Plate Material: F (Carbon Steel), Bearing Type: L (Ball Bushing), Bore Size: 16mm, Port Thread Type: Rc (Or M5x0.8 for 12,16 Bore), Stroke: 20mm, Piping Port Location: Top/Side Ported, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: L (3m), Number: S (1 pc.)

Dual rod cylinder, compact type, Slide bearing or ball bushing bearing, Bore size *: 6, 10, 15, 20, 25, 32, Standard strokes *: 10, 20, 30, 40, 50, 75, 100, Auto switches available, Made to Order additionally released., 6MM CXSJ CLEAN ROOM, ACTUATOR, CXSJ COMPACT CYLINDER, C5, 6MM CXSJ CLEAN ROOM, 0.24367 lb, ModelStandard stroke (mm) 102030405075100CXSJL60.0480.0580.0680.0780.088

Dual rod cylinder, compact type, Slide bearing or ball bushing bearing, Bore size *: 6, 10, 15, 20, 25, 32, Standard strokes *: 10, 20, 30, 40, 50, 75, 100, Auto switches available, Made to Order additionally released., CYL, COMPACT, BALL BEARING, ACTUATOR, CXSJ COMPACT CYLINDER, C5, 6MM CXSJ CLEAN ROOM, 0.32314 lb

1

COM. 21 22 19 20 19 20 19 20 17 18 17 18 17 18 15 16 15 16 15 16 COM. COM. 13 14 13 14 13 14 11 12 11 12 11 12 9 10 9 10 9 10 9 10 7 8 7 8 7 8 7 8 5 6 5 6 5 6 5 6 3 4 3 4 3 4 3 4 1 2 1 2 1 2 1 2 COM. COM. (P: 26 pins) (PG: 20 pins) (PH: 10 pins) (J,G: 20 pins PC wiring) Mixed wiring of single and double wiring can be specified on the manifold specification.

2

40 33.8 3 50 40 9 18 5 48 AC50B-B 3/4, 1 1/8 186.2 220.1 43 93.1 30 43.3 3.2 70 50 11 20 6 60 AC55B-B 1 1/8 191.2 234.1 43 98.1 30 43.3 3.2 70 50 11 20 6 60 AC60B-B 1 1/8 196.2 234.1 46 98.1 30 43.3 3.2 70 50 11 20 6 60 Optional specifications Semi-standard specifications Metal bowl with level gauge With drain guide Metal bowl with drain guide With barb fitting With auto drain Metal

CATALOG

55 4.5 66 86 58 157.5 63 ~300 32 35 38 20 14 13 72 M10x1.5 7 18 M18x1.5 69 14 90 17.5 22 13 5 5 11 45 55 4.5 82 106 58 157.5 80 ~300 37 40 50 25 20 20 89 M10x1.5 11 22 M22x1.5 80 38 108 20 28.5 14 5 6 11 55 60 4.5 100 125 71 188.5 100 ~300 37 40 60 30 20 20 110 M12x1.75 11 26 M26x1.5 100 12 108 20 30 16 7 6 14 65 60 6 120 150 71 192 *Trunnion mounting threads in flats NA are not available

Table of Contents

) 11 7.5 MY1C (Cam follower guide type) B A (mm) 16 20 Mounting position A 70 90 B 90 110 Operating range l Note) 11 7.5 MY1H (High precision guide type) B A (mm) 10 16 20 Mounting position A 27 35 20 B 133 165 90 Operating range l Note) 6.5 8.5 11 8-11-102 98 Auto Switch Series MY1 Proper Auto Switch Mounting Position (Detection at stroke end) D-Z7, D-Z80 Note) The operating range is a guide

A

55 4.5 66 86 58 157.5 63 ~300 32 35 38 20 14 13 72 M10x1.5 7 18 M18x1.5 69 14 90 17.5 22 13 5 5 11 45 55 4.5 82 106 58 157.5 80 ~300 37 40 50 25 20 20 89 M10x1.5 11 22 M22x1.5 80 38 108 20 28.5 14 5 6 11 55 60 4.5 100 125 71 188.5 100 ~300 37 40 60 30 20 20 110 M12x1.75 11 26 M26x1.5 100 12 108 20 30 16 7 6 14 65 60 6 120 150 71 192 *Trunnion mounting threads in flats NA are not available

Table of Contents

32 27 20 32 2 35 30 18 58 14 72 14 11 7 M18 x 1.5 M10 x 1.5 depth 16 Up to 300 38 27 20 32 2 35 32 18 71 20 89 20 13 10 M22 x 1.5 M10 x 1.5 depth 22 Up to 300 50 32 25 37 3 40 40 22 71 20 110 20 16 10 M26 x 1.5 M12 x 1.75 depth 22 Up to 300 60 41 30 37 3 40 50 26 (mm) Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 NA P S TA TB ZZ 11 11 77 1/8 24 114 Up to 200 11 11 77 1/8 29 119

Hydraulic

37 31 3/8 39 141 11 2 113 20 28 58 20 98 21.5 15 25 to 1800 401 M10 x 1.25 52 52 65 45 12 32 15 11 36 30 3/8 42 141 11 2 113 20 28 69 20 109 12 15 25 to 1800 1/3.5 stroke 501 M10 x 1.25 55 52 76 52 15 40 19 11 43 35 1/2 46 155 13 2.5 121 25 33 85 25 135 15 15 25 to 1800 632 M12 x 1.5 65 55 90 63 15 42 19 14 43 35 1/2 52 163 15 2.5 132 31.5 43 98 31.5 161 15 20 25 to 1800 80 M16 x 1.5 80

5 Port Solenoid Valve Series SY3000/5000/7000/9000

= 26n + 172 11 to 20 stations: W = 26n + 199 2 to 10 stations: W = 54n + 227 11 to 20 stations: W = 52n + 264 SV Manifold base mass w (g) n: Stations (D-sub connector) SY3000 SYJ SY5000 SZ Note 1)For more than 11 stations, supply pressure to P port on both sides and exhaust from R port on both sides.

Table of Contents

-12S 90 12 9 11 9 20 105 Normally open Normally closed MHKL2-16S 16 17 14 14.6 28.6 165 MHKL2-20S 20 32 18 16 34 314 MHKL2-25S 25 53 22 19 41 565 MHKL2-12C 12 11 11 9 20 105 L1 MHKL2-16C 16 22 14 14.6 28.6 166 L2 MHKL2-20C 20 40 18 16 34 314 MHKL2-25C 25 63 22 19 41 565 Note) At the pressure of 0.5 MPa, when gripping point L is 20 mm.

ZP

11 14.5 20.5 13 16 20 32.5 39 49 11 14.5 20.5 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

MY1

) 11 7.5 MY1C (Cam follower guide type) B A (mm) 16 20 Mounting position A 70 90 B 90 110 Operating range l Note) 11 7.5 MY1H (High precision guide type) B A (mm) 10 16 20 Mounting position A 27 35 20 B 133 165 90 Operating range l Note) 6.5 8.5 11 8-11-102 98 Auto Switch Series MY1 Proper Auto Switch Mounting Position (Detection at stroke end) D-Z7, D-Z80 Note) The operating range is a guide

Specification: 11 (Clean Series, Vacuum Suction Type), Bearing Type: L (Ball Bushing Bearing), Bore Size: 6mm, Port Type: M5x0.8: 6-20mm Bore; Rc: 25-32mm Bore, Stroke: 20mm

Specification: 11 (Clean Series, Vacuum Suction Type), Bearing Type: L (Ball Bushing Bearing), Bore Size: 10mm, Port Type: M5x0.8: 6-20mm Bore; Rc: 25-32mm Bore, Stroke: 20mm

Specification: 11 (Clean Series, Vacuum Suction Type), Bearing Type: M (Slide Bearing), Bore Size: 25mm, Port Type: M5x0.8: 6-20mm Bore; Rc: 25-32mm Bore, Stroke: 20mm

Specification: 11 (Clean Series, Vacuum Suction Type), Bearing Type: M (Slide Bearing), Bore Size: 25mm, Port Type: TN (NPT: 25 & 32mm Bore), Stroke: 20mm

Specification: 11 (Clean Series, Vacuum Suction Type), Bearing Type: L (Ball Bushing Bearing), Bore Size: 15mm, Port Type: M5x0.8: 6-20mm Bore; Rc: 25-32mm Bore, Stroke: 20mm

Specification: 11 (Clean Series, Vacuum Suction Type), Bearing Type: M (Slide Bearing), Bore Size: 6mm, Port Type: M5x0.8: 6-20mm Bore; Rc: 25-32mm Bore, Stroke: 20mm