Ordering Information Stocked Configurations Below Can Ship Same Day Part Number Description TIUB-01-R1-50-MW 1/8" Polyurethane Tubing 50 ft. - Red TIUB-01-R1-100-MW 1/8" Polyurethane Tubing 100 ft. - Red TIUB-03-R1-50-MW 5/32" Polyurethane Tubing 50 ft. - Red TIUB-03-R1-100-MW 5/32" Polyurethane Tubing

Ordering Information Stocked Configurations Below Can Ship Same Day Part Number Description TIUB-01-R1-50-MW 1/8" Polyurethane Tubing 50 ft. - Red TIUB-01-R1-100-MW 1/8" Polyurethane Tubing 100 ft. - Red TIUB-03-R1-50-MW 5/32" Polyurethane Tubing 50 ft. - Red TIUB-03-R1-100-MW 5/32" Polyurethane Tubing

Ordering Information Stocked Configurations Below Can Ship Same Day Part Number Description TIUB-01-R1-50-MW 1/8" Polyurethane Tubing 50 ft. - Red TIUB-01-R1-100-MW 1/8" Polyurethane Tubing 100 ft. - Red TIUB-03-R1-50-MW 5/32" Polyurethane Tubing 50 ft. - Red TIUB-03-R1-100-MW 5/32" Polyurethane Tubing

Ordering Information Stocked Configurations Below Can Ship Same Day Part Number Description TIUB-01-R1-50-MW 1/8" Polyurethane Tubing 50 ft. - Red TIUB-01-R1-100-MW 1/8" Polyurethane Tubing 100 ft. - Red TIUB-03-R1-50-MW 5/32" Polyurethane Tubing 50 ft. - Red TIUB-03-R1-100-MW 5/32" Polyurethane Tubing

Ordering Information Stocked Configurations Below Can Ship Same Day Part Number Description TIUB-01-R1-50-MW 1/8" Polyurethane Tubing 50 ft. - Red TIUB-01-R1-100-MW 1/8" Polyurethane Tubing 100 ft. - Red TIUB-03-R1-50-MW 5/32" Polyurethane Tubing 50 ft. - Red TIUB-03-R1-100-MW 5/32" Polyurethane Tubing

Ordering Information Stocked Configurations Below Can Ship Same Day Part Number Description TIUB-01-R1-50-MW 1/8" Polyurethane Tubing 50 ft. - Red TIUB-01-R1-100-MW 1/8" Polyurethane Tubing 100 ft. - Red TIUB-03-R1-50-MW 5/32" Polyurethane Tubing 50 ft. - Red TIUB-03-R1-100-MW 5/32" Polyurethane Tubing

Ordering Information Stocked Configurations Below Can Ship Same Day Part Number Description TIUB-01-R1-50-MW 1/8" Polyurethane Tubing 50 ft. - Red TIUB-01-R1-100-MW 1/8" Polyurethane Tubing 100 ft. - Red TIUB-03-R1-50-MW 5/32" Polyurethane Tubing 50 ft. - Red TIUB-03-R1-100-MW 5/32" Polyurethane Tubing

Ordering Information Stocked Configurations Below Can Ship Same Day Part Number Description TIUB-01-R1-50-MW 1/8" Polyurethane Tubing 50 ft. - Red TIUB-01-R1-100-MW 1/8" Polyurethane Tubing 100 ft. - Red TIUB-03-R1-50-MW 5/32" Polyurethane Tubing 50 ft. - Red TIUB-03-R1-100-MW 5/32" Polyurethane Tubing

Ordering Information Stocked Configurations Below Can Ship Same Day Part Number Description TIUB-01-R1-50-MW 1/8" Polyurethane Tubing 50 ft. - Red TIUB-01-R1-100-MW 1/8" Polyurethane Tubing 100 ft. - Red TIUB-03-R1-50-MW 5/32" Polyurethane Tubing 50 ft. - Red TIUB-03-R1-100-MW 5/32" Polyurethane Tubing

Ordering Information Stocked Configurations Below Can Ship Same Day Part Number Description TIUB-01-R1-50-MW 1/8" Polyurethane Tubing 50 ft. - Red TIUB-01-R1-100-MW 1/8" Polyurethane Tubing 100 ft. - Red TIUB-03-R1-50-MW 5/32" Polyurethane Tubing 50 ft. - Red TIUB-03-R1-100-MW 5/32" Polyurethane Tubing

Ordering Information Stocked Configurations Below Can Ship Same Day Part Number Description TIUB-01-R1-50-MW 1/8" Polyurethane Tubing 50 ft. - Red TIUB-01-R1-100-MW 1/8" Polyurethane Tubing 100 ft. - Red TIUB-03-R1-50-MW 5/32" Polyurethane Tubing 50 ft. - Red TIUB-03-R1-100-MW 5/32" Polyurethane Tubing

Ordering Information Stocked Configurations Below Can Ship Same Day Part Number Description TIUB-01-R1-50-MW 1/8" Polyurethane Tubing 50 ft. - Red TIUB-01-R1-100-MW 1/8" Polyurethane Tubing 100 ft. - Red TIUB-03-R1-50-MW 5/32" Polyurethane Tubing 50 ft. - Red TIUB-03-R1-100-MW 5/32" Polyurethane Tubing

Ordering Information Stocked Configurations Below Can Ship Same Day Part Number Description TIUB-01-R1-50-MW 1/8" Polyurethane Tubing 50 ft. - Red TIUB-01-R1-100-MW 1/8" Polyurethane Tubing 100 ft. - Red TIUB-03-R1-50-MW 5/32" Polyurethane Tubing 50 ft. - Red TIUB-03-R1-100-MW 5/32" Polyurethane Tubing

1

Note 3) Refer to the catalog, since the dimensions of standard stroke Series CQ2 and CQS are different from that of long stroke type. 6-18-1 2 SMC Actuators: Copper-free Air Cylinders 6, 8, 10, 12, 15, 16, 20, 25, 32, 40, 50, 63, 80, 100, 125, 140, 160 Air Cylinders 20-series has been added by design modification. (98.6.1) Series Application Bore size (mm) Standard Copper-free 6 8 12 (10

LG1H

Applicable strokes: 150, 250, 350 Example) LG1H2021PA-150-F2-X2 100 5.3 8.3 400 7.7 12.0 5 to 40 (with no condensation) 200 6.1 9.6 300 6.9 10.8 mm kg kg C kg N mm/s mm Standard stroke Aluminum Stainless steel Body weight Operating temperature range Work load Rated thrust Maximum speed Performance 30 180 500 0.02 AC servomotor (100W) Incremental system Ground ball screw 15mm, 10mm lead High

PF3W7x.eng

Excessive accumulated flow 5% of maximum rated flow [00.05] 00.05 gal/min (4 L type) [00.21] 00.21 gal/min (16 L type) [000.5] 000.5 gal/min (40 L type) [001.3] 001.3 gal/min (100 L type) [000.3] 000.3 gal/min (250 L type) Temperature upper limit exceeded The fluid temperature is above 110 oC. Reduce the fluid temperature.

VFR3000-OMJ0001

) 40) 40) 40) VFR3 VFR3 VFR3 VFR3 00,VFR3 00,VFR3 00,VFR3 00,VFR3 10 10 10 10 VFR3 VFR3 VFR3 VFR3 40 40 40 40 (N.C.)N.O.3 3 B A N.C.

ITV

Output deviation (%F.S.) 0.5 0.5 Out VE 40 0 0 Return VY G 60 0.5 0.5 AL 80 1.0 1 0 2 4 6 8 10 0 25 50 75 100 0 25 50 75 100 Input signal (%F.S.) Input signal (%F.S.)

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Series PF2D Flow Characteristics (Pressure Characteristics) PF2D504 PF2D520 PF2D540 0.040 0.035 0.030 0.035 0.030 Pressure loss [MPa] Pressure loss [MPa] Pressure loss [MPa] 0.025 0.030 0.025 0.020 0.025 0.020 0.020 0.015 0.015 0.015 0.010 0.010 0.010 0.005 0.005 0.005 0 0.5 1.0 1.5 2.0 2.5 3.0 4.0 3.5 0 2 4 6 8 10 12 16 14 18 20 0 5 10 15 20 25 30 40 35 Flow rate (l/min) Flow rate (l/min

ZU

40 40 40 10 5 27 27 27 27 Suction flow rate Vacuum pressure 13 13 13 13 0 0 0 4 8 12 14 0 0.1 0.2 0.3 0.4 0.5 0.6 0 5 10 15 20 25 0 0.1 0.2 0.3 0.4 0.5 0.6 Suction flow rate N (l/min(ANR)) Supply pressure (MPa) Supply pressure (MPa) Suction flow rate N (l/min(ANR)) How to Read Flow Characteristics Graph Flow characteristics are expressed in ejector vacuum pressure and suction flow.