40 CDRBU2WU10 CDRBU2WU15 CDRBU2WU20 CDRBU2WU30 CDRBU2WU40 Unit part no.

IDX-OM-W025

Specification for Option K 9 1 Safety instructions . 9 1 9 2 Specifications . 9 1 Chapter 10 Specification for Option L 10 1 Safety instructions . 10 1 10 2 Specification . 10 1 10 3 Maintenance . 10 2 Chapter 11 Specification for Option M 11 1 Safety instructions . 11 1 11 2 Specifications . 11 2 11 3 Cautions for handling the motor type auto drain . 11 2 11 4 Electric circuit . 11 2 Chapter