V

H O W T O O R D E R B O D Y P O R T E D VA LV E S I N G L E U N I T VQ1 L 1 6 0 N C6 5 S U B P L AT E SUP C Y L I N D E R P O R T S C3 One Touch Fittings for 3.2 C4 One Touch Fittings for 4 C6 One Touch Fittings for 6 M5 M5 (10-32Nom) N1 One Touch Fittings 1/8 N3 One Touch Fittings 5/32 N7 One Touch Fittings 1/4 S E R I E S VQ1000 C O N F I G U R AT I O N 1 2 Position single 2 2 Position

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

10-SS5YJ5-41 Base mounted for internal pilot Type 10-SS5YJ5-42-01 10-SYJ543 Type 10-SS5YJ5-42-C6 Type 10-SS5YJ5-43 Note) The values are for individually operated 2 position type manifold bases.

Table of Contents

Max. 16 stations C3, C4, C6, M5 C6 VQ1000 Side D-sub Connector (25 pins) D side U side Stations 1 2 3 Cable assembly 015 030 050 AXT100-DS25Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Wire Color by Terminal No. of D-sub Connector Cable Assembly The D-sub connector

Series VQ Metal Seal/Rubber Seal Body Ported

Kit (D-sub connector) 15 pin F Kit (Flat cable connector) 10 pin, 16 pin, 20 pin P How to Order Manifold How to Order Manifold 06 FSA D VV5Q14 06 P SC VV5Q14 D Ex.) Ex.)

SZ3000

Double wiring specification Symbol D Mounting position 11 12 10 11 10 stations 11 stations D Side 11 stations 12 stations Specified layout Note 2) Specified layout (up to 22 solenoids possible) ... ... ... ...

SYJ3000/5000/7000

length) 64.3 [66.5] 54.5 [56.7] 63.4 56 49.5 R1 P R2 R1 P R2 R1 P R2 10 10 10 10 10 10 28 28 28 14 14 14 5 5 5 28.5 28.5 28.5 35.6 35.6 35.6 Refer to page 1-5-79 for dimentions with connector cable. 1-5-11 12 Series SYJ3000 2 Position Double [ ]: AC G H Grommet (G), (H): SYJ3240-M5 M5 x 0.8 (A, B port) 10 5 10 2-3.2 (For mounting) 22 2.5 Manual override B A 11 A B Courtesy of Steven Engineering

VQC

A Individual EXH spacer VVQ1000-R-1-C6 VVQ2000-R-1-C8 EXH block plate VVQ2000-19A DIN rail mounting bracket [-D] VVQ1000-57A VVQ2000-57A Silencer (EXH port) AN200-KM8 (For VQC1000) AN200-KM10 (For VQC2000) 5 Station 7 21 22 23 SOL. B 9 10 11 (-S) (-T) (-S) (-T) 18 SOL. A 6 Station 8 SOL. B 24 25 19 12 13 C6 (EXH port) 6 One-touch fitting COM 13 Connector terminal no.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

If 12VDC specifications are required, enter "12" at the end of the assembly part number. 1 2 1 2 P N D side SZ3000-40-6A-D For flat cable 20 pins SZ3000-40-5A-D 1 2 1 2 P N D side SZ3000-40-8A-D For flat cable 10 pins SZ3000-40-7A-D A connector block assembly can be shipped as an assembly only in the case of double wiring.

5 Port Solenoid Valve, Series VQC

A Individual EXH spacer VVQ1000-R-1-C6 VVQ2000-R-1-C8 EXH block plate VVQ2000-19A DIN rail mounting bracket [-D] VVQ1000-57A VVQ2000-57A Silencer (EXH port) AN200-KM8 (For VQC1000) AN200-KM10 (For VQC2000) 8 5 Station 7 21 SOL. B 9 (-S) (-T) (-S) (-T) 18 22 10 SOL. A 23 6 Station 8 11 SOL. B 24 19 12 25 C6 (EXH port) 6 One-touch fitting 13 COM 13 Connector terminal no.

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

D A L Series Part no. 10-SZ3000 SZ3000-114-2A Dimensions Applicable fitting size d Model A L D 10-KQP-04 10-KQP-06 10-KQP-08 10-KQP-03 10-KQP-07 10-KQP-09 4 16 32 6 6 18 35 8 8 20.5 39 10 5/32" 16 32 6 1/4" 18 35 8.5 5/16" 20.5 39 10 383 Cassette Type Manifold 10-SZ3000 Manifold Option DIN rail dimensions / Weight D-sub connector (25 pins) / Cable assembly Directional Control Valves Air Grippers

VFR

is D side mounting only. 10 Note) 10 stations Note) Base 01T/10/40: 2 to 10 stations Base 01C/01F: 2 to 8 stations Including stations of control unit.

5 Port Solenoid Valve SY Series

, N7 C8, N9 M plug connector: M SY5120-M(-F ) DIN terminal (D): C4, N3 C6, N7 C8, N9 SY5120-W0(-F ) 1 2 M8 connector (W0): C4, N3 C6, N7 C8, N9 1 2 C4, N3 C6, N7 C8, N9 1 2 SY5120-D(-F ) 60.9 Applicable cable O.D. 3.5 to 7 (Lead wire length) Approx. 300 95.8 [98] 53.4 28.1 [35.1] 104.9 Max. 10 42.1 12.7 27 32.6 M8 x 1 15.1 (Lead wire length) 39.2 [46.2] Approx. 300 Pg7 105.8 86 [88.2] 94.9

SZ3000

If 12 VDC specifications are required, enter 12 at the end of the assembly part number. 1 2 1 2 P N SZ3000-42-6A-DSZ3000-42-5A-D For flat ribbon cable 20 pins D side 1 2 1 2 P N SZ3000-42-8A-DSZ3000-42-7A-D For flat ribbon cable 10 pins D side SZ3000-42-10A-D For serial D side Note) Connector block assembly can be shipped as an assembly only in the case of double wiring.

42

Indicator light Stations 11.7 D side D side U side U side 16.2 43.2 11.7 Manual override 16.2 43.2 D side entry (LD) AMC610-10 Exhaust cleaner 29 215 AMC610-10 Exhaust cleaner D side mounting D side mounting 118 118 90 149 2 x G3/4 (Electrical entry) 90 149 1/2" 1(P) port 1/2" 1(P) port U side mounting U side mounting 17.5 17.5 3 1/8" PE. port 3 1/8" PE. port 38 70 38 53 Dimensions Formula

Vacuum System Peripherals:

S U D side D U side 2 to 10 stations B Special specifications M 2 to 20 stations Both sides Made to order. When using both types, specify C4 and C6 specifically; do not just use X marking.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

A L D VQZ D KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32 35 39 43 3.2 6 8 10 12 VQD Color: White VZS VFS EXH port silencer VS 63 Silencer is installed in the EXH port.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

C6: One-touch fitting for 6 D side VQD Manifold base (9 stations) SS5Q13-09FD2-D F kit (D-sub connector kit) SS5Q13-09FD2-D 1 set (F kit 9 station manifold base) SQ1130-5-C6 4 sets (2 position single) SQ1230-5-C6 4 sets (2 position double [latching]) SSQ1000-10A-3 1 set (Blanking plate) The asterisk denotes the symbol for assembly.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

L 285.5 21 273 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 Fitting blank plug KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 L A Dimensions (mm) Applicable fitting d Part number A L D D KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

fitting (A, B port) Applicable tube C4: T0425 C6: T0604 10.6 C4: (3) C6: (3.2) 32.3 A B 5 11 10 19 2-2.6 (Mounting holes for manifold) Manual override Depress and turn to operate and lock override. 103.2 (GZ, GS: 104.6) [106.6] Manual override (Non-locking) 29.5[36] 23 17.1 10.5 26.6 10 3 20 11 2-2.6 (Mounting holes) 15 39.3 93.4 R1 P R2 21 5-M5 X 0.8 (Piping port) [ ] for AC 3 4 5 3 4 5

SYJ300/500/700

Example: SS3YJ5-20-03 .1 set (Manifold base) SYJ512-5LZ-M5.2 sets (Valve) SYJ500-10-1A.1 set (Blanking plate assembly) SS3YJ5-41R-03-C6 . 1 set (Manifold base) SYJ514R-5G.2 sets (Valve) SYJ500-10-3A .1 set (Blanking plate assembly) The asterisk denotes the symbol for assembly.