This is a legacy product, and replaced byVQC4200-51, VALVE, PLUG-IN, METAL SEAL, VALVE, VQC4000 SOLENOID VALVE, 5-PORT, 2E, VQC4000 NO SIZE RATING, .61517 lb

This is a legacy product, and replaced byVQC4201-51, VALVE, PLUG-IN, RUBBER SEAL, VALVE, VQC4000 SOLENOID VALVE, 5-PORT, 2E, VQC4000 NO SIZE RATING, 0.57935 lb

This is a legacy product, and replaced byVQC4300-51, VALVE, PLUG-IN, METAL SEAL, VALVE, VQC4000 SOLENOID VALVE, 5-PORT, 2F, VQC4000 NO SIZE RATING, .67695 lb

This is a legacy product, and replaced byVQC4301-51, VALVE, PLUG-IN, RUBBER SEAL, VALVE, VQC4000 SOLENOID VALVE, 5-PORT, 2F, VQC4000 NO SIZE RATING, 0.61568 lb

This is a legacy product, and replaced byVQC4301R-51, VALVE, PLUG-IN, RUBBER SEAL, VALVE, VQC4000 SOLENOID VALVE, 5-PORT, 2F, VQC4000 NO SIZE RATING, .65695 lb

This is a legacy product, and replaced byVQC4400-51, VALVE, PLUG-IN, METAL SEAL, VALVE, VQC4000 SOLENOID VALVE, 5-PORT, 2G, VQC4000 NO SIZE RATING, 0.70212 lb

This is a legacy product, and replaced byVQC4401-51, VALVE, PLUG-IN, RUBBER SEAL, VALVE, VQC4000 SOLENOID VALVE, 5-PORT, 2G, VQC4000 NO SIZE RATING, .65497 lb

This is a legacy product, and replaced byVQC5100-51

F

35.5 30.5 25.1 18 8 15.2 59.8 8.1 36.5 31.5 30.3 18 15.2 59.8 8.1 5/16 36.5 31.5 30.3 17 6 13.2 59 7.4 38.3 33.3 40.8 17 13.2 59 7.4 1/4 38.3 33.3 41.2 AS3001F 19.8 18 8 15.2 64.4 8.2 39.1 34.1 45.5 19.8 18 15.2 64.4 8.2 NAS3001F 5/16 39.1 34.1 45.5 21 10 18.5 71.6 9.8 40.6 35.6 54.3 21 17.9 70.8 9.5 3/8 40.3 35.3 52.9 22 12 20.9 76 11 41.8 36.8 60.2 26.5 21 NAS4001F 17.9 76.9 10.3 3/8 51

I

B: Approx 110g Sensor Supply Voltage Same as Source Voltage Connection Voltage Input 1~5V (Input Impedance: 100k) Current Input 4~20mA (Input Impedance: 250) PSE10 O P T I O N Blank (Standard) X108 PSI Display M O U N T I N G A Panel mount B Wall/DIN rail mount O U T P U T T Y P E 0 NPN 1 PNP D I M E N S I O N S PSE 51* *Dimensions refer to ones measured after R(PT) has been screwed in.

1 D. P. Lube (Unit) Series ALD(U)600/900 F.R.L. Standard Specifications  Centralized control of multi-point (1) D.P . Lube D.P . Lube Unit Model name lubrication AV ALDU600 ALDU900 ALD900 ALD600 Model  Low oil consumption volume 1 1 1 4 1 4 3 4

Lube Unit Mounting thread M12 Float switch mounting position J (Bracket mounting dimensions) Panel (Option) Bracket (Option) A B C D E F G H J K L M N P Q R S Model Port size ALDU600-06 ALDU600-10 ALDU900-12 ALDU900-14 ALDU900-20 43 10 57 51 16 67 77 85 90 100 283 296 424 424 476 4 3 135 345 460 145 90 150 480 20 430 470 175 87.5 30 62.5 1 1 1 2 615 615 682 419.2 209 4 1 250 125 33.2 33.2

ALF400 to 900, ALT-5/-9

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ALF500/600 IR Port size D VEX AMR ITV IC Model Port size VBA C D A B , 1 4 3 8 1 2 , ALF400 ALF400-06 ALF500 ALF600 ALF800 ALF900 80 85 90 100 100 100 238.5 246.5 295.5 319.5 338.5 344.5 44 46 48 51 59 63 VE 3 4 1 3 4, 1 1 1 1 4 1 2 , 2 VY1 G Dimensions

AMR3000 to 6000

N Bracket dimensions With auto-drain Model Port size A B C D E F G H J K L M U (Body) V (Adapter) L 178 211 277 321 B 260 298 366 436 T 9 9 11 11 S 8 16 21 26 R 78 97 98 115 P 50 35 45 46.5 1/4, 3/8 1/4, 3/8, 1/2 1/2, 3/4 3/4, 1 1/4, 3/8 1/4, 3/8, 1/2 1/2, 3/4 3/4, 1 AMR3000 AMR4000 AMR5000 AMR6000 100 120 130 160 180 210 246 290 264 302 370 440 10 10 45 70 101 121 131 161 51 61 66 81 28

IR1000/2000/3000

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 8.5 M6 x P0.5 5.5 71 11 18 123 44 51 90 10 9.5 IR VEX Bleed Bleed 63 Exhaust SUP(1) OUT(2) 30 AMR OUT(2) SUP(1) 10 43 35 EXH ITV 2-Rc 1/8 Port size 2-Rc 1/4 Port size Rc 1/8 Pressure gauge port 43 50 50 35 2-Rc 1/8 Pressure gauge port 60 IC VBA IR300-

ISE70/75/75H

port ZSM 02: Rc1/4 N02: NPT1/4 F02: G1/4 (ISO1179) PF2 IF 2 1 Data 4 3 With bracket Connector Pin Assignments 44.5 9 34 Output -43 MPa 1 Brown DC (+) 2 White OUT1 (PNP) 3 Blue DC () OUT1 4 Black OUT1 (NPN) U P DOWN SET Output -65 14.5 90 1 Brown DC (+) 2 White NC 3 Blue DC () 26.5 4 Black OUT1 (PNP) 18.3 6 (28.7) 35 46 (38.2) 60 24 Piping port 02: Rc1/4 N02: NPT1/4 F02: G1/4 (ISO1179) 16-2-51

ZSP1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Adsorption nozzle port 0X: M5 x 0.8 0XY: M6 x 1 Vacuum supply port 0X: M5 x 0.8 0XY: M6 x 1 58 51 50 PV 6.5 10.2 8 10 17.8 11 5.5 2-3.3 Mounting hole Connector type: ZSP10X C Adjusting needle ADJ Pressure sensor Vacuum supply port 20 08 Adsorption nozzle

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

A B 1 Actuator section PPS 2 Body PFA A B 3 Diaphragm PTFE 4 End plate PPS 5 Flow rate adjuster section PPS 17-5-51 10 Series LVD Dimensions Basic type A D L K 4-M (Q) 2-P one-touch fitting Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Breathing port PB H C PA G

VCL

Dimensions (mm) Electrical entry Z J E H C G A B D Model Grommet Conduit DIN terminal Conduit terminal Y N X W V U T S R Q VV2CL2 56 34.5 4.5 17.3 24.5 38 49 20 28 77 66 99 41.5 58 46 43.5 44 45.5 22 VV2CL3 66 38.5 5.5 19.3 28.5 42 57 25.5 30 86.5 68 101 51 60 48 53 45.5 55 24 VV2CL4 74 41.5 5.5 20.8 28.5 42 57 25.5 30 94 70 103 58.5 62 50 60.5 47.5 62.5 26 17-2-37

VCS

. + 3 stns x 2 3 stns. x 3 2 stns. x 2 + 3 stns. x 2 Dimensions (mm) Electrical entry J E H C G B D Z A Grommet: G Conduit: C Conduit terminal: T Model Y X N T S R Q VV2CS2 77 99 66 41.5 44 50.5 22 34.5 4.5 17.3 24.5 38 20 28 56 49 VV2CS3 86.5 101 68 51 45.5 60 24 38.5 5.5 19.3 28.5 42 25.5 30 66 57 VV2CS4 94 103 70 58.5 47.5 68 26 41.5 5.5 20.8 28.5 42 25.5 30 74 57 17-2-47

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

port (Individual SUP type) (mm) n (stations) Model Dimension 2 10 3 4 5 6 7 8 9 374 388 476 494 L1 L2 L1 L2 86 100 108 126 122 136 154 172 158 172 200 218 194 208 246 264 230 244 292 310 266 280 338 356 302 316 384 402 338 352 430 448 VVX21 VVX22 VVX23 (mm) Grommet Conduit DIN terminal Electrical entry Conduit terminal (B) Individual SUP type A B C D E F H J K M N Model Q 49 58 63 R S 42 51