Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

68 10 12 12 8 10 25 to 300 15.5 25 22 44 17 32 12 10 16 7 9 53 27 70 10 12 12 8 10 25 to 400 19.5 32 24 50 22 38 16 14 19 7 9 55 33 72 11 13 13 8 10 25 to 500 21 40 24 60 24 41 18 16 21 9 9 66 36 84 12 17 17 11 16 25 to 500 21 (mm) Bore size (mm) H1 H2 I IA K MM NA NB NN P S T V W ZZ GB3 H -0.020 -0.053 -0.020 -0.053 -0.025 -0.064 -0.025 -0.064 20 5 8 31 23f8 5 M8 x 1.25 17 15 M22 x 1.5

SFOD-OMT0009CN

[] 14096 X (1) ()1 ()1 11 800 1 (2) ()1 ()2 1600 1 (3) ()2 ()1 400 1 ()1 ()1 0 1 4097 4096 1 2 1 [] 1 LEY16C-300 2.5mm 1/1 2 LEY16B-300 5mm 25/50 3 LEY16A-300 10mm 25/100 14096 X 12 1 800 2.5mm 2 3 =1 /2 3 =2.5mm/5mm (2.5mm/10mm) =25/50 (25/100) 1) 50 No.SFOD-OMT0009CN-B 7.3 XX X 1CW X 1 2 2CCW 1 XX 1 2 2 1) XX 1) XX 1) XX 0 XX 02 1a 2b 21 1)

SMC Pneumatic Clean Series

Lubrication Model Rubber Air 10-/21-CM220 10-/21-CM225 10-/21-CM232 10-/21-CM240 11-/22-CM220 11-/22-CM225 11-/22-CM232 11-/22-CM240 Relief type Vacuum suction type 1/8 25, 50, 75, 100, 125, 1/4 Non-lube Double acting, 150, 175, 200, 250, 300 single rod 1/8 1/4 Suction flow rate of vacuum suction type (Reference values) Specifications Bore size (mm) Item 20/25/32/40 1.5MPa 1.0MPa 0.05MPa

5 Port Solenoid Valve, Series VQC

Note) Drawing shows VQC1000 type. 21 Base-Mounted Type Manifold Exploded View Series VQC Manifold Assembly Part No.

HRX-OM-X037

Fig. 9-26 Pump capacity(HRL100/200/300-A/W-40 CH2) HRL Series 9.5 Pump Capacity 9-21 HRX-OM-X037 Chapter 9 Documents 9.5.5 HRL100/200/300-A/W-40-T2 CH1 0.6 60 0.5 50 0.4 Usable flow rate 40 Lifting head [m] Pressure[MPa] 0.3 30 Circulating fluid outlet 0.2 20 Circulating fluid return 0.1 10 0 0 0 5 10 15 20 25 30 35 Circulating fluid flow[L/min] Fig. 9-27 Pump capacity(HRL100/200/300-A/W-

CG5-S

22 19.5 17 18.5 27 10 18 12 40 6 33 M5 x 0.8 5.5 8 14 3.5 M10 x 1.25 29 1/8 9 83 13 32 10 24 to 300 22 19.5 17 20 32 12 18 12 40 6 38 M5 x 0.8 5.5 10 16 3.5 M10 x 1.25 35.5 1/8 11 85 15 40 10 24 to 500 30 27 19 26 40 16 19 13 50 8 47 M6 x 1.0 6 14 16 4 M14 x 1.5 44 1/8 11 93 15 50 14 40 to 600 35 32 27 32 50 20 21 14 58 11 58 M8 x 1.25 7 18 22 5.5 M18 x 1.5 55 1/4 15 21 109 63 14 40 to 600

MXS Series Air Slide Table

0.025 MXS2540 MXS2550 0.04 0.03 MXS2550 MXS2540 0.020 0.03 MXS2530 0.02 0.015 MXS2530 MXS2520 MXS2510 MXS2520 MXS2510 0.02 0.010 0.01 0.01 0.005 0 100 200 300 400 0 100 200 300 400 50 100 150 200 250 300 0 Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf 50 Air Slide Table MXS Series Option Specifications Dimensions of Stroke Adjuster at Extension End (mm) Adjustable

HRX-OM-X084

INP1DELAY SEC screen No.21 "AL25Contact input signal detection 1" OFF detection timer 0 0 to 10 INP1OVER SEC screen No.22 screen Changing of "AL26Contact input signal detection 2" FLT OFF/WRN/FLT INP2ALARM No.23 "AL26Contact input signal detection 2" reading delay timer 0 0 to 300 INP2DELAY SEC screen No.24 "AL26Contact input signal detection 2" OFF detection timer 0 0 to 10 INP2OVER SEC

CJ5-S

16 22 19.5 17 18.5 27 10 18 12 40 6 33 M5 x 0.8 5.5 8 14 3.5 M10 x 1.25 29 1/8 9 83 13 32 10 24 Up to 300 22 19.5 17 20 32 12 18 12 40 6 38 M5 x 0.8 5.5 10 16 3.5 M10 x 1.25 35.5 1/8 11 85 15 CC 40 10 24 Up to 500 30 27 19 26 40 16 19 13 50 8 47 M6 x 1.0 6 14 16 4 M14 x 1.5 44 1/8 11 93 15 50 14 40 Up to 600 35 32 27 32 50 20 21 14 58 11 58 M8 x 1.25 7 18 22 5.5 M18 x 1.5 55 1/4 15 109 21

CJ5-S

16 22 19.5 17 18.5 27 10 18 12 40 6 33 M5 x 0.8 5.5 8 14 3.5 M10 x 1.25 29 1/8 9 83 13 32 10 24 Up to 300 22 19.5 17 20 32 12 18 12 40 6 38 M5 x 0.8 5.5 10 16 3.5 M10 x 1.25 35.5 1/8 11 85 15 CC 40 10 24 Up to 500 30 27 19 26 40 16 19 13 50 8 47 6 14 16 4 M14 x 1.5 44 1/8 11 93 15 M6 x 1.0 50 14 40 Up to 600 35 32 27 32 50 20 21 14 58 11 58 7 18 22 5.5 M18 x 1.5 55 1/4 15 109 21 M8 x 1.25

AC

(Refer to "Best Pneumatics 1" on p.1.17-21 for further information.)

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

A 10 12 16 20 22 28 38 44 10 6 8 8.5 10.5 14 18 21 21 16 25 25 30 30 40 50 55 M5 x 0.8 M6 x 1 M8 x 1.25 6.3 8.1 10.3 12.8 12 16 21 24 7 14 11.5 14 14 20 27 31 21.5 6 16 21 25 30 30 40 50 55 M5 x 0.8 M6 x 1 M8 x 1.25 6.3 7 14.6 21.5 32 34 41 42 56 71 79 10 I-G012 I-Z015A I-G02 I-G03 I-G04 I-G05 I-G08 I-G10 Y-G012 Y-Z015A Y-G02 Y-G03 Y-G04 Y-G05 Y-G08 Y-G10 5 5 8 10 10 14 18 22 +0.048 0 5 6.4

3 Port Solenoid Valve Metal Seal Series VZ200 1

VVZ400-32A-21 pc.

Compressed Air Preparation Filter

300 20 Micro Mist Separator Dust filtration, Oil mist separation Nominal filtration rating: 0.01 m [Filtration efficiency: 99.9%] Oil mist concentration on the outlet side: Max. 0.1 mg/m3 [ 0.08 ppm] 750 30 1500 40 2200 50 Blue 3700 60 Flow capacity increased by 50% Existing model: 200 L/min (AMF150C) AMK Series p. 18 300 20 Flow capacity increased by 50% Existing model: 500 L/min (AMF250C

CLS

For details, refer to page 9-9-21.

Table of Contents

5.7 21 3 8 Connection thread 6.35 6.5 21 7.94 8 22 20 1 2 9.53 9.6 22 21.3 Reference dimensions after NPT thread installation.

LEC-OM02904

PB06 GD2 PB07 PG1 PB08 PG2 PB09 VG2 PB10 VIC 1 2000r/min5s 150r/min 100 10% 2 (2) 2 21 (No.PB06) 2 No.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

VZA4141-21 pc. VZA4221-M013 pcs. VZA4241-23 pcs. VVZ4000-31A-11 pc. VVZ4000-31A-21 pc. Base mounted 2 position single 2 position double Sub-plate Assembly Part No.: VZA4000-S01 02 Thread type Mounting bolt and gasket are not included.

SZ3000

275.5 17.5 310.5 300 286 12.5 323 312.5 296.5 13.5 1-3-21 22 Series SZ3000 Dimensions: SZ3000 Plug-in 1 2 SS5Z3-60PD Stations U(26 pins) With external pilot 2n1-M5 x 0.8 [4 (A), 2 (B) port] 13.3 (Pitch) P = 10.5 13.3 24 24 16.2 16.2 34 17 36.7 34 B 2 B 2 B 2 PE B 2 B 2 B 2 B 2 B 2 B 2 B 2 R 3 R 3 P 1 P 1 A 4 A 4 A 4 X A 4 A 4 A 4 A 4 A 4 A 4 A 4 2One-touch fitting (X, PE ports) Applicable

Integrated Controller

Dimensions [mm] Stroke [mm] L A B n D E F G H Without lock With lock 50 4 15 80 25 100, 150 40 50 200, 250 6 2 200 180 300, 350 8 3 300 280 400, 450 10 4 400 380 500 12 5 500 480 214 275 6 80 21 Easy to Operate Integrated Controller / Slider Type EQFSH Series Battery-less Absolute (Step Motor 24 VDC) Dimensions: In-line Motor Model Selection EQFS H Series EQY H Series Auto Switch Electric