Stability of suction position, 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-50UM ZP3E-125UM 4 8 Displacement [mm] Displacement [mm] 3 6 2 4 N, S, U, F, CL N, S, U, F, CL 1 2 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-63UM 6 Displacement [mm] 4 N, S, U, F, CL 2 0 0 10 20 30 40 50 60 70 80 Vacuum pressure
Description Symbol Description Applicable model Model combination AC20 to 60 AC20 to 60 AC20 to 60 AC20 to 60 AC25 to 60 AC20 AC25 to 60 AC20 to 60 AC20 to 60 1 Note 8) 0.02 to 0.2MPa setting Combination 2 3 6 8 C J Note 9) Metal bowl Symbol Filter Regulator Mist Separator Regulator Air filter Lubricator Lubricator with drain cock Nil A B C D w q e Nylon bowl (including sight dome) w q
Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Note 1) Refer to page 522 for power consumption of AC type.
Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Note 1) Refer to page 522 for power consumption of AC type.
5.5 5.5 11 MY1 H (NN-1) X H G Cross section AA Cross section BB (mm) Model F 20 30 20 28 38 ZZ 48 58 68 90 106 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 N 4 4 6 6 6 HA 20 20 20 30 48 GA 11 21 31 43 41 MXS6L-10 MXS6L-20 MXS6L-30 MXS6L-40 MXS6L-50 3.11-29 Series MXS Dimensions MXS 8L
Spring washer (nominal size 3) 85 77 68 60 51 43 34 26 17 85 IN 201 181 161 141 121 101 80 60 40 201 OUT 40, 50, 63, 80, 100 8 16 BMG1-040 151 136 121 106 91 76 60 45 30 151 IN 314 283 251 220 188 157 126 94 63 314 OUT 10 20 236 212 189 165 142 118 94 71 47 236 IN 491 442 393 344 295 246 196 147 98 491 OUT 12 25 378 340 302 265 227 189 151 113 76 378 IN 804 724 643 563 482 402 322 241 161
15.5 45 29 MSQ MRQ D20Angle adjustment bolt 2-M5 x 0.8 (Port location: Side ported type only) A port B port 1 24 2 60 (69) 18.5 34 D-97/93A 15 30 11-5-11 11 Series MSUA These drawings indicate the condition when the B port is pressurized.
K2 L3 G1 L1 G2 EM G3 CA H6 R1 CN CH d3 S5 K1 G2 ER G3 EN G1 K2 H6 EU 11 11 15 15 18 18 10 12 12 16 16 20 6.6 6.6 9 9 11 11 38 41 50 52 66 76 51 54 65 67 86 96 10 10 12 14 18 20 21 24 33 37 47 55 7 9 11 11 12.5 13.5 18 22 30 35 40 50 26 28 32 40 50 60 31 35 45 50 60 70 32 36 45 50 63 71 8 10 12 12 14 15 10 11 12 15 15 19 32 40 50 63 80 100 11 11 15 15 18 18 10 12 16 16 20 20 21 24 33 37 47
Rc 3/8 EXH: Rc 1/4 60 OUT (328) Tank OUT port Rc 1/2 278 180 170 4 x 11 32 32 Drain port Rc 1/4 120 180 312 460 Connected to VBA20A Connected to VBA22A Tank IN port Rc 3/8 Booster regulator IN port Rc 3/8 Booster regulator IN port Rc 3/8 EXH: Rc 3/8 EXH: Rc 3/8 (454) 442 (417) Tank OUT port Rc 1/2 (367) (367) OUT OUT 278 180 180 170 4 x 11 4 x 11 32 32 120 180 180 120 Drain port Rc 1/4 312
aize (mm) 40 550 63 80 9 12 80 42 100 51 216 43 11.2 59 224 ~6 20 27 % 42 11 20 45 153 8 60 30 ~ 46 10 21 50 168 0 70 9 12 90 50 11 0 58 238 52 11 .2 66 ""246 y. ~ Siroke 13.5 18 130 76 160 71 297 65 12.5 60 ~ 13.5 18 150 92 180 72 316 65 14.0 81 ~ 11 .5 15 105 59 130 58 255 52 11.2 66 0/. 16 31 ~ 48.5 13 23 60 182 0 86 37 ~. 55 15 23 70 208 0 102 1 14 40 \; 56.5 15 25 80 226 0 116 100
pilot specifications, refer to page 2-7-60.
Note) 2 position single 1 2 Note) 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC G: Grommet C kit single only.
Seal Metal seal Rubber seal Coil voltage 0 1 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Function 1 2 3 Stations U side Standard type (1 W) Low wattage type (0.5 W) External pilot Nil Y R (1) D side (2) Note 1) Applicable to DC specifications. Note 2) Refer to page 2-5-39 for external pilot specification.
13 7 6 9 8 11 10 3 Connector B terminal no.
(V) 24, 6, 12, 48 15 to +10% of rated voltage 1.8 (With indicator light 2.1) [24 VDC: 75 (With indicator light 87.5)] Body ported Allowable voltage fluctuation (%) Power consumption (W) [Current mA] DC Note) 4.5/50 Hz, 4.2/60 Hz 100 VAC: 45/50 Hz, 42/60 Hz 200 VAC: 22.5/50 Hz, 21/60 Hz Note) Inrush Apparent power (VA) [Current mA] AC Holding 3.5/50 Hz, 3/60 Hz 100 VAC: 35/50 Hz, 30/60 Hz
Hz), 200 to 230 VAC (50/60 Hz) Reference page Page 607 533 11-LEJS Series AC Servo Motor Clean Room Specication Specifications 11-LEJS40, 63 AC Servo Motor Model 11-LEJS40S2 6 11-LEJS63S3 7 Stroke [mm] Note 1) 200, 300, 400, 500, 600, 700, 800 900, 1000, 1200 300, 400, 500, 600, 700, 800, 900 1000, 1200, 1500 Work load [kg] Note 2) Horizontal 30 55 45 85 Vertical 5 10 10 20 Up to 500 1200
11 35 1.5 7 B A NN-M8 x 1.25 thread depth 16 6H9 depth 6 +0.030 0 HA GA 6H9 depth 6 +0.030 0 Section AA Section BB (mm) Model F 55 46 55 65 75 60 48 60 65 N 4 4 4 4 4 6 8 8 8 G 23 23 23 23 32 44 31 56 H 55 55 55 65 80 44 66 66 NN 2 2 2 2 2 3 4 4 4 GA 23 23 23 23 32 72 88 97 122 HA 55 55 55 65 80 65 88 132 132 I 16 16 16 16 16 31 20 18 18 J 56 56 56 66 90 100 150 205 230 K 35 45 55 65 75
3H9 2.5 deep +0.025 0 5 M 0.5 18 20 Z ZZ (NN-1) x H G H 11 5.5 5.5 11 A B 3.2 6.5 7 7 12 4 NN-M4 x 0.7 thread 8 deep A B 3H9 2.5 deep +0.025 0 3H9 2.5 deep +0.025 0 HA GA Section AA Section BB (mm) Model F 20 30 20 28 38 GA 11 21 31 43 41 HA 20 20 20 30 48 N 4 4 6 6 6 G 6 6 11 13 17 H 25 35 20 30 24 NN 2 2 3 3 4 I 10 10 7 19 25 J 17 27 40 50 60 K 22.5 32.5 42.5 52.5 62.5 Z 41.5 51.5 61.5
59/60 59/60 59/60 61/64 61/64 Dimensions 10 mm W483xD550xH310 W483xD550xH399 Accessory20 Power supply connector,Maintenance handle for particle filter20, Operation manual,Particle filter element20 Weight 11 kg 40 41 45 HRR Series 9.1 Specifications 9-3 HRX-OM-W002 Chapter 9 Documents 1: Use the product in conditions where freezing will not occur.
Data D-G39/K39 11 11 11 10 9 4 4 4.5 4 4.5 9 D-P5DWL Since this is a guideline including hysteresis, not meant to be guaranteed.