AS

Rod O.D.Applicable tubing O.D. 10 20 25 30 M5 standard 01 standard 02 standard 03 standard 04-04 06-06 08-08 10-10 4 4 6 6 8 8 10 10 wBring up the body, while holding it down. w eTake the finger off the release ring and remove the speed controller from the One-touch fitting. Control type Lock nut option Nil J Hexagon lock nut Round lock nut 0 1 Meter-out Meter-in Plug-in type 609

V

T O R M A N I F O L D 1 10 Stations Common supply and exhaust M a i n t e n a n c e a n d a d j u s t m e n t i s p o s s i b l e w i t h o u t d i s a s s e m b l y o f the manifold H O W T O O R D E R NZM V A C U U M E J E C T O R M A N I F O L D (N)ZZM B NUMBER OF STATIONS 01 ... 1 Station 02 ... 2 Stations to 10 ... 10 Stations EXHAUST PORT 04 ... 1/2 06 ... 3/4 PORT THREAD Nil ...PT

10%, Ripple (p-p) 10% or less (with power supply polarity protection)40 mA or lessNPN or PNP open collector 1 output, NPN or PNP open collector 2 outputs (selectable)80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms or less (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?

10%, Ripple (p-p) 10% or less (with power supply polarity protection)40 mA or lessNPN or PNP open collector 1 output, NPN or PNP open collector 2 outputs (selectable)80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms or less (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?

10%, Ripple (p-p) 10% or less (with power supply polarity protection)40 mA or lessNPN or PNP open collector 1 output, NPN or PNP open collector 2 outputs (selectable)80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms or less (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?

10%, Ripple (p-p) 10% or less (with power supply polarity protection)40 mA or lessNPN or PNP open collector 1 output, NPN or PNP open collector 2 outputs (selectable)80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms or less (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?

10%, Ripple (p-p) 10% or less (with power supply polarity protection)40 mA or lessNPN or PNP open collector 1 output, NPN or PNP open collector 2 outputs (selectable)80 mA28 V (at NPN output)1 V or less (with load current of 80 mA)2.5 ms or less (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?

VHS20/30/40/50

Port size Body size Thread size Thread type Symbol N F Rc NPT G 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 An interface part is required if a spacer or spacer with bracket shown in the table below is attached to a modular FRL.

Base Mounted How to Order Manifold VQC1000 Series Plug-in Unit

Nil None All stations with back pressure check valve With DIN rail (Rail length: Standard) Note 7) B Note 2) D D Note 3) Nil None With DIN rail (Rail length: Special) Note 7) 1 1 station Cylinder port size K Note 4) N Note 10) Special wiring spec.

Series AR-B 10- 21- Regulator Series ARK-B 10- Regulator with 21- Backflow Function

Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order. q Symbol Description Body size 20 30 40 50 60 25 Nil K Note 1) Without backflow function With backflow function With backflow function w + Nil N F Thread type e Rc NPT G + 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 Port size r + Nil B Note 3) H Note 2) a Without mounting option With bracket

Precision Regulator

Suffix R: Bracket, Name plate, Mounting on the opposite side Note1) Type of setting 1 : Air operated Accessories NIL: None B: Bracket (P36203018) G: Pressure gauge Note2) Note3) Thread type when Rc and G. Thread type when NPT. G43-10-01 G43-P10-N01-X30 Port size 02 : 1/4 03 : 3/8 04 : 1/2 2 : 0.010.8MPa Set pressure Thread type NIL:Rc F:G N:NPT 4.

Air cooled Thermo-con (Compact type)

to 10.

MHx-OMY0001

(Nm) L(mm) MHM-16D M3x0.5 0.63 6 MHM-25D M4x0.7 1.5 8 MHM-32D M5x0.8 3 10 MHM-50D M6x1 5.2 12 (N) MHM-16D 100 MHM-25D 200 MHM-32D 300 MHM-50D 500 -7- 2-3. 40 2-4. () 5 5 P-01-11 -8- 2-5. 1.52 2-6. 1 ()ISO VG320 (SDS) -9- 2-7. 1) 1) 2) 3) 12mm -10- 2 C3 C1 C2: C3 D-M9V D-M9WV D-M9AV D-M9 D-M9W D-M9A D-P3DWA A B E G A B E G L A B E G L D F H MHM-16D 9.1 9.1 5.6 4.6 8.1 12.8 11

Precision Regulator

Suffix R: Bracket, Name plate, Mounting on the opposite side Note1) Type of setting 1 : Air operated Port size 02 : 1/4 Note4) Accessories NIL: None B: Bracket (P36202028) G: Pressure gauge Note2) Note3) Thread type when Rc and G. Thread type when NPT. IR2120 : G43-10-01 G43-P10-N01-X30 2 : 0.010.8MPa Set pressure Thread type NIL:Rc F:G N:NPT 4.

Two Hand Control Valve

P2 A R P1 0.5 s or more R P2 No output A A 1683 A VR51 Series Dimensions 70 45 (18) 4.9 Supply port P1(11) Flame resistant One-touch fitting: 6, 1/4 Exhaust port (with silencer) R(4) 10 26 9 27 Supply port P2(12) Flame resistant One-touch fitting: 6, 1/4 Output port A(2) Mounting thread 11.5 22 Flame resistant One-touch fitting: 6, 1/4 2 x M5 x 0.8 Thread depth 5 45 Mounting thread

PSxx-OME0003CN

PSE532 PSE533 01 MPa 0-101 kPa 0101 kPa -101101 kPa -0.10 MPa 10.10 kPa -10.10 kPa 1.5 MPa 500 kPa DC1224 V10%(p-p)10%() 15 mA () DC15 V() DC0.61 V() 1 k (25 ) 2%F.S.(),5%F.S.() 1%F.S. 1%F.S.

Safety Speed Control Valve (SSC Valve) Series ASS 1

bracket 1 3 5 6 AK 8 3 B 3 4 1 Port size ASS Applicable series Port size 01 02 03 04 06 10 Type 1 8 ASS100/110 ASS300/310 ASS300/310 ASS500 ASS500/600 ASS600 ASR PAT.PEND 1 4 00 10 Meter-out control type Meter-in control type Meter-in type is available only for ASS110 and ASS310. 8 3 ASF 1 2 3 4 1 JIS Symbol Thread type Nil N F Rc NPT G Meter-out control Meter-in control Caution Be sure

VFR2000-OMM0001

(Part 1: General requirements) ISO 10218-1992: Manipulating industrial robots -Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -(1 :) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4.2 -2No.VFR2000-OMM0001 1 1 3) 3) 1 1 () -3No.VFR2000-OMM0001 5 5 5 5 ( ) () () 3 3 EXH VVFS2000-R-01-1,2 VVFS2000-R-02-1,2) ( ) ( ) 3 1 DC 3 () -4No.VFR2000-OMM0001 5 5 5 5 0.1 2 C-R () C-R DC 3% AC 20% (

Pressure Relief 3 Port Valve with Locking Holes VHS20/30/40/50

Port size Body size Thread size Port thread Symbol N F Rc NPT G 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 An interface part is required if a spacer or spacer with bracket shown in the table below is attached to a modular FRL.

PFxx-OMK0003CN

PF-OMK0003CN-E PFMV505 PFMV510 PFMV530 PFMV505F PFMV510F PFMV530F N2 (JIS B8392-1 1.1.21.6.2ISO8573-1 1.1.21.6.2) 2 2 2 () 00.5 01 03 -0.50.5 -11 -33 1 L/min L/min L/min L/min L/min L/min 2F.S. 3 2F.S.(1535 ) (25) 5F.S.(050 ) 2F.S.(0300 kPa) 5F.S.(-700 kPa) (0kPa 4) -70300 kPa -100400 kPa 500 kPa 5 15 V 5 ms 1 k DC1224 V10(p-p) 10() 16 mA IP40 050 () 050 -1060 () 3585R.H