CE

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 RZQ MI W S CEP1 Component Parts CE1 No. No.

VVX31/32/33

4 7,, 9= 5,'., ?4 , 9= 5,'., ?4 77, 9= 5,'., ?4 70, 9= 5,'., ?4 0( 9= 5,'., ?

AC Servo Motor Driver (Pulse input type)

Reverse rotation is indicated by a minus (-) sign. -9 9 pulse 5 Command pulse frequency The frequency of the position command input pulses is displayed. Reverse rotation is indicated by a minus (-) sign. (Note) The value will be -1500 to 1500 kpulse/s when kpulse/ -9 s 9 inputting command pulse.

IDX-OM-X011

Option M . 9-1 9.1 Safety instructions for use . 9-1 9.2 Specifications . 9-2 9.3 Installation of Motor type Auto Drain . 9-3 9.4 Electrical circuit diagram . 9-3 Chapter 10 Option R . 10-1 10.1 Safety instructions for use . 10-1 10.2 Specifications . 10-1 10.3 Connection of power supply . 10-2 10.4 Handling Precautions of the Earth Leakage Breaker . 10-2 10.5 Electrical circuit diagram .

IDX-OM-W022

Specification for Option L 9 1 Safety instructions . 9 1 9 2 Specification . 9 1 9 3 Installation of heavy duty auto drain . 9 2 9 4 Maintenance . 9 2 Chapter 10 Specification for Option M 10 1 Safety instructions . 10 1 10 2 Specifications . 10 2 10 3 Installation of motor type auto drain . 10 3 10 4 Electric circuit . 10 3 Chapter 11 Specification for Option R 11 1 Safety instructions .11

IDX-OM-W032

L 9 L 9-1 1.1 2 2. 3

Profile Design ISO/VDMA Air Cylinder Series CP95

100 113 60 89 41 5 25 10 55 20 20 11 12 115 110 60 Mounting type E Bore d2 CK S5 K1 K2 l3 G1 l1 G2 EM G3 CA H6 R1 32 11 10 6.6 38 51 10 21 7 18 26 31 32 8 10 40 11 12 6.6 41 54 10 24 9 22 28 35 36 10 11 50 15 12 9 50 65 12 33 11 30 32 45 45 12 12 63 15 16 9 52 67 14 37 11 35 40 50 50 12 15 80 18 16 11 66 86 18 47 12.5 40 50 60 63 14 15 100 18 20 11 76 96 20 55 13.5 50 60 70 71 15 19 Mounting

Compact Cylinder Series NCQ8

Bore E 056 (9/16") 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2") 250 (2-1/2") 0.20 0.25 0.25 0.34 0.34 0.41 12

Sine Rodless Cylinder Series REBR Direct Mount Type

9 !7 !1 !2 !0 #0 r t u @9 !6 e #5 #4 w #3 @5 @7 @4 @6 REBH15 @8 @3 Parts list Parts list No. Description Material Note No.

IZx-OMT0049

Examine the emitter tip with a magnifier. 1) If dust or dirt is found on the emitter, clean the emitter referring to [9. Maintenance]. 2)Wearing or breakage of the emitter. Examine the emitter tip with a magnifier. 1) If dust or dirt is found on the emitter, clean the emitter referring to [9.

HRX-OM-W004

Serial communication connector 5 1 9 6 Dsub 9 pin female (socket) type Connector for contact input / output signal 8 1 15 9 Dsub 15 pin female (socket) type Fig 1.2-1 Communication port HRR Series 1.2 Communication port 1-3 HRX-OM-W004 Chapter 1 Read before using 1.3 Key operations Fig 1.3-1Key operation(1/4) and Fig1.3-4 Key operation(4/4) show the operation of keys of the thermo-chiller

CLA

D-F 9~V comply With IEC529, IP65, and JISC0920 Jet stream proof structure.

Stroke Reading Cylinder and Counter

0 i @3 o @4 @8@7 u @2 r y CEP1 CE1 CE1 r @9 @2 CE2 !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 ML2B #8 12 40 to 63 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 #7 #6 !5 !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 Component Parts Component Parts Material Note No. Description Material Note No.

Cylinder

I ' . 0.040 6 7 11 17 8 M3 x O.5 I. 16.5 10.5 6 B M10 X1.0 9 3 7 3 , 065 '10 . , jj:!'

High Power Cylinder:

9 t !8 @2 @4 !

MQQ

9 Series MQQ Construction Standard type: MQQT q u !

Table of Contents

For detail, refer to page 7-9-23 in Best Peneumatics 2004 Vol. 7 catalog.

CQM

9 10 7 1 26 8 22 15.6 5 28 5.4 9 11 10 7 1 30 8 Note) For the following bore/stroke sizes, the through-hole is threaded.

HRX-OM-Y120

RJ45 1 6 Serial communication connector D sub 9 female pin (socket) type 9 5 1 14 Contact input / output signal connector D sub 25 female pin (socket) type 25 13 Fig.1-3 Communication port HRL Series 1.3 Communication port 1-5 HRX-OM-Y120 Chapter 1 Read before using 1.4 Touch panel flow Press the [Comm.

LEY-OM007

LEY-OM00701 / // LEY Series LEY LEYG LEYG Series () LEY Series () LEC Series /LEC6 . 2 /. 3 .3 .4 .6 /LEY. 9 .9 .11 .12 /LEYG. 13 .13 .15 .16 . 17 .17 .17 .20 .32 . 35 . 36 .36 .37 .38 .39 .40 .40 . 41 .41 .41 .44 .45 .47 . 48 -1- LEY / (ISO/IEC) (JIS)1)2) *1) ISO 4414:Pneumatic fluid power -General rules relating to systems.