VQ7-6/7-8

Rc1/4 Rc3/8 Bottom Note) When equipped with control unit, 1 or 2 stations are used for mounting. 6 Series VQ7-6 DIN Connector Type VV71-100 80 2n-Rc1/4, 3/8 100 80 9 37 9 23 14 U side 15 R4.5 Manual override Indicator light R4.5 53.5 P=43 9 9 53.5 P=43 20 9 23 38 B B B B B B B B B SMC SMC SMC A PA PA PA PA A A A A B A L1 L2 L2 L1 B A B SMC A B A 4n-Rc1/4, 3/8 (ports A, B) PA L side R side

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

with AMC610-10 installed Approx. 100 with AMC610-10 installed 100 with AMC610-10 installed 100 with AMC610-10 installed 118 (135) 159 (172.5) 159 (172.5) (approx. 105 with AMC810-14 installed) (105 with AMC810-14 installed) 118 (135) (approx. 105 with AMC810-14 installed) (105 with AMC810-14 installed) 158.7 158.7 6-Rc3/4 Ports P (SUP), R (EXH) 6-Rc3/4 Ports P (SUP), R (EXH) 2-G1 (electrical

JXCx-OMT0001CN

LERH30K-3L LERH30K-3 0 (a) ) LEY16RA-75 LEY16RALEY16RA-100 (b) LEFSH() LEFS ) LEFSH25RH-300 LEFS25RH-300LEFS25RH-300 (C) (11-)(25A-) 11-25A-11-25A) 11-LEFSH16A-100BR LEFS16A-100LEFS16A-100 -15No.JXC-OMT0001CN-C Execute()Execute Check box Execute Apply Apply 3.6 (2) -16No.JXC-OMT0001CN-C (2) 9. 512 2048 / 0 1 0 1 1 4 1 4 11 12 1 2 1 [] 11 1 4096 1 LEY16C-300 2.5mm 1/1 2

SFOD-OMT0009CN

LERH30K-3LLERH30K-3 0 (a) ) LEY16RA-75LEY16RALEY16RA-100 (b) LEFSH LEFS ) LEFSH25RH-300LEFS25RH-300LEFS25RH-300 (c) 11-)(25A-) 11-25A-11-25A) 11-LEFSH16A-100BRLEFS16A-100LEFS16A-100 15 No.SFOD-OMT0009CN-B Execute (Apply) 3.6 (2) 16 No.SFOD-OMT0009CN-B (2) 7. 512 2048 / 0 1 0 1 1 4 1 4 11 () 12 () 1 2 1 11 [] 14096 1 LEY16C-300 2.5mm 1/1 2 LEY16B-300 5mm 25/50 3 LEY16A

VQ7-6/7-8

Bore size Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm 40 50 63 80 100 125 140 160 180 200 Average speed Series (mm/s) 1000 Perpendicular, upward actuation 900 800 700 600 500 400 300 200 100 Horizontal actuation VQ7-6-FG-S-A02 0 1000 900 800 700 600 500 400 300 200 100 0 Courtesy of Steven Engineering, Inc.-230

3

F C37 1/2 15 G Stainless steel B 100 VAC Grommet With surge voltage suppressor C 110 VAC 5 20A N.C. H C37 3/4 20 J Stainless steel D 200 VAC E 230 VAC 6 25A N.C.

VQ4000

Cylinder Speed Chart Enclosure Enclosure Bore size IP65 compatible IP65 compatible Series CS1 Pressure 0.5 MPa Load rate: 50% Stroke 1000 mm Series MB/CA1 Pressure 0.5 MPa Load rate: 50% Stroke 500 mm Series Average speed (mm/s) 40 50 60 80 100 125 140 160 180 200 1100 1000 900 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Individual wiring type Horizontal actuation VQ4100

Cylinder (Tube) Inner Diameter(φ): 20, Stroke(mm): 200, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Guided, Additional Function: High rigidity / high precision high class guide / Cylinder with functions of thrusting and boosting, Environment, Applications: Standard, End Locking: -, Cushion: Rubber cushion, Operating Pressure

Cylinder (Tube) Inner Diameter(φ): 20, Stroke(mm): 200, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Guided, Additional Function: High rigidity / high precision high class guide / Cylinder with functions of thrusting and boosting, Environment, Applications: Standard, End Locking: -, Cushion: Rubber cushion, Operating Pressure

SFOD-OMT0011CN

Result area (LER ) ) LEY16RA-100BMLLEY16RA-100 LERH30K-3LLERH30K-3 0 ) LEY16RA-75LEY16RALEY16RA-100 LEFSH LEFS ) LEFSH25RH-300LEFS25RH-300LEFS25RH-300 11-)(25A-) 11-25A-11-25A) 11-LEFSH16A-100BRLEFS16A-100LEFS16A-100 29 No.SFOD-OMT0011CN-A c) Execute Execute b) c) (Apply) d), d) download e) 30 No.SFOD-OMT0011CN-A (2) a View(V) 4.1 (1-1-2) View (V) b c) download e) 31 No.SFOD-OMT0011CN-A

An analog voltage or current output is available.  25A-PFM5 is IP40 rated, CE and RoHS compliant.  Compatible with the 25A-PFM3 monitor. Flow ranges (lpm): 0.2-10, 0.5-25, 1-50, 2-100; Port sizes: 1/8 or 1/4 (Rc, NPT, G); ø6 or ø8 one-touch fittings; Rated pressure range (MPa): -0.07 to 0.75; Output options: 1-5V or 4-20mA; Accuracy: ±3% F. S.; Repeatability: ±1% F. S.

An analog voltage or current output is available.  25A-PFM5 is IP40 rated, CE and RoHS compliant.  Compatible with the 25A-PFM3 monitor. Flow ranges (lpm): 0.2-10, 0.5-25, 1-50, 2-100; Port sizes: 1/8 or 1/4 (Rc, NPT, G); ø6 or ø8 one-touch fittings; Rated pressure range (MPa): -0.07 to 0.75; Output options: 1-5V or 4-20mA; Accuracy: ±3% F. S.; Repeatability: ±1% F. S.

10

) : Not available Single rod Double rod Cushion Page Air Rubber Air Rubber 392 402 Symbol Specifications Applicable bore size 32 to 100 125 32 to 100 125 32 to 100 125 32 to 100 125 Standard Standard V V V V V V V V Long st Long stroke V V V V V V V V 32 to 125 D Built-in magnet V V V V V V V V MBl-lJ K With rod boot V V V V V V V V 25A Copper (Cu) and Zinc (Zn)-free Note 1) 32 to 100 V

LEY-OM007

[ ] [%] [ ] 40 100 50 70 12 70 20 1.3 85 15 0.8 100 25 40 [%] [%] [ ] [%] [ ] 95 100 100 25 [%] [%] 40 [ ] [ ] 65 100 100 [%] LEY 32* 25 40 [%] [%] [ ] [%] [ ] 65 100 85 50 15 100 -43- 7.3 LEY / [Nm] L[mm] [mm] LEY 16 M50.8 3.0 10 14 LEY 25 M81.25 12.5 13 17 LEY 32 M81.25 12.5 13 22 / [Nm] L[mm] [mm] LEY 16 M81.25 12.5 12 14 LEY 25 M141.5 65.0 20.5

240

or less 100 70 30 3 100 15 1 LEC 11.

Electromagnetic Digital Flow Switch

aqueous solution Karman vortex IP65 3-color display 0.1 L/min 5 40 10 100 1 L/min 50 250 2 L/min PVC piping type 1 L/min 10 100 Water, Ethylene glycol aqueous solution IP65 3-color display Karman vortex 2 L/min 30 250 PF2D 0.05 L/min 0.4 4 Deionized water (pure water), Liquids which do not corrode nor erode fluoropolymer IP65 1-color display Karman vortex 0.1 L/min 1.8 20 4 40 0.5 L/min

Air cylinder (Series compatible with secondary batteries)

(Page 9) 6 Bushing (bearing) 1000 fR[N] 100 Lateral load applied to rod end 100 80 63 10 50 40 1 0 500 1000 1500 Cylinder stroke [mm] Fig. 1 Allowable lateral load applied to rod end C a u t i o n Be certain to align the rod axis with the load and direction of movement when connecting.

Precision Regulator

Supply pressure: 0.3 to 1.0 MPa Set pressure: 0.2 MPa Flow rate: 0 L/min (ANR) Supply pressure: 0.5 MPa IR1000-01 IR1000-01 IR1000-01 Back pressure: 0.5 MPa 0.5 0.204 0.2 Set pressure P2 (MPa) Set pressure (MPa) Set pressure (MPa) Set pressure (MPa) 0.4 0.202 0.15 Set point 0.3 0.200 0.1 0.2 0.198 0.05 0.1 0.196 0 40 20 80 60 100 140 120 0 50 100 200 250 150 0 0.2 0.1 0.4 0.3 0.6 0.5 0.8

Steam Valve

N.C. 6A 8A 10A 10A 15A 20A 25A 32A 32F 40A 40F 50A 50F 1 8 1 4 3 8 3 8 1 2 3 4 7 1 15 2 20 3 25 4 1 1 1 4 32 5 11 4 B Flange 11 2 40 6 11 2 B Flange 2 50 7 2B Flange 634 Steam Valve: 2 Port Valve For SteamVND Series Model Port size Flow rate characteristics Weight (kg) Orifice dia.

PVC Quick Drain Valve

L1 L2 L3 L4 D1 D2 D3 22 LVW60-25A 32 60 70 81.5 14.5 172 LVW80-32A 72 90 94 20.5 205 38 26 LVW80-40A 83 90 20.5 220 48 31 101 LVW90-50A 120 26 275 60 100 39 136.5 LVW90-65A 120 279 75 135 44 138.5 26 LVW90-80A 304 89 158 140 51 143.5 33 OUT 853 LVW Series Applicable Fluids PVC Quick Drain Valve Material and Fluid Compatibility Check List Compatibility Chemical Material option N Note 2) Ammonium