Booster Regulator/Air Tank

Rc 3/8 EXH: Rc 1/4 60 OUT (328) Tank OUT port Rc 1/2 278 180 170 4 x 11 32 32 Drain port Rc 1/4 120 180 312 460 Connected to VBA20A Connected to VBA22A Tank IN port Rc 3/8 Booster regulator IN port Rc 3/8 Booster regulator IN port Rc 3/8 EXH: Rc 3/8 EXH: Rc 3/8 (454) 442 (417) Tank OUT port Rc 1/2 (367) (367) OUT OUT 278 180 180 170 4 x 11 4 x 11 32 32 120 180 180 120 Drain port Rc 1/4 312

VQ7-6/7-8

Nil Rc 1/4 (Right side) Rc 1/2 (Right side) Rc 1/4 (Left side) Rc 1/2 (Left side) Rc 1/4 (Bottom side) Rc 1/2 (Bottom side) Mixed 1(P), 3(R2), 5(R1) port connection 03R 04R 03L 04L 03Y 04Y Nil SB None With NPTF T G F VZS Note) The mounting position of the silencer box corresponds to 3 (R2) and 5 (R1) port connections.

MY1

1/16 25 32 40 Rc 1/8 19 30 26 Rc 1/8 18 16 24 4 21 16 19 13 48 Rc 1/16 23 36.5 32 Rc 1/4 16.5 26 25.5 10.5 22.5 24.5 23 20 54 Rc 1/8 "P" indicates a cylinder supply port.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

(PT)3/8) (Rc(PT)3/8) 9 9 (Rc(PT)1/4) (Rc(PT)1/4) 5 R5 SY A 4 B 2 SYJ 45 18 SMC B A Manual override Cover diameter 1.6 Cross section 0.34mm2 SX R1 R2 5 1 P 3 66 56 5 VK (58) VZ VF SMC VFR 56.5 54.5 A, B port VP7 26.5 20.5 13.5 13.5 11.5 SMC 9 9 VP4 18 18 M5 X 0.8 Rc(PT)1/4,3/8 PE port P port 2-Rc(PT)1/4, 3/8 R1, R2 port (Rc(PT)1/4) (Rc(PT)1/4) (Not applicable to standard.) 21 21 (Rc(PT)3/8

Plug-in Unit

Side C12 (For 12) P: Rc 1/2 VQC400-5 S kit 1 to 12 stations: EX240, EX250 1 to 8 stations: EX500 1 to 8 stations: EX126 Rc 1/4 VQC4000 VV5QC41R: Rc 3/4 VQC401-5 Rc 3/8 Bottom Rc 1/4 Note 1) One-touch fittings in inch sizes are also available.

CL

Rc 1/8 lock port for pressure lock (Plug with breathing hole for spring lock) Rc 1/8 unlocking port Unlocked when pressurized Rod side cylinder port Manual unlocking cam Lock nut Width across flats B1 Head side cylinder port WH (Max.)

Table of Contents

Tightening torque Nm 28 to 30 36 to 38 48 to 50 48 to 50 Tightening torque Nm 7 to 9 12 to 14 22 to 24 28 to 30 Thread Rc 3/4 Rc 1 Rc 1 1/2 Rc 2 Thread Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 Supply voltage > Internal voltage drop of switch Minimum operating voltage of load 2. Apply wrench only to the metal part of the pipings when installing the flow switch onto the system piping.

Process Pump

, NPT, G 3/8" AIR SUP Rc, NPT, G 1/4" Air operated reset port Rc, NPT, G 1/8" 119 106 13 14 97 77 43 Silencer: AN20-02 (Option) Foot (Option) FLUID IN Rc, NPT, G 3/8" AIR EXH Rc, NPT, G 1/4" 63 74 Tube extension: PAF3410--X68 P13 P13N P13F 152 2 x M5 x 0.8 Thread depth 9 139 Reset button 133 95 114 19 4 x 7 Bottom view of body (12.7) AIR SUP Rc, NPT, G 1/4" 16 Air operated reset port Rc,

42

How to Order Manifold [Option] VV5Q 08 F 03 U 1 1 5 CE-compliant Series Nil Q CE-compliant 5 VQ5000 Thread type Option Manifold Nil Rc F G N NPT T NPTF Symbol Option Nil None CD1 Exhaust cleaner for Rc 1: D side exhaust CD2 Exhaust cleaner for Rc 1 1/2: D side exhaust CU1 Exhaust cleaner for Rc 1: U side exhaust CU2 Exhaust cleaner for Rc 1 1/2: U side exhaust K Note 3) Special wiring specifications

VZ100/300/500

G NPT 00F 20 20 stations R port 00N S070 Rc NPTF 00T VQ P port Rc Bracket is not mounted.

VZS

VV5ZS3 C6 06 51G 1 VFN Thread type Series VZS3000 Manifold Standard Nil NPT Rc N T F Plug-in type Stacking type manifold base with attachment plug lead wire NPTF G Option Port size Rc 1 8 01 Rc 1 4 02 Stations Embedded type One-touch fitting Applicable tubing O.D.: 6 C6 02 2 stations Embedded type One-touch fitting Applicable tubing O.D.: 8 15 C8 15 stations Max. 15 stations.

Series SV

Proper tightening torque Nm Connection thread 7 to 9 Rc 1/8 12 to 14 Rc 1/4 22 to 24 Rc 3/8 28 to 30 Rc 1/2 5. Connection of piping to products When connecting piping to a product, refer to its instruction manual to avoid mistakes regarding the supply port, etc. 1= nm 109 Series SV 5 Port Solenoid Valve Precautions 3 Be sure to read before handling.

Made to Order

Construction Connection port CM2 Series CG1 Series Bore size (mm) 20, 25, 32, 40 50, 63 Port size Bore size (mm) 20, 25, 32 40 Port size Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Same dimensions as standard type except port size. -X -X 1803 Made to Order Common Specifications: -XC22: Fluororubber Seals Fluororubber Seals 29 Applicable Series Note Series Description Model Action Vol. no.

Hydraulic

(mm) U H I J K L O Z M N P S A C D E F B Bore size (mm) 32 31.5 M10 x 1.5 60 4.5 14 8.5 9 depth 7 14 34 5.5 Rc 1/8 58.5 73.5 12 16 45 20 65 40 35 M10 x 1.5 69 5 14 8.5 9 depth 7 14 40 5.5 Rc 1/8 66 75.5 12 16 52 22 67 50 41 M12 x 1.75 86 7 18 11 11 depth 8 19 50 6.6 Rc 1/4 80 87 15 20 64 25 76 63 47.5 M12 x 1.75 103 7 18 11 14 depth 10.5 19 60 9 Rc 1/4 93 91 15 20 77 27 80 80 57.5 M16 x 2

ZP

Dimensions: Without Buffer ZPX H40 50 B8 B10 01 ZPX H63 80 B10 B12 01 ZPX H100 125 B10 B12 01 C 1/8 (Rc, NPT, NPTF) G 1/8 (Rc, NPT, NPTF) Width across flat 21 (Hexagon) Width across flat 21 (Hexagon) C 1/8 (Rc, NPT, NPTF) Width across flat 21 (Hexagon) 45 4 x M4 x 8 F 70 4 x M5 x 10 3 x M3 x 8 E D Y C A B A B A B Dimensions Dimensions Dimensions Model A 63 63 80 80 B 65 65 82 82 C 14.5

VSA4

1 4 1 8 Rc 0.70 1 8 Rc VA 1 8 Rc 3 position closed center 1 4 1 8 Rc 0.86 VM 1 8 Rc Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1 8 Rc 3 position exhaust center 1 4 1 8 Rc 0.86 VR 1 8 Rc Note) The table shows the valve without sub-plate.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Thread type 7 SY7000 SJ Rc Nil CE-compliant F G Nil N NPT SY Q CE-compliant NPTF T Type of actuation For DC only except DIN terminal.

2/3 Port Valve

1 2 Rc 3 8 Rc 3 4 Rc1 Rc 3 8 Rc 1 2 Rc 3 4 Rc1 Rc 3 8 Rc 1 2 Rc 3 4 Rc1 Port size 7.1 14.3 3.9 5.2 6.2 7.3 8 10.6 9.5 13.5 15.8 8.7 Orifice size Effective area Cv factor Pilot port size 41mm2 58mm2 112mm2 7.2mm2 13mm2 18mm2 25mm2 30mm2 43mm2 86mm2 120mm2 22mm2 Flow rate 1.2 2.3 3.2 6.2 0.4 0.7 1.0 1.4 1.7 2.4 4.8 6.6 1 8 Rc 1 4 Rc 1 8 Rc 1 4 Rc 1 8 Rc 1 4 Rc Weight Face-to-face

Prevents Micro-Bubbles

M3 x 0.5 Rc 3/8 NPT 3/8 LVA3 77.5 36 47 56 15 41.5 17.5 7.5 34 46 5.5 37.5 Rc 1/2 NPT 1/2 Rc 1/8 NPT 1/8 Rc 1/8 NPT 1/8 LVA4 96 46 60 68 22 55 18 8 42 57 5.5 48 Rc 3/4 NPT 3/4 LVA5 129 58 75 84 26 68 27.5 8 56 71 6.5 62 17-5-21 19 Series LVA Dimensions Body material: PFA Basic type A D L K 4-M 2-R Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main

Smooth Cylinder/Low Speed Cylinder

Rc Nil TN TF NPT G Auto switch Nil Without auto switch (Built-in magnet) Standard Stroke For the applicable auto switch model, refer to page 1280.