High Vacuum Angle Valve

With Bypass Valve (Flange size: 80) (40) 148.5 3 117 (40) I G H H V A C 117 A U U M E V V A L Lead wire length: 500 mm (L type: 3000 mm) (40) XLA-16-X65 e u t w y Pilot port: Rc1/8 Bypass valve adjustment nut (Initial exhaust) Adjustment pitch: 1 mm/rotation Shaft seal (FKM) r Scraper (FKM) Pilot port: M5 0.2 Lock nut Width across flats 13 96 90 235 (Max. 13) 7.5 8-2 112 114 83 8-1 i !

High Power Cylinder Series RHC

130 106 18 13 23 61 25 75 95 40 37 250 to 1000 65 0.074 0 100 90 145 120 20 13 25 63 30 90 116 40 37 250 to 1000 80 0.074 WH ZZ 6.8 to 11.3 P 310 S 1/2 MM 215 H1 58 NF M18 x 1.5 H 11 NE 24 GA 80 ND 25 FZ 16 K 27.7 JC 7 I 75 Bore size (mm) 50 116 63 310 1/2 215 M18 x 1.5 11 24 80 24.5 16 27.7 124 7 75 72 80 8.5 to 13.5 336 3/4 228 M22 x 1.5 13 32 90 30.5 20 37 155 10 78 89 100 351 3/4 236

Compact Cylinder with Air Cushion

Mounting bolt C D Mounting bolt Mounting bolt D 65 70 75 85 95 120 145 85 95 105 130 155 90 100 110 135 160 105 115 140 165 120 130 155 180 Model C D 50 55 60 65 75 85 55 60 65 70 80 90 60 65 70 80 90 115 140 Model C R(D)QB20-15 -20 -25 -30 -40 -50 R(D)QB25-15 -20 -25 -30 -40 -50 R(D)QB32-20 -25 -30 -40 -50 -75 -100 R(D)QB40-20 -25 -30 -40 -50 -75 -100 R(D)QB50-30 -40 -50 -75 -100 R(D)QB63

IDU/IDF

7650 IDF55C R 2 75 12400 10500 IDF75C 2 1/2B flange 23000 IDF120D 20 120 30 IDF150D 25000 150 40C R407C 3B flange 16 to 18 38000 IDF190D 32000 190 4B flange 50 IDF240D 43000 240 Medium Large 13 to 15 75 IDF75C 10500 12400 R22 R 2 40C Water cooled 20 2 1/2B flange IDF120D 23000 120 25000 IDF150D 30 150 3B flange R407C 40C 16 to 18 32000 IDF190D 38000 190 4B flange 6B flange 43000 IDF240D

Series SV

13 12.5 12.5 12 12 L4 13 Series SV EX500 Decentralized Serial Wiring How to Order SI Unit Refer to page 3 for valve specifications.

REA/REB

For details about auto switches with pre-wire connector, refer to page 10-20-66. 10-2-13 13 Series REAR Specifications Fluid Air Proof pressure 1.05 MPa Maximum operating pressure 0.7 MPa Minimum operating pressure 0.18 MPa Ambient and fluid temperature 10 to 60C Piston speed 50 to 300 mm/s Lubrication Non-lube Stroke length tolerance +1.0 0 +1.4 0 +1.8 0 0 to 250 st: , 251 to 100 st: , 1001

REA/REB

-X 20Stop Data 10-2-11 11 Series REA Dimensions REA25/32/40 Effective thread depth J L 0 0.1 B NN G 4-MM H G 2-port size X D I NB NB T N K W N S + Stroke F NA F R ZZ + Stroke (mm) B D F G H I K L MM x J N NA NB NN Model Port size REA25 REA32 REA40 Rc 1/8 46 27.8 13 8 20.5 34 10 70 M5 x 0.8 x 8 15 30 13 M26 x 1.5 Rc 1/8 60 35 16 9 22 40 15 80 M6 x 1.0 x 8 17 36 15 M26 x 1.5 Rc 1/4 70 43 16

Brake mechanism added

Bore size (mm) Nut Width across flats Socket Width across flats Socket Mounting bracket nut Unit holding tie-rod JIS B 4636 2 point angle socket 10 10 JIS B 1181 Class 3 M8 x 1.25 JIS B 4636 With connector: Within 20.5 mm 13 2 point angle socket 13 JIS B 4636 2 point angle socket 13 13 How to Manually Disengage the Lock and Change from the Unlocked to the Locked State Manual unlocking 1.

SMC Pneumatic Clean Series

, 100,125,150, 25, 50, 75, 100, 125,150,200 Relief type Vacuum suction type 1/8 10-/21-CG1RN32 10-/21-CG1RN40 32 40 25, 50, 75, 100, 125,150,200 250,300 50 63 20 25 32 40 50 63 10-/21-CG1RN50 10-/21-CG1RN63 11-/22-CG1RN20 11-/22-CG1RN25 11-/22-CG1RN32 11-/22-CG1RN40 11-/22-CG1RN50 11-/22-CG1RN63 1/4 Non-lube Double acting Not available 25, 50, 75, 100,125,150, Single rod 25, 50, 75, 100

CQS

CQ2 Mounting Bolt for CDQSK MU Mounting bolt Mounting bolt C' D' 35 40 45 50 55 60 35 40 45 50 55 60 40 45 50 55 60 65 70 75 80 85 45 50 55 60 65 70 75 80 85 90 Model C D 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 Special long bolt for through hole mounting is available as an option. How to Order: Specify the required bolts.

CJ5-S

13 50 8 47 M6 x 1.0 6 14 16 4 M14 x 1.5 44 1/8 11 93 15 50 14 40 Up to 600 35 32 27 32 50 20 21 14 58 11 58 M8 x 1.25 7 18 22 5.5 M18 x 1.5 55 1/4 15 109 21 RB 63 14 Up to 600 40 35 32 27 38 60 20 21 14 58 11 72 M10 x 1.5 7 18 22 7 M18 x 1.5 69 1/4 15 109 21 80 22 60 Up to 750 40 37 32 50 75 25 28 20 71 13 89 M10 x 1.5 10 22 33 7 M22 x 1.5 80 3/8 23 130 32 J 100 22 60 Up to 750 40 37 41

CJ5-S

13 50 8 47 6 14 16 4 M14 x 1.5 44 1/8 11 93 15 M6 x 1.0 50 14 40 Up to 600 35 32 27 32 50 20 21 14 58 11 58 7 18 22 5.5 M18 x 1.5 55 1/4 15 109 21 M8 x 1.25 RB 63 14 Up to 600 40 35 32 27 38 60 20 21 14 58 11 72 M10 x 1.5 7 18 22 7 M18 x 1.5 69 1/4 15 109 21 80 22 60 Up to 750 40 37 32 50 75 25 28 20 71 13 89 M10 x 1.5 10 22 33 7 M22 x 1.5 80 3/8 23 130 32 J 100 22 60 Up to 750 40 37 41

REC

26 8 13 4 60 75 10 41 20 RS Q G FX 25 Up to 700 22 19.5 40 17 32 10 13 4 60 75 10 45 26 32 Up to 1000 22 19.5 40 17 32 12 13 4 60 75 11 45 26 20, 25, 32 RS H A 40 Up to 1000 24 21 52 22 41 14 16 5 66 36 82 12.5 50 32 NA NN P S Z ZZ H1 H2 I K MM N RZQ Bore (mm) Stroke range 20 30 M20 x 1.5 Up to 700 1/8 146 37 200 M8 x 1.25 5 8 33.5 5 20 25 MI W S 34.5 M26 x 1.5 Up to 700 1/8 146 41 204

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

sides n = 2, 3, 4 n = 2, 4, 6, 8 n = 2, 4, 6, 8 n = 2, 4, 6, 8 (n 2) 2 100 + 100 Same side 100 + 100 (n 2) n = 4, 6, 8 n = 2, 3, 4 1 pc. 75 90 80 10 Different sides 35 75 90 80 Same side 55 75 90 80 90 + 30 (n 2) 35 + 30 (n 2) 75 + 30 (n 2) 80 + 30 (n 2) Different sides D-A44 n = 2, 3, 4 n = 2, 4, 6, 8 n = 2, 4, 6, 8 n = 2, 4, 6, 8 55 + 50 (n 2) 75 + 50 (n 2) 80 + 50 (n

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

12.5 14 8 33.6 20 8 16 5 66 46 24 64 24 27 13 86 9.5 7 85 M10 x 1.5 x 15 12.5 14 8 41.6 25 10 20 5 76 57 25 74 25 31 17 104 10.5 10 95 PA PB PW QW S T TT ta tb Q W Z M (N) MM NN P LD Model CY1S15 CDY1S15 CY1S20 CDY1S20 CY1S25 CDY1S25 CY1S32 CDY1S32 CY1S40 CDY1S40 8 7.5 M5 x 0.8 M8 x 1.0 M5 x 0.8 5.6 30 50 75 30 62 12.5 22.5 0.5 1 75 72 97 10 9.5 M6 x 1.0 M10 x 1 Rc 1/8 5.6 40 70 90 38 73

MY1

13 N 20 25 30 37 45 Model MY1H16 MY1H20 MY1H25 MY1H32 MY1H40 P M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 PC 7.5 14.5 14.5 15 20.5 PD 21 27 32 42 37.5 PA 40 50 60 80 100 NC 13.5 17.5 20 25 30.5 PF 3.5 4.5 5.5 6.5 8 PB 40 40 50 60 80 NE 27.8 34 40.5 50 63 Q 153 191 206 264 322 NG 13.5 17.5 28 33 42.5 QW 30 36 42 51 59 NW 37 45 53 64 75 Z 160 200 220 280 340 (PE) 9 12 13 13 23 PG 3.5

VFR

Refer to page 3-13-4.)

RQ

111 76 42 22 53.5 13 7 71 6 40 to 100 X LG Y Y LX X LT 4-LD LS + Stroke A + Stroke CUJ Bore size (mm) Stroke range (mm) 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 LX LY LZ X Y LZ 63 CU 95 91.5 113 16.2 9 80 118 114 140 19.5 11 CQS Rod end male thread 100 137 136 162 23 12.5 CQM Rod end nut L1 CQ2 Rod side flange style: RQF/RDQF Rod Side Flange Style Courtesy of Steven Engineering,

CQS

For Safety Instructions and Actuator Precautions refer to pages 7-13-3 to 7-13-6.

Prevents Micro-Bubbles

VX2 VX How to Order Manifold Base Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3 LLC 2 A 02 11 S VXA Tubing size for P port and R side connection Body class Tubing size for P port and L side connection VN Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19