Process Gas Diaphragm Valve

Made to Order 1113 Series AZ / Diaphragm Valve Optional Porting Configuration How to Order q w e r 3652 S AZ 4PWM MV4 TW4 FV4 FV4 Size Code Seat material 3542 4542 3652 4652 Code Material PCTFE (Standard) Polyimide No code VS Material Connections (number indicates the port location) AZ4 Code AZ3 Connections 1/4 inch face seal (Male 1) 1/4 inch face seal (Female) 1/4 inch tube weld 3/8 inch

ISO Interface

(2.4x4.4x7.4) 1/4, 3/8, 1/2 1.8 2 VSS8-8 Metal 79x125.5x211 (3.1x4.9x8.3) 3/8, 1/2, 3/4 3.6 3 VSS8-10 Metal 96x137x246 (3.8x5.4x9.7) 1/2, 3/4, 1 5.0 Mounted Interface Valve How to order Valve VS R 86 FG S 1 A03T -V1 -X1 Type of seal Special Options R Rubber S Metal Standard X1 External Pilot Supply Size 6 Size 1 8 Size 2 10 Size 3 Pilot Exhaust Options Pilot Exh. through footprint V1 External

IR10-OM00007

JIS B 8370: JIS B 8361: JIS B 9960-1: -(1 ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4. -2- . / 1 1.5 *3) *3) 1 1 () -3- IR1000 (1) 0.2% F.S.

CE2

1 !2 !3 !4 !5 !6 !7 !8 !

Wedge Cam Operation Provides

6 q r !0 !1 !2 Fingers closed Normally closed !4 !3 Component Parts Component Parts Note Material Material Note No. q w e t y u No. i o !0 !1 !2 !3 !4 !

Large Type Vacuum Unit Series ZR

SMC PRESSURE SWITCH PD PV 57 1 67 1 32.4 109 Approx. 300 Ejector RESET SET Supply valve Release valve V 21.2 Manual override Suction filter 1 2-4.6 (mounting hole) 1 5.6 1 8 1 10.2 123 1 4.6 1 8 SOL. c SOL. a Silencer SOL. b Interface A Light Suction filter Manual override Interface B Digital vacuum pressure switch M5 port PE (pilot valve exhaust port) M5 port PD (vacuum breaking pressure

Pneumatic Positioner IP300/IP3100

tP3100 0 Travel Angle Indicator 0 not irrcludsd '1 included Thread Size Nil Rc(pt) 1/4 N femals 1/4 NPT NOTE: 1.

VP3145-OMM0003

industrial robots -Safety JIS B 8370: JIS B 8361: JIS B 9960-1: 1 : JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4. 2 VP3145-OMM0003 VP31*5 / 1 1.5 *3) *3) 1 1 3 VP3145-OMM0003 VP31 5 3 / / () C-R C-R ( ) DC 5% AC 15% (ON)(OFF) 0.1 0oC 0.2Mpa (INOUT ) 4 VP3145-OMM0003 VP31 5 3 / ( ) 9 ) 1 ()ISO VG32 2 ()ISO VG32 5m Nm Rc 3/8 2224 Rc 1/2 2830 Rc 3/4 2830 Rc 1 3638 Rc 11/4 4042

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

Refer to pages 15-18-3 to 15-18-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 15-8-6 to 15-8-8 for Precautions on every series. 3 Construction w r y t u !2 e !1 No. q w e r t y u i o !0 !1 !

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

ASV AK ASS ASR ASF 15-9-73 3 Construction w r y t u !2 e !1 No. q w e r t y u i o !0 !1 !

Speed Controller: Standard Type Series AS Large Flow In-line Type 1

L3 Max. 1 4 1 2 L1 L2 D Min. L3 Max. Model Port size Model Port size 120 150 AS800 AS900 1 1 , 2 74 93 204 262 192 250 80 94 AS420 AS500 AS600 67.5 74 90 1/4, 3/8, 1/2 3/4 1 38 42 55 122 115 158 112 105 148 50 50 62 15-9-33

Low Profile

SX90/090 Series CAT.ES70-59A Low Profile 2/3-Port Solenoid Valve SX90/090 Series How to Order SX9 1 5 G 2-port valve q SX090 5 G 3-port valve w e r q Type of actuation w Power-saving circuit e Rated voltage r Electrical entry 1 Normally closed 2 Universal Nil Without power-saving circuit Y1 With power-saving circuit 5 24 VDC 6 12 VDC G Grommet (Lead wire length: 300 mm) Specifications Model

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Elbow Type (Metal Body) Flow rate and effective area AS220M-02 Model AS120M AS220M-01 R 1/4 Cylinder side Tubing side M5 x 0.8 10-32UNF NPT 1/8 NPT 1/4 R 1/8 Port size Rc 1/4 Rc 1/8 l/min (ANR) {Nl/min} Flow rate 38 7 12 Controlled flow Effective area mm 0.6 0.1 0.2 l/min (ANR) {Nl/min} 420 Flow rate 105 280 Free flow 6.5 1.6 4.3 Effective area mm Note) Flow rates are values measured with

IS3000

0 1 Standard Micro load Port size Nil 02 N02 With gasket Rc 1/4 NPT 1/4 16-9-3 2 Series IS3000 Construction Precautions IS3000-02/3010-02 (Rc 1/4 thread) Be sure to read before handling.

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

Mounting nut N W K N F S + Stroke F ZZ + Stroke H B E G Mounting nut NN NA F N 12CY3B15 (mm) L 57 66 70 80 92 J 6 6 8 8 10 K 11 8 10 15 16 I 12 15 18 23 G 5.5 7.5 7.5 8 11 H 13 20 20.5 22 29 F 10 13 13 16 16 E 2 2 2 2 3 NN M10 x 1 M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2 D 16.6 21.6 26.4 33.6 41.6 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 B 35 36 46 60 70 N 11 18 18.5 20 26 ZZ 103 132 137

Speed Controller: Standard Type Elbow Type (Metal Body) AS Series

Meter-out Meter-in 0 1 Note) M3 and M5 sizes: s (with seal) is not necessary. Thread type Cylinder side R Tube side Rc Symbol Bore size Made to Order (For details, refer to page 647.)

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

1 !

VER2000/4000

1 !2 !3 !4 !5 !6 q w e r t y u i Block packing !

Pressure Relief 3 Port Valve with Locking Holes VHS20/30/40/50

3 Port Valve with Locking Holes Series VHS Specifications Model VHS20 VHS30 VHS40 VHS40-06 VHS50 3/4 1 1/8 1/4 1/4 3/8 1/4 3/8 1/2 3/4 IN, OUT Piping port 1/8 1/2 1/2 1/4 3/8 EXH 4.17 IN OUT 0.54 0.76 1.46 2.06 2.98 4.44 6.78 0.87 1.68 Cv OUT EXH 0.60 0.87 1.75 2.08 2.12 2.85 2.93 2.12 0.76 1.57 Air Fluid 1.5MPa Proof pressure 0.1 to 1.0MPa Operating pressure range JIS Symbol -5 to 60C

Guide Table Series MGF ø40, ø63, ø100 1

Rc 1/8 relief port Port for extending cylinder Port for retracting cylinder 8-23-8 9 Guide Table Series MGF Construction @2 !2 y u !3 e q t r o w @0 !1 !7 !8 !9 !5 !6 !0 MX i MTS @4 MY CY MG @1 !