Clean Room Regulator/Fluoro Resin Type Series SRF30 6 r u i u q o q !0 o !1 !0 w !1 !2 w !2 Parts list !3 No.
0 Repair kit for main valve Kit includes parts from 10-1 to 10-5. !0 10-3 !1 G85(B) O-ring Material: NBR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Note) When changing parts, follow the instruction manual.
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Deionized water: Electric conductivity 1 mS/cm or higher (Electric resistivity 1 MWcm or lower) Note 3) q Ambient temperature: 32C, w Circulating uid: Tap water, e Circulating uid temperature: 20C, r Circulating uid ow rate: Rated ow, t Power supply: 200 VAC Note 4) q Ambient temperature: 32C, w Circulating uid: Tap water, e Circulating uid ow rate: Rated ow, r Power supply: 200 VAC Note
Note 3) Overall weight excluding optional parts 495
D-X 12.5 20Data Symbol S Z Stroke Bore size (mm) 4 5 10 15 20 5 15 20 10 18 23 28 33 51 61 66 56 6-2-3 4 Air Cylinder Single Acting, Single Rod, Spring Return Series CJ1 2.5, 4 How to Order/Single Acting CJ1B S 4 10 U4 Applicable tubing Mounting style Basic style Size O.D. 4 mm 4 mm B Tubing material Symbol Bore size 2.5 mm 2.5 mm Bore size Polyurethane Soft nylon Courtesy of Steven Engineering
(B) 2 (A) 4 Symbol 1 (P) 3 (R) Flow Rate Characteristics C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 14/2(PA/B) 4/25/3(A/BEA/EB) Flow rate characteristics Port size Valve model Body ported 10-VQD1121(V)-L M-M5 10-VQD1121 -L M-M5 10-VQD1151(V)-L M-M5 10-VQD1151W-L M-M5 0.05 0.07 0.06 0.07 Base mounted (With sub-plate) 0.19 0.28 0.22 0.27 0.31 0.28 0.31 0.28 0.22 0.27 0.22 0.27 0.16 0.24 0.10 0.25
Actuator q w q 178 Electric Actuator/Low Prole Slider Type Basic Type LEMB Series Step Motor (Servo/24 VDC) LEF LEJ LEL LEM LEM LEY LES i Actuator cable length u Actuator cable type*1 o Controller type Nil Without cable 8 8 m* Nil Without cable S Standard cable R Robotic cable (Flexible cable)*2 Nil Without controller 6N LECP6 (Step data input type) NPN 6P PNP LEPY LEPS 1 1.5 m A 10 m* 3
10 01 BG ARJ 3 10 F BG With One-touch fitting 04 01 Body size Option specifications 0.7MPa setting (standard) 0.2MPa setting With thread sealant Nil 1 S Model Relieving type 10 When set at 0.2MPa, a pressure gauge is not included.
Metric size Inch size Stations Symbol IN side Straight 6 8 10 8 6 10 4 6 4 6 Elbow Straight Elbow Note) OUT side Mounting position IN side Straight Elbow Straight Elbow Note) OUT side Mounting position 1 2 3 4 5 6 7 8 9 M 1 station 2 stations 3 stations 4 stations 5 stations 6 stations 7 stations 8 stations 9 stations 10 stations Fitting type Symbol Fitting type Symbol 1/4 5/16 3/8 5/16 1
Silao-Trejo K.M. 2.5 S/N, Predio San Jose del Duranzo C.P. 36100, Silao, Gto., Mexico TEL: 472-72-2-55-00 FAX: 472-72-2-59-44/2-59-46 FRANCE SMC Pneumatique S.A. 1 Boulevard de Strasbourg, Parc Gustave Eiffel, Bussy Saint Georges, F-77600 Marne La Vallee Cedex 3 France TEL: 01-64-76-10-00 FAX: 01-64-76-10-10 CHILE SMC Pneumatics (Chile) S.A. Av. La Montaa 1,115 km. 16,5 P.
Construction Vacuum generator side Vacuum generator side u w r t No.0.8 e y For the direction of the product, refer to 4 of back page 3. Pad side q u Description Component Parts Material Surface treatment No.
The speed will be approximately 1.4 times the date given on page 10-17-3.
106 2 2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5 Series AMP Model Selection Selection Caution Caution 1.
106 2 2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5 Series AMP Model Selection Selection Caution Caution 1.
Nil 02 03 13 9 5 Symbol 2 1/4 Nil 02 03 0.05 to 0.65MPa 1 3/8 2 1/4 2 0.1 to 0.9MPa 2 02 03 04 03 04 06 1/4 3/8 1/2 3/8 1/2 3/4 1 2 3 4 3/8 03 04 06 3 1 30 3/8 0.005 to 0.15MPa 1 4 1/2 4 45 1 3/4 12 8 4.5 2.5 Without sub-plate Nil 02 03 1(P) Symbol Flow type (VEF2) Flow type (VEF3) Pressure type (VEP3) 2 2(A) 1/4 3 3/8 2(A) 2(A) 1(P) 3(R) 1(P) 3(R) 03 04 06 25 3/8 1/2 3/4 1 4 Note) Does not
IRV10A P P P P IRV20A P P P P P P Accessory q Note 1) C06 C08 C10 N07 N09 N11 6 8 10 1/4" 5/16" 3/8" Metric None With bracket With bottom bracket Nil B L Inch Note 1) Accessories are shipped together. Bottom bracket 1
Table q Standard Strokes Table w Intermediate Stroke (by the 1 mm stroke) Bore size (mm) Applicable stroke (mm) 1 to 15 (Spacer type) 1 to 20 (Spacer type) Bore size (mm) Standard stroke (mm) 5, 10, 15 5, 10, 15, 20 6 10 6 10 Model no.: MGJ6-9 Installing a 1 mm width spacer for MGJ6-10 External size: same as MGJ6-10 Example The minimum auto switch mounting stroke with 2 auto switches is 4
Suction Guard FHG Series How to Order 0 A 04 0 0 M 074 FHG9 Port size Suction guard 1/2B 04 06 08 10 12 16 20 24 3/4B 1B Hydraulic fluid 1 1/4B Air breather Petroleum Water-glycol, Emulsion Phosphoric ester 0 1 2 1 1/2B Nil Air breather Cap 2B C 2 1/2B 3B Connection Port size category Nominal filtration 0 1 2 3 4 5 Companion flange Female threaded companion flange L-block companion flange
0 Steel wire NBR Steel wire NBR XT010-20 XT010-21 XT041-1 4-16-6 3 Series VS3135/3145 Dimensions VS3135/3145 V100 SY SYJ VK VZ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VT 3-Port size VP 4-Q Mounting hole 3-Q Mounting hole VG VP S070 VQ VS3135 VKF VQZ VZ Q Terminal