SMC Corporation of America
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One set of diaphragms monitors the pressure differential and operates the micro switch through the rod w and operating lever r. The rod w moves downward with increased flow, and upward with decreased flow. Moving the gear t upward or downward by the adjusting gear e manually offers an electric signal at various flow rates.

2 r w u e !5 y !9 u t MDHR3 !4 !3 q !1 @0 @1 w o e i !5 MHZ MHF r !7 !6 t !8 !0 !2 i !9 y u MHL Component Parts MHR MHR Description Material Description Material Note No. Note No.

(Values at the initial period) VG VP JIS Symbol (A) 2 S070 VQ Construction 1 (P) 3 (R) VKF q t o r e VQZ y VZ y VS VFN i w 1(P)2(A)3(R) P R Description Component Parts No. q w e r t y u Note Material Aluminum die-casted Aluminum die-casted Aluminum Resin Stainless steel Steel Solenoid coil assembly Sub-plate Body Spool/Sleeve Manual override Return spring Bracket assembly Gasket assembly

Thermo-chiller/ Rack Mount Type HRR Series How to Order Option U Air-cooled Refrigeration HRR A 20 012 (UL Standards) Cooling capacity Option 012 1000/1200 W (50/60 Hz) 018 1600/1800 W (50/60 Hz) 024 2000/2400 W (50/60 Hz) 030 2500/3000 W (50/60 Hz) Nil None DM With electric conductivity control function, Applicable to DI water piping M Applicable to DI water piping T High-pressure pump mounted

Thermo-chiller/ Rack Mount Type HRR Series How to Order Option U Air-cooled Refrigeration HRR A 20 012 (UL Standards) Cooling capacity Option 012 1000/1200 W (50/60 Hz) 018 1600/1800 W (50/60 Hz) 024 2000/2400 W (50/60 Hz) 030 2500/3000 W (50/60 Hz) Nil None DM With electric conductivity control function, Applicable to DI water piping M Applicable to DI water piping T High-pressure pump mounted

9 e r t y u q !3 @9 #0 #1 #2 #3 #4 #5 #6 !4 !5 w !2 @0 @8 o !0 !1 i Manual release non-lock type: Suffix N @4 @5@6@7 Manual release lock type: Suffix L Parts List No.

x PC F=q x PA+(e-q) x PC F=-q x PA+r x PB+(w-e) x PC F=q x PA q, w and e are piston areas.

Press the knob to lock the setting. t Trigger Switch to turn on and off static neutralization y One-touch fitting Supply port of compressed air t i u Power supply connector Connector for power supply, F.G., and external switch inputs i Lighting LED Illuminate the object during static neutralization * Inside of the slide cover y u Description of LED Indicators LED Indicators w q e No.

drain port (Rc3/8 w/ valve and plug) switch Level Sub tank switch Sub tank drain port (Rc3/8 w/ valve and plug) Refrigerant pressure gauge Water regulating (high) valve Facility water outlet (Rc1/2 w/ plug) * The water regulating valve is used for each channel.

ON/OFF, with load (ON:OFF=3:1)W A variety of single/double modular configurations is possible.

VZ (A) 2 (A) 2 VS 3 (R) 1 (P) 3 (R) 1 (P) r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts Material Description Notes No.

2 u t e w CHQ CHK CHK CHN CHM CHS CH2 32 to 100 20 to 25 CHA Related Products DWithout auto switch Parts List Replacement Parts/Seal Kit Content Description No. Material Note Bore size (mm) Seal kit no. 1 20 Rod cover Aluminum alloy Black anodized CHKD20-PS 2 25 Head cover Aluminum alloy Black anodized CHKD25-PS 3 32 Cylinder tube Aluminum alloy Hard anodized CHKD32-PS 40 Nos. u, !0, !

CRBU Basic (Side port) CRB1FW Basic (Axial direction port) CRB1FW W/ angle adjuster CRB1FWU W/ auto switch CDRB1FW W/ angle adjuster and auto switch CDRB1FWU Size Size Size Size Size Angle , #11 (#1+#11) , #12 (#3+#12) , #13 (#5+#13) , #14 (#7+#14) , #15 (#9+#15) S SCRB SE SCRB S SCRB S SCRB S SCRB Size Size Size Size Size Angle Angle CRA1 Angle Angle CRQ Ass'y Part Number: P211070

SMC Corporation of America (Detroit) 2990 Technology Drive Rochester Hills, MI 48309 TEL: (248) 299-0202 FAX: (248) 293-3 w w w . s m c u s a . c o m SMC CORPORATION OF AMERICA U.S. HEADQUARTERS 3011 N. FRANKLIN ROAD INDIANAPOLIS INDIANA 46226

PB Construction Component Parts q e Description Solenoid coil Body Fixed armature Armature Return spring Poppet Diaphragm assembly Material No. q w e r t y u r Resin Stainless steel Stainless steel Stainless steel NBR HNBR, Resin w t y u 17-2-83 Series VQ20/30 Dimensions: Series VQ20 In-line Type: Grommet (G) VQ21A1-GBracket mounting holes Mounting holes 2-3.2 through 2-3.2 through Light

V Petroleum Water-glycol, Emulsion Phosphoric ester 3B Relief valve 3 1/2B 4B 0 1 With relief valve None Note) N, W and V refer to the hydraulic fluid symbol indicated at the end of the element part number.

W Water-cooled Radiating method 10 5.1 in (130 mm) x H7.1 in (180 mm) Liquid tank size Communication A B RS-485 RS-232C Liquid tank W HEB C H 10 002 C Round Shape of bath Option Nil N Rc1/4 NPT1/4 002 140 W Cooling capacity The option should be specified when ordering.

F2 P3 wSub-plate Thread type Port size Thread type Rc G Note) Symbol Port size 1/4 3/8 Nil F N T Symbol 1 2 NPT NPTF !1Gasket DXT172-7 !