NCA1

1/8 5/16 3 1/4 1 1/2 3 3/4 1/2 5/8 2 1/4 1 1/4 3/8 4 1 1/2 4 1/2 1/2 5/8 2 1/4 1 1/4 3/8 5 1 1/2 5 1/2 1/2 5/8 2 1/4 1 1/2 7/16 6 1 3/4 6 1/2 3/4 3/4 2 3/4 1 5/8 7/16 BORE TD TL TM UM UW 1 1/2 1 1 2 1/2 4 1/2 2 1/2 2 1 1 3 5 3 2 1/2 1 1 3 1/2 5 1/2 3 1/2 3 1/4 1 1 4 1/2 6 1/2 4 1/2 4 1 1 5 1/4 7 1/4 5 1/4 5 1 1 6 1/4 8 1/4 6 1/4 6 1 3/8 1 3/8 7 5/8 10 3/8 7 5/8 11 Dimensional Drawings Expanded

5 Port Solenoid Valve

1 !0 o i !6 !7 w e r !8 @1 @6 @5 Cable 0.3 mm2 x 25 pins O.D. 1.4 !9 y t @0 u 10 Seal (Length) Polarity Terminal 015 no.

Electric Actuator/Slider Type

6 e u @0 @1 @2 w !4 !2 !0!1 !3 !

LEC-OM071xx

1 6 Utility Functions (Fn) 6.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

1 6.

Table of Contents

1 !2 !3 !4 !5 !6 !7 !8 !

Basic type / Direct mount type Series CY3B/CY3R

6 @4 @1 @8 $0 #9 #3 @2 #0 #1 $1 w @9 i #2 !1 o q u r y e @6 @5 @3 @7 CY1L10 to 40 @2 $0 #9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !5 @8 #7 #6 $1 F G Area G (10) Enlarged view F 10, 15 #0 @7 #1 w u i o !1 #2 q !3 r y e @6 @5 @3 $1 10 Component Parts Material No. Description Note No.

ZP

ZM 4, 6, 8 tube M6 x 1 M8 x 1 ZH 6, 8 tube M6 x 1 M8 x 1 M6 x 1 M8 x 1.25 ZU How to Order ZL Vacuum entry port Mounting thread ZY Pad type Pad dia.

5

+ 30 (n 2) (n = 2, 4, 6, 8) Note 1) 80 + 30 (n 2) (n = 2, 4, 6, 8) Note 1) 85 + 30 (n 2) (n = 2, 4, 6, 8) Note 1) n (Same surface) 90 + 100 (n 2) (n = 2, 4, 6, 8) Note 1) 95 + 100 (n 2) (n = 2, 4, 6, 8) Note 1) 100 + 100 (n 2) (n = 2, 4, 6, 8) Note 1) 105 + 100 (n 2) (n = 2, 4, 6, 8) Note 1) 110 + 100 (n 2) (n = 2, 4, 6, 8) Note 1) 1 60 65 75 80 85 2 (Different surfaces) 70 75 80

Free Mount Cylinder Series CU

Free flow 3.5 2.7 7 1.5 Effective area (mm2) 4 6 Note) Supply pressure: 0.5 MPa, Temperature: 20C In-line Type Air Flow/Effective Area AS2001FM Model AS1001FM AS2051FM 8 3.2, 4, 6 6 Metric size 6 4 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 1/4", 5/16" 3/16", 1/4" Inch size 3/16" 5/32" 12 7 Air flow (l/min (ANR)) 38 Controlled flow 0.2 0.1 0.6 Effective area (mm2) 100 460 230 Flow rate (l/min (

LEC-OM07605CN

PA08]: _ _ _ 3) 3 ( ) 4 5 6 7 8 38 7.1.17.1.2 9 10 (c) 1)[Pr. PB09 ] [Hz]= (1+)x2 2)[Pr. PB10 ] [ms] 20003000 /(1+) 6 15 6 3)[Pr. PB08 ] 4 1 8 1 (1+) 4)[Pr. PB07 ] () 4 1 8 1 (1+) 6 16 6 6.5 2 X-Y22 (1) 2 1 2 21 (a) PB06 GD2 PB08 PG2 PB09 VG2 PB10 VIC (b) PA09 RSP PB07 PG1 (2) 2 2 2122 ([Pr.

Made to Order

8 1/4 1/4 3/8 3/8 1/2 84 84 94 94 114 114 4 4 5 9 11.5 17 6.5 9 10.5 12 14 15 19.5 27 32 32 37 37 13 14 15.5 16.5 19 19 46 52 65 75 95 114 47 58 67 67 81 81 17 22 27 27 32 41 6 8 11 11 13 16 32.5 38 46.5 56.5 72 89 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 12 16 20 20 25 30 6 6 7 7 10 10 30 35 40 45 45 55 10 14 18 18 22 26 13 13 14 14 20 20 16 16 16 16 16 16 1860 Made to Order

High Purity Fluoropolymer

Metric size Inch size 1/4" 3/8" None 1/8" 1/2" 3/4" 1" 6 8 10 12 19 1/8" 1/4" 3/16" 3/8" 1/2" 3/4" 1" 25 4 3 1 2 3 Male 4 5 Connector LQ1H P.5 6 1 2 3 Female 4 5 P.6 6 1 2 3 Male 4 5 Elbow LQ1L P.7 6 1 2 3 Female 4 5 P.8 6 1 2 3 Male 4 5 Run tee LQ1R P.9 6 1 2 3 Female 4 5 P.10 6 Features 2 Series LQ1 ,TL/TIL 2 Series Appearance Class Port size Tube O.D.

Step Motor Controller

B-1 A-1 B-2 A-2 B-3 A-3 Cable color Signal Nil 2 1 6 5 3 4 A A B B COM-A/COM COM-B/ Brown Red Orange Yellow Green Blue S Standard cable Cable color Connector D terminal no. Shield 12 13 7 6 9 8 3 Brown Black Red Black Orange Black Vcc GND A A B B B-4 A-4 B-5 A-5 B-6 A-6 Connector B terminal no.

CA2

1 !2 !3 !4 !5 !6 !7 !8 !

CJ2

For detailed specifications, refer to page 6-16-1.

JXCx-OMT0023

setting in auto tuning mode 1 . 14 6.4 2-gain adjustment mode . 15 6.5 Manual mode . 16 6 1 6.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

1/4 How to Order Type 43 VV5Z3 05 43 1 C4 1(P), 3/5(R) port thread type 4(A), 2(B) port size Stations 02 2 stations 3/5(R) port Nil F N Z NPTE Rc C4 One-touch fitting for 4 Rc 1/8 G B3 One-touch fitting for 5/32" 20 20 stations 4(A), 2(B) port 1(P) port NPT Rc 1/8 How to Order Flat ribbon cable type 41P Applicable solenoid valve VV5Z3 41P 05 M5 1 3 5 6 1 3 5 6 VZ343MOZ Stations 4(A), 2

C85

Electroless nickle plating 1 1 1 1 1 1 1 1 1 2 1 1 2 2 1 1 1 2 2 1 1 2 2 q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

F

21 15 16 5.6 5.6 16 5/32 1/16 KQH03-33S 11.11 22 18 16 3 7 6 M5x0.8 KQH06-M5 11.8 24 20.5 17 4 4 9 5/32 1/8 KQH03-34S 11.11 22 18 16 3 9 6 1/8 KQH06-01S 12 22.5 18.5 17 13.1 13.1 10 5/32 1/4 KQH03-35S 14.29 21 15 16 3 16 6 1/4 KQH06-02S 14 23 17 17 13.1 13.1 15 3/16 1/8 KQH05-34S 12.7 22 18 16 3.5 11 6 3/8 KQH06-03S 17 23 16.5 17 13.1 13.1 27 3/16 1/4 KQH05-35S 14.29 21 15 16 3.5 12 8 1/8