Table of Contents

to 100 kPa 100 kPa 100 kPa Positive pressure 0 to 1 MPa 0 1 MPa Low pressure 0 to 101 kPa 101 kPa 0 For general purpose fluids Compound pressure 100 to 100 kPa 100 kPa 100 kPa Positive pressure 0 to 500 kPa 0 500 kPa 16-3-24 3 Compact Pressure Sensor For General Air Series PSE540 How to Order ZSE ISE Pressure sensing range PSE 1 3 Vacuum (0 to 101 kPa) Compound pressure (100 to 100 kPa)

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 A AL B1 C D E F GA GB H H1 I J K KA MM NA P S TA TB ZZ 5 6 6 8 11 11 13 16 M4 x 0.7 depth 7 5 M8 x 1.25 24 1/8 1/8 1/8 1/8 1/4 1/4 3/8 1/2 114 119 121 139 162 162 196 196 12 12 12 13 14 14 20 20 35 40 40 50 58 58 71 71 77 77 79 87 102 102 122 122 26 31 38 47 58 72 89 110 11 11 11 12 13 13 12 12 12 13 14 14 20 20 11 11 11 12 13 13

Table of Contents

0 AXT510-13 VQ7060-13-2 VQ7080-13-1 VQ7080-13-3 37 x 1.6 Gasket Gasket A Gasket B Gasket C O-ring Mini Y seal Mini Y seal Pilot valve assembly Double check spacer DIN terminal MYN-8 MYN-16 MYN-14 VQZ110QVV72-FPG UKL-S1 : FHG, FJG, FIG 3-10-26 27 Series VQ7-8 Manifold Specifications How to Order Manifold VV72 6 04D 03R VK Air release valve coil rating Stations 1 1 station VZ None 100 VAC

LEC-OM02704CN

30 100 LECSC-S8 10 30 100 (2) (2) PA02 PA02 0 0 00 100W 200W / 400W 02 LEC-MR-RB-032 03 LEC-MR-RB-12 13 10 13 (3) 13.4 100 5m (a) LECSCP-DP-CG3G4 G3-G4 P-D P-D 1 P P C C G3 D (2) 1) G4 5m (1) 1.

CL

4 Stroke 207 222 250 296 312 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 M30 X 1.5 M30 X 1.5 M36 X 1.5 244 16.5 252 3.2 3.2 3.2 4.5 6.0 8 9 9 70 80 93 27 30 31 37 40 35 35 39 8 0 0 0 0 42 50 59 76 92 84 90 98 27 27 34 44 43 45 45 50 13 13 16 16 17 20 30 25 13 13 16 21 22 20 30 25 266 16.0 274 290 16.0 298 116 116 339 18.0 348 133 126 98 98 358 18.0 40 40 40 367 329.5 338 373 100 157.5

Electric Actuators

T-slot 2 dimensions Compatible Motors Switch Internal Circuit D-Y7GL Motor output (W) Motor model Brake Manufacturer Power supply voltage (VAC) Motor specification symbol Controller driver model + Brown lead wire 100/110 200/220 100 200 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230 LC1-1B1H1Without brake (Horizontal specification) Main circuit

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Refer to page 3-13-4.) 15 or less 15 Refer to the table below.

Compact 5-Port Solenoid Valve

to 100 N Without pressure switch for vacuum/pressure sensor 100 to 100 i Option4 (For details on the Function/Application, refer to page 121.)

1

Bore size (mm) 12 16 20 25 32 40 50 63 80 100 C A B (Reference) R D Bore size (mm) 11 41 11 36 8 8 C76 6 1 13 13 46 13 38 10 10 10 2.5 21 15 54 15 46 12 12 Connecting port side C85 15 3 27 21 64 21 56 14 14 20 3 32 25 78 25 80 25 25 Dimensional Range Not Possible to Machine Additionally C95 25 4 39 25 86 25 90 25 25 32 A B Model MGF40 MGF63 MGF100 5 50 30 110 30 100 30 30 CP95 40 90 120

CM2

19.5 17 32 6 8 15 5.5 30 M26 X 1.5 62 22 10 120 26 13 8 45 25 34.5 37.5 M10 X 1.25 1 to 300 19.5 17 32 6 8 15 5.5 M26 X 1.5 64 22 12 122 26 13 8 45 32 21 M14 X 1.5 21.5 42.5 46.5 1 to 300 22 41 8 10 7 M32 X 2 88 24 14 154 32 16 11 50 40 With rod boot (mm) Symbol Bore h ZZ l Stroke e f 1 to 50 51 to 100 1 to 50 101to150 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 51 to 100 151 to 200

ZP

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

JIS Standard Hydraulic Cylinder

265 0.15 63 63 55 46 M30 x 1.5 45 42 35.5 13 30 80 303 28 M24 x 1.5 35 32 11 24 70 293 0.030 0.076 80 80 65 55 M39 x 1.5 60 57 45 15 41 95 349 35.5 M30 x 1.5 45 42 13 30 80 334 0.030 0.076 0.036 0.090 0.18 0.25 100 100 80 65 M48 x 1.5 75 72 56 16 50 115 385 45 M39 x 1.5 60 57 15 41 100 370 365 CH2E/CH2F/CH2G/CH2H Series Dimensions Rod rectangular flange type: CH2EFA, CH2FFA GA GB R H + Q

ISO Cylinder

10 9 22 20 20 M22 x 1.5 8 G1/8 16 20 8 44 17 8.2 M8 x 1.25 32 11 24 22 11 13 12 24 25 22 M22 x 1.5 8 G1/8 16 22 8 50 20 10.2 M10 x 1.25 32 11 30 22 11 17 12 28 Bore size S (XC) Z ZZ 1 to 50 51 to 100 101 to 150 1 to 50 51 to 100 101 to 150 1 to 50 51 to 100 101 to 150 1 to 50 51 to 100 101 to 150 8 56 (62) 74 (80) 86 (92) 96 (102) 10 56 (60) 74 (78) 86 (90) 96 (100) 12 60

Applicable Auto Switch Model

Refer to the p.5.3-6 for the details of contact protection box. 13 13 13 13 13 13 13 13 13 13 13 13 14 14 14 14 14 14 14 14 14 14 14 16 15 17 17 17 17 14 16 16 13 13 13 13 Note) Average value at normal temperature including hysteresis.

Electric Actuator/Slider Type

[mm] Size Stroke range (mm) C D EH EV F G H J K L M O1 R S 25 15 to 100 13 20 44 45.5 2 4 M8 x 1.25 24 17 14.5 34 M5 x 0.8 8 45 105 to 400 32 20 to 100 13 25 51 56.5 2 4 M8 x 1.25 31 22 18.5 40 M6 x 1.0 10 60 105 to 500 63 Up to 200 21 40 76 82 4 8 M16 x 2 44 36 37.4 60 M8 x 1.25 16 78 205 to 500 505 to 800 Size Stroke range (mm) T U B V Without lock With lock A W Z A W Z 25 15 to 100 46.5

CA2

n = 2, 4, 6, 8 Same side 15 90 100 110 35 75 80 90 100 1 Different sides With 2 Same side 100 100 100 D-A3 D-G39 D-K39 35 + 30(n2) n = 2, 3, 4 75 + 30 (n 2) n = 2, 4, 6, 8 80 + 30(n2) n = 2, 4, 6, 8 90 + 30(n2) n = 2, 4, 6, 8 100 + 100(n 2) n = 2, 3, 4 100 + 100 (n2), n = 2, 4, 6, 8 Different sides With n Same side 10 35 55 75 80 90 75 80 90 75 80 90 1 Different sides With 2 Same side 35

Tie-rod Type Hydraulic Cylinder

100 75 28 32 13 22 20 26 26 29 M22 x 1.5 35 1/2 12 130 75 155 90 100 34 80 M27 x 2 M12 x 1.75 38 6.5 118 118 90 35.5 35 13 27 19 27 26 34 35 1/2 16 145 90 172 100 125 34 80 M14 x 2 M27 x 2 38 6.5 140 140 112 35.5 35 15 27 19 27 30 34 35 1/2 18 170 112 200 100 160 43 100 M16 x 2 M33 x 2 42 9 174 174 140 45 38 17 36 22 28 34 38 40 3/4 20 205 140 240 108 (mm) Bore size (mm) ZZ R S T V W 40

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Applicable shaft types: J, X, Z d1 = d1 = d1 = d1 = L2 = Y = C2 J axis X axis D2 = C2 = C K axis T axis (mm) (mm) (mm) d1 Size 30 50 63 80 100 d1 Size 30 50 63 80 100 Y 3 to 25 1 to 36 1 to 41 1 to 50 1 to 60 L2 max Y 2 Y Y Y Y D2 5 to 7.9 5 to 14.9 5 to 16.9 8 to 19.9 8 to 24.9 Size 30 50 63 80 100 2.5 4 to 7.5 4 to 8 6.8 to 11 6.8 to 13 2.5 4 to 7.5 4 to 8 6.8 to 11 6.8 to 13 11-7

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Applicable shaft types: J, X, Z d1 = d1 = d1 = d1 = L2 = Y = C2 J axis X axis D2 = C2 = C K axis T axis (mm) (mm) (mm) d1 Size 30 50 63 80 100 d1 Size 30 50 63 80 100 L2 max Y 2 Y Y Y Y Y 3 to 25 1 to 36 1 to 41 1 to 50 1 to 60 D2 5 to 7.9 5 to 14.9 5 to 16.9 8 to 19.9 8 to 24.9 Size 30 50 63 80 100 2.5 4 to 7.5 4 to 8 6.8 to 11 6.8 to 13 2.5 4 to 7.5 4 to 8 6.8 to 11 6.8 to 13 11-7

MNB

72 22 17 12 13 38 83 10 Data Up to 800 40 8 101 1/8 9 63 52 27 3 31 104 10 38 65 14 83 30 22 16 13 46 91 14 Up to 1000 50 11 9 120 1/4 75 65 32 2 38.5 120.5 12 46.5 77 15.5 100 35 27 20 14 52 104.5 18 Up to 1000 63 11 9 135 75 1/4 90 32 2 39.5 134.5 12 56.5 92 16.5 115 35 27 20 14 62 119.5 18 Up to 1000 80 13 153 12 1/4 95 102 37 4 45.5 169 16 72 100 19 126 40 32 25 20 63 150 22 Up to 1000