MK

Therefore, make sure to install the arm in the direction indicated in diagram A. 4.1-9 Series MK 32, 40, 50, 63 Through hole (Basic)/MKB Both ends tapped/MKA Model MKA MKA50 MKA63 A B 32 40 M6 X 1.0 10 M8 X 1.25 14 M10 X 1.5 18 S Model A G I J Q U X T B H K L O V Yh9 Z C P D E R F 0 0.062 0 0.062 0.1 0.2 0.1 0.2 0.1 0.2 0.1 0.2 0.15 0.15 MKB32 31.5 9 Depth 7 M10 X 1.5 93.5 71.5 Rc(PT)1/8

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

High pressure type (Metal seal only) (1.0 W) K (1) (0.5 W) Y Low wattage type External pilot type R (2) Note 1) Option Note 2) For details about external pilot specifications, refer to page 4-14-40. Note 3) For the power consumption of AC type, refer to page 4-14-28. Note 4) When two or more symbols are specified, indicate them alphabetically.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

Body type Manual override B: Locking type (Tool required) Nil: Non-locking push type (Tool required) Function Symbol Specifications DC (1.0 W) (1.0 W) (0.5 W) (3) AC Nil Standard type High pressure type K (1) Low wattage type Y External pilot type R (2) Electrical entry Note 1) Option Note 2) For details about external pilot specifications, refer to page 4-14-18.

SX

Specifications Symbol Specifications For SS5X-45S EX322-S001 EX122-SMB1 EX122-STA1 EX122-SSH1 EX122-SPA1 EX122-SUW1 For SS5X-45S Symbol J1 J2 K Q R1 R2 SUNX Corp.: S-LINK System (16 output points) SUNX Corp.: S-LINK System (8 output points) Fuji Electric Co.: T-LINK Mini System DeviceNet, CompoBus/D (OMRON Corp.)

VQC

Function 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com C: Locking type (Manual) 2 position double (rubber) 4 position dual 3 port valve (C) (A) 4 (B) 2 Standard type (1 W) High pressure type (1.0 MPa) Negative COM External pilot Low wattage type (0.5 W) Nil K

Angular Air Gripper Series MHC2/MHCA2/MHCM2

Weights Unit: g End boss type (symbol) Model H E K M 23 MHCA2-6 23 23 23 12 Compact Type MHCM2-7S Angular Air Gripper How to Order 7 MHC M 2 S Compact type Number of fingers Action 2 2 finger Single acting (Normally open) S Bore size (mm) 7 7 Specifications Symbol Air 0.4 to 0.6MPa 10 to 60C 0.02mm 180c.p.m.

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

Note) Component parts Aoolicable manifold base MBF261--3;-18 M a n i i o l d b l o c k O , C l a m p O ' O o r i n g O ' O ' O ' O Adapter O , Pin housing. Guide. Insertllug lead wire Plug-in type Connector lead wires o Manilold block assy ' :o-side ports A, B l-1l8 P A, B bottom 2-1l8 P, A, B bottom w/ (114 A, B side) MBF261.-3r-1A M a n i f o l d b l o c k O , C l a m p O , @ .

Vacuum Regulator Series IRV

U C S O H L 1 Series IRV Dimensions IRV1000 IRV2000 53 55 41 30 50 SMC 35 P K U C SMC S O H L P K U C S O H L 40 34 8 x 6.5 15.4 x 5.4 Approx. 106 Approx. 50.6 18 Approx. 79 Atmosphere Atmosphere 45.5 13 SET VAC SET G SET G 30 SET VAC 43 Pad side Vacuum pump side Pad side Vacuum pump side Approx. 43 35 2-Rc 1/8 Connection port 2-Rc 1/8 Vacuum gauge port 2-Rc 1/4 Connection port Approx. 60

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

K DIN terminal: D Conduit terminal: T Cable 6.8 to 10 F S Q 27.5 (Q) D F 25 C R C (44) R R E G 1/2 E G 1/2 A H D (S) B B A H 2-P Port size 2-P Port size 2-M, thread depth N 2-M L L K K N.C. dimensions (mm) Grommet: G Conduit: C DIN terminal: D Conduit terminal: T P Port size Rc A B C D E F H K L M N Model Note) U Q V R Q R Q R S Q R S 83 22 23 45 44 43 58 40.5 46.5 99 43 66 13.5 28 64 31

OMR0032

A5 IN3 A5 IN3 A6 DRIVE A6 DRIVE A7 SVON A7 SVON Internal resistance 10 [k] Internal resistance 10[k] A8 NC A8 NC A9 NC A9 NC Main circuit Main circuit Output signal power Output signal power supply supply A10 NC A10 NC 24 VDC 24 VDC DC2(+) B1 DC2(+) B1 DC2(-) B2 DC2(-) B2 BUSY B3 BUSY B3 B4 ALARM B4 ALARM B5 OUT0 B5 OUT0 B6 OUT1 B6 OUT1 Maximum Output current 10 mA Maximum Output current

ZQ-OM01401

K 1 3.2 () K2 N.O. N.C. 6) 2 4 () J1 N.C. 3 6 () J2 N.O. 4 3.2 () 1) ()(N.C.)

PSxx-OMU0002CN

DC(+) 5 OUT1 4 OUT2 3 FUNC 2 DC(-) 1 -19No.PS-OMU0002CN-D Z/ISE20A(F)-S/-R () DC(+) NPN 2 Max.28 V80 mA 1 V R15 V OUT1 1 k OUT2 S420 mA DC(-) 12 V 300 24 V 600 50 DC(+) -S/-R () OUT1 NPN 2 OUT2 Max.28 V80 mA 1 V DC(-) DC(+) -X () -S/-R () OUT1 NPN 2 OUT2 Max.28 V80 mA 1 V DC(-) -20No.PS-OMU0002CN-D -V/-T () DC(+) PNP 2 Max.80 mA 1 V T15 V OUT1 1 k OUT2 V420 mA DC(

PSxx-OMU0005CN

2No.PS-OMU0005CN-C / *3) 1 1.5 3) 1 1 -3No.PS-OMU0005CN-C () () () () -4No.PS-OMU0005CN-C () * UL UL1310 2 UL1585 2 30[Vrms] 42.4[V ]2 UL (1 20 ) -5No.PS-OMU0005CN-C * FG (35 N () ,() *() 6 33 () () 30m DC(-)() () * -6No.PS-OMU0005CN-C ( ) () CE -5~50(5 ) * , 1015 10 1% 2365 LCD * -7No.PS-OMU0005CN-C 3 ISE20B -0.100~1.000MPa ZSE20B 0.0~-101.0kPa Y ZSE20BF -100.0~100.0kPa K

PSxx-OMU0008CN

DC(+) 5 OUT1 4 OUT2 3 FUNC 2 DC(-) 1 -21No.PS-OMU0008CN-D ZSE20C(F)/ISE20C(H)-S/-R () NPN 2 DC(+) Max.28 V80 mA 1 V R15 V OUT1 1 k S420 mA OUT2 12 V 300 24 V 600 DC(-) 50 DC(+) -S/-R () OUT1 NPN 2 OUT2 Max.28 V80 mA 1 V DC(-) DC(+) -X () -S/-R () OUT1 NPN 2 OUT2 Max.28 V80 mA 1 V DC(-) -22No.PS-OMU0008CN-D -V/-T () PNP 2 DC(+) Max.80 mA 1 V T15 V OUT1 1 k V420 mA OUT2

PSxx-OMM0002CN

5No.PS-OMM0002CN-F SUS630SUS304 () * (14 ) FG (49 N () () TSJSwagelok(Swagelok URJ Swagelok(VCR)/GroundGround Swagelok,VCRSwagelok Company -6No.PS-OMM0002CN-F * 6 33 () () 10m DC(-)() * ( ) () CE -7No.PS-OMM0002CN-F 0~50(5) SUS630() SUS304() ( ) * 10~15 15 /1% 1941 LCD * -8No.PS-OMM0002CN-F ISE80 02 N 3 ISE80 -0.11MPa ZSE80 0-101KPa ZSE80F -100100KPa ISE80H -0.12MPa Y K

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Output impedance: 1 k L4: Analog output: 4 to 20 mA Load impedance: 50 to 600 Max. load current: 80 mA, Internal voltage drop: 1.5 V or less L3: Analog output: 1 to 5 V or 0 to 10 V can be selected.

MU

Relay, PLC Diagnostic indicator ( 2 color) 24V Yes J79W F7BWV 2 wire 12V Rod end male thread M Water resistant (2 color) F7BA Grommet 3 wire (NPN) With timer F7NT 5V 12V IC With diagnostic output (2 color) Latch with diagnostic output (2 color) F79F 4wire (NPN) F7LF 0.5m (Example) 3mL A80C A80CL A80CZ A80CN 5mZ (Example) N Lead wire length Solid state switches marked with a K

Model Selection 1

For semiconductor washing machinery Alias: IPA (Isopropyl alcohol) Isopropyl alcohol x Liquid Kerosene K L x Liquid Alias: Kerosine When the explosion proof (d1G2) is designated, adopt the airoperated style. Lacquer x x x x Liquid Lactic acid x Liquid For brewing and drinking Use caution in selecting a solenoid valve owing to high viscosity.

VCL

PB L L K K N.C.

70pvvna

170 28.3 33.3 LVH Port size 32A, 40A, 50A LVD LVQ Applicable cable O.D. 6 to 8 (D, DL) LQ LVN K (Terminal with indicator light: DL) TI/ TIL Manual override (Non-locking) Pilot port L (Conduit terminal: T) PA J (DIN terminal: D) I (Conduit: C) H (Grommet: G) PAX G (Air operated) PB Main port Main port Rc Pilot port Rc A B C D E F G H I J K L M Model VNA5-32A VNA6-40A VNA7-50A 1 8 1 4 1 4 1