Table of Contents

6 12 LXFH5 Without brake Direct acting guide 5 phase stepper 210 2 5 6 12 Without brake 218 LXPB2 2 phase stepper 2 5 6 12 With brake 226 LXP Ball bushing 2 5 6 12 Without brake 234 LXPB5 5 phase stepper 2 5 6 12 With brake 242 2 5 6 12 Without brake 250 LXSH2 2 phase stepper 2 5 6 12 With brake 258 High rigidity direct acting guide LXS 2 5 6 12 Without brake 266 LXSH5 5 phase stepper 2 5

0.4

connectors, so switching from the F kit (D-sub connector) to the S kit (serial transmission) can be done simply by changing the kit section. 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 6 7 8 9 10 (Refer to the connector wiring diagram.)

HRX-OM-M090

Display and setting of various functions . 5-1 5.1 List of function . 5-1 5.2 Function. 5-2 5.2.1 Key operations . 5-2 5.2.2 List of parameters . 5-4 5.3 Main screen . 5-7 5.3.1 Main screen . 5-7 5.3.2 Display on the main screen . 5-7 5.4 Alarm display menu . 5-8 5.4.1 Alarm display menu . 5-8 5.4.2 Content of display of alarm display menu . 5-8 5.5 Inspection monitor menu . 5-9 5.5.1 Inspection

HRX-OM-R005

Display and setting of various functions . 5-1 5.1 List of function . 5-1 5.2 Function. 5-2 5.2.1 Key operations . 5-2 5.2.2 List of parameters . 5-4 5.3 Main screen . 5-7 5.3.1 Main screen . 5-7 5.3.2 Display on the main screen . 5-7 5.4 Alarm display menu . 5-8 5.4.1 Alarm display menu . 5-8 5.4.2 Content of display of alarm display menu . 5-8 5.5 Inspection monitor menu . 5-9 5.5.1 Inspection

HRX-OM-R016

Display and setting of various functions . 5-1 5.1 List of function . 5-1 5.2 Function. 5-2 5.2.1 Key operations . 5-2 5.2.2 List of parameters . 5-4 5.3 Main screen . 5-7 5.3.1 Main screen . 5-7 5.3.2 Display on the main screen . 5-7 5.4 Alarm display menu . 5-8 5.4.1 Alarm display menu . 5-8 5.4.2 Content of display of alarm display menu . 5-8 5.5 Inspection monitor menu . 5-9 5.5.1 Inspection

HRX-OM-W038

Display and setting of various functions . 5-1 5.1 List of function . 5-1 5.2 Function. 5-2 5.2.1 Key operations . 5-2 5.2.2 List of parameters . 5-4 5.3 Main screen . 5-7 5.3.1 Main screen . 5-7 5.3.2 Display on the main screen . 5-7 5.4 Alarm display menu . 5-8 5.4.1 Alarm display menu . 5-8 5.4.2 Content of display of alarm display menu . 5-8 5.5 Inspection monitor menu . 5-9 5.5.1 Inspection

HRX-OM-O021

Display and setting of various functions . 5-1 5.1 List of function . 5-1 5.2 Function. 5-2 5.2.1 Key operations . 5-2 5.2.2 List of parameters . 5-4 5.3 Main screen . 5-7 5.3.1 Main screen . 5-7 5.3.2 Display on the main screen . 5-7 5.4 Alarm display menu . 5-8 5.4.1 Alarm display menu . 5-8 5.4.2 Content of display of alarm display menu . 5-8 5.5 Inspection monitor menu . 5-9 5.5.1 Inspection

VQ5000

SOL.B VQZ100-47-B Note) It can be used with all voltages. 2-6-3 4 Series VQ5000 Base mounted Base Mounted Plug-in/Plug Lead: Single Unit Model Response time (ms) Flow Characteristics Series Number of solenoids Weight (kg) Model Port size 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Standard 1 W AC Low wattage 0.5 W b Cv b C[dm3/(s.bar)] C[dm3/(s.bar)] Cv 0 5 0 5 0 5 0 5 0 5 0 5 0 5 0 5 0 5 0 5 0

Plug-in Unit

input no. 1, 3, 5, 7.

VHS

pressure relief 3 port valve Port size 02 1 4 Body size Piping 03 VSH40l 3 8 0 1 Left(P) Right(P) Rc(PT) 4 5 3 4 1 2 Port thread 04 1 2 06 VSH50l 3 4 N NPT 1 4 3 8 Applicable port size: , F G(PF) JIS Symbol Circuit Example 3.6-15 Hand Valve Series VH Construction Precautions Be sure to read before handling.

TABLE OF CONTENTS

SERIES 15 FLOW CHARTS 400 400 1/32 1/32 3/64 3/64 1/16 1/16 3/32 3/32 1/8 1/8 ORIFICE-INCH ORIFICE-INCH 100 100 50 50 PRESSURE PRESSURE DROP ROP PSI PSI 10 10 5 01 01 02 02 05 05 1 2 5 WATER FLOW-GPM SERIES 50 FLOW CHARTS COAST PNEUMATICS 8055 E.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Options Manifold Options Blank plate ass'y VVQZ100-10A-5 VVQZ200-10A-5 VVQZ300-10A-5 Use to reserve a valve mounting space on the manifold for furture use.

N5-8 name plate, VQZ3000 VALVE, SOL 4/5-PORT*** $7.97 Add to Quote Add To Cart Add to Cart SMC VVQZ3000-P-5-02 individual sup spacer, vqz3000, VQZ3000 VALVE, SOL 4/5-PORT*** $13.22

N5-8 name plate, VQZ3000 VALVE, SOL 4/5-PORT*** $7.97 Add to Quote Add To Cart Add to Cart SMC VVQZ3000-P-5-02 individual sup spacer, vqz3000, VQZ3000 VALVE, SOL 4/5-PORT*** $13.22

N5-8 name plate, VQZ3000 VALVE, SOL 4/5-PORT*** $7.97 Add to Quote Add To Cart Add to Cart SMC VVQZ3000-P-5-02 individual sup spacer, vqz3000, VQZ3000 VALVE, SOL 4/5-PORT*** $13.22

N5-8 name plate, VQZ3000 VALVE, SOL 4/5-PORT*** $7.97 Add to Quote Add To Cart Add to Cart SMC VVQZ3000-P-5-02 individual sup spacer, vqz3000, VQZ3000 VALVE, SOL 4/5-PORT*** $13.22

IDG

to 55(3) (3) 5 to 50 Ambient temperature (C) 5 to 50 5 to 55 5 to 50 5 to 50 Outlet air atmospheric pressure dew point (C) Standard performance 15 Inlet air flow rate (l/min (ANR)) (4) 56 111 222 335 560 830 1110 665 28 Outlet air flow rate (l/min (ANR)) Purge air flow rate (l/min (ANR)) (5) 50 100 200 300 500 600 750 1000 25 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco

Series IDG

to 55C (23 to 131F) Note 1) 5 to 55C (23 to 131F) 5 to 55C (23 to 131F) Note 1) 5 to 50C (23 to 122F) Inlet air temperature Ambient temperature 5 to 50C (23 to 122F) 5 to 50C (23 to 131F) Outlet air atmospheric pressure dew point Inlet air flow rate l/min (ANR) (SCFM) Note 2) Standard performance 25C (68F) 62 (2.2) 125 (4.4) 250 (8.8) 375 (13.2) 625 (22.1) 900 (31.8) 1190 (42.0) 725 (25.6

CLA

~~ , A 00) 0(0) 0 (2.5) 2(6) 4(7. 5) ~ , 40 D-AG 43.5 49 55.5 3 D-AS 1(0 1(0) 5(1.5 I O{S.5) 8(4 3t 35 42 so 57 .5 ~ Ht A 00) 00) 0(2.5 26 417 .5) D-A3 B !

CJ2X/CUX/CQSX/CQ2X/CM2X

MK(2) 10 Note) 15 Note) 1 pc. 5 5 Note) Please consult with SMC for shorter stroke length than indicated in the table.