Series SV

L dimension L dimension 8 6 5 4 3 2 7 1 0 0 7 98 185.5 7 5 4 3 2 1 6 0 1 8 110.5 198 0 7 6 5 4 3 8 2 1 2 9 123 210.5 1 M12 input block (n) 8 7 6 5 4 3 2 3 10 135.5 223 2 L dimension 9 8 7 6 5 4 4 11 148 235.5 3 10 9 8 7 6 5 12 160.5 248 4 Connector type: For M (m + n = 2 to 8) 10 9 8 7 6 173 5 11 10 9 6 1) When a DIN rail other than the above is required, refer to the separate DIN rail dimensions

High Vacuum Angle Valve

w Standard XL XL Special Standard XLQ Special Standard Common XM XY Special XLD50-2-9-1A AS568-016V AS568-009V XLD63-2-9-1A XLD80-2-9-1A XLD100-2-9-1A Standard S valve seal assembly r XLD(V) DXLD40-2-9-1A AS568-016 XLD50-2-9-1A AS568-016 XLD63-2-9-1AXLD80-2-9-1A XLD160-2-9-1A AS568-020 AS568-009 XLD100-2-9-1A Special Note 1) In cases where the seal material is other than the standard (FKM

LX

1 CCW CCW 8 9 9 5 4 14 13 12 R 330 PD input 1 PD 8 11 F Functions Function change-over switch Input signal terminal CW pulse input terminal By applying the pulse input, the actuator moves from the motor side to the end side.

SYJ300/500/700

49.6 [56.6] 63.6 34.2 48.5 54.1 M8 x 1 36.6 Approx. 300 (Lead wire length) 60.7 [67.7] Pg7 6 6 6 6 65.5 [67.7] 55.7 [57.9] 75.5 64.6 57.2 50.7 42 42 42 42 34.7 17 9 17 9 17 9 17 9 8.5 8.5 8.5 8.5 21 21 21 21 44.5 44.5 44.5 44.5 Refe page 4-4-61 for dimensions with connector cable. 4-4-23 Series SYJ500 Manifold Specifications Manifold Specifications Type 20 Type 40 Type 41 For internal pilot

Battery-less

9 o @1 @2 !1 !9 @0 !8 @0 !0 !8 !4 u u !2 !3 i e !5 r t w q y !6 !

Electric Actuator

Dot color 1 2 3 4 5 6 7 8 9 10 11 Insulation color Dot mark Pin no.

MNB

50 50 5 10 14 10 7.5 0 3.5 2.5 15 46 39 39.5 48.5 9 63 63 5 10 14 10 7.5 0 3.5 2.5 15 52.5 46.5 46.5 55 13 80 80 9 14 15.5 11.5 9 2.5 5 6.5 16.5 59.5 55 55 62 13 100 100 9 14 15.5 11.5 9 2.5 5 6.5 16.5 12 Series MDNB Auto Switch Internal Circuits Reed Switch Internal Circuits D-A53 D-A64 D-A59W Reed switch LED Choke coil Choke coil OUT(+) Brown [Red] OUT(-) Blue [Black] OUT(+) Brown [Red]

NCQ8

OUT (-) Blue Dimensions 0.35(9) 9 0.17 (4.4) Switch operating position (ON) 0.13 (3.4) 0.71(18) Note) Reed switch: 0.08" (2 mm) or less Solid state switch: 0.04" (1 mm) or less Hysteresis 0.13 1.5(38) 061(15.5) 1.81(46) (3.4) *Figures in parentheses are millimeter (mm).

Step Motor Controller

Shield 12 13 7 6 9 8 3 B-4 A-4 B-5 A-5 B-6 A-6 Vcc GND A A B B Brown Black Red Black Orange Black Connector B terminal no.

C76

9 @0 q w e r t y u i o !

C76

9 @0 q w e r t y u i o !

CNG

For details, refer to page 9-15-65. With pre-wire connector is available for D-G5NTL, G5NBL type, too. For details, refer to page 9-15-66. 9-5-22

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

9 10 12 15 BA 54 62 74 92 112 BB CA 9.5 10.5 11.5 13 14 K 9 9 10 11 12 NB Model +0.025 0 +0.025 0 +0.030 0 +0.030 0 +0.036 0 0 -0.036 0 -0.036 0 -0.036 0 -0.043 0 -0.043 MHSH3-32D MHSH3-40D MHSH3-50D MHSH3-63D MHSH3-80D 6 7 9 11 12 54.5 2H9 3H9 4H9 6H9 8H9 8h9 8h9 MRHQ 62.5 74.5 10h9 MA 92.5 12h9 112.5 14h9 DWA SA 4.2 4.2 5.1 6.6 6.6 R 44 52 63 78 98 ZC 9 9 10 12 15 SB 8 8 9.5 11 11 ZB 7.4

MGG

9 is type L only. r!1!6!7!8!9@0@1@2@3@6@9#0#1#3#4#5#6#7 -XC6A 63, 80, 100 !7 is type L only, #1 is type B only, #9 and $0 are type F only. r!0!5!6!7!8!9@0@1@3@4@7@8@9#1#2#3#4#5#9$0 20, 25, 32, 40, 50 #1 is rod side only. r!1!7@0@1@2@3#1#5 -XC6B 63, 80, 100 @9 is rod side only. r!0!5!8!9@0@1@9#3 20, 25, 32, 40,50 r!1@0 -XC6C 63, 80, 100 r!0!

CLQ

For details, refer to page 9-15-1.

Table of Contents

9 3 63 41 6.5 8 Bracket A Bracket A AMJ Misc.

NCM

Note 9) Stainless steel rod standard on 7/16", 9/16", 3/4" and 7/8". Note 10) Exclude 7/16" and 9/16". Note 11) Exclude 2".

Fieldbus System

Nil Internal pilot Internal pilot, Built-in silencer External pilot External pilot, Built-in silencer Nil None 1 station S Note) R RS Note) 1 9 9 stations Note) When the built-in silencer type is used, keep the exhaust port from coming in direct contact with water or other liquids.

VS 8-2/VS 8-4

Single wiring 5 6 7 8 9 10 19 20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 1 2 3 4 5 6 7 8 9 10 1 2 3 4 NEW CONCEPT N.C. valve N.C. valve N.C. valve N.O. valve N.O. valve N.O. valve 5 6 7 8 9 10 1 2 3 4 R2 B R1 A P IP65 enclosure compliant kit (Lead wire) M 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 5 (R1) 3 (R2) 5 (R1) 3 (R2) 5 (R1) 3 (R2) 1 2 3 4 4 (A) 2 (B) 4 (A) 2 (B) 4 (A

Aluminum High Vacuum Angle Valve

1A AS568-016V XM XY AS568-009V XLD63-2-9-1A XLD80-2-9-1A XLD100-2-9-1A XLD160-2-9-1A Standard S valve seal assembly r XLD(V) XLD40-2-9-1A AS568-016 XLD50-2-9-1A AS568-016 XLD63-2-9-1AXLD80-2-9-1A AS568-009 XLD100-2-9-1A XLD160-2-9-1A Special DNote 3) In cases where the seal material is other than the standard (FKM: includes Compound no. 1349-80: made by Mitsubishi Cable Industries, Inc.