Collector / Pulse, Analog Output Specification: -, Pipe Port Type: [One-Touch Couplings] One-Touch Couplings, Plumbing Thread Type: -, Plumbing Thread Nominal: -, Number of Outputs: 2, Analog Voltage Output(V): -, Power Supply Type: DC, Power Supply Voltage(V): [24] 24±10%, Protection Structure: IP40, Unit Specifications: SI unit fixed, Bracket: None, Lead Wire: With lead wire with connector (2 m)

VZ100/300/500

VP Applicable solenoid valve VZ514VZ514MVZ524VZ524MApplicable blanking plate assembly DXT201-15-4A How to Order Type 41 (Side ported) VG VV3Z5 41 05 1 C6 R port VP P/R port thread type A port side Stations 01 C6 C8 B7 B9 1/8 2 stations 02 S070 Nil P port Rc G NPT NPTF One-touch fitting for 6 Tube F N T One-touch fitting for 8 20 stations 20 A port One-touch fitting for 1/4 VQ One-touch

Rubber seal 5 Port Solenoid Valve Series SYJ5000

O.D.: 4, 5/32" : 6, 1/4" (2.3) L plug connector (L): SYJ5120-L-M5(-F) M plug connector (M): SYJ5120-M-M5(-F) DIN terminal (D): SYJ5120-D-M5(-F) M8 connector (W0): SYJ5120-W0-M5(-F) Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 82.1 Max. 10 60.9 28.1 [35.1] 53.4 12.7 42.1 32.6 M8 x 1 15.1 39.2 [46.2] Approx. 300 (Lead wire length) Pg7 73 [75.2] (2.3) 63.2 [65.4] 83 72.1 3

Rubber seal 5 Port Solenoid Valve Series SYJ7000

85.6 [87.8] (Light/surge voltage suppressor) 2-3.2 (For mounting) 35 (Bracket) 3.6 + 28 25 16.1 21 31.5 [38.5] Built-in one-touch fitting: SYJ7120(-F) G H C6, N7 C8, N9 P R2 R1 28.3 1.6 18 27.2 1.6 (PE port) 1/8 (P, R1, R2 port) B A 17 One-touch fitting (A, B port) (4.9) 36 Applicable tubing O.D.: 6, 1/4" : 8, 5/16" (3.6) L plug connector (L): SYJ7120-L-01 (-F) M plug connector (M): SYJ7120

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

A A n-One-touch fitting (A port) (Pitch) P=19 21 C6: Applicable tube T0604 C8: Applicable tube T0806 Rc (PT) 1/8 L plug connector (L) M plug connector (M) (Non-locking) Manual override (P/R port) 4-Rc (PT)1/4 69.5 [76] 69.5 [76] 57.1 50.5 35 8.5 63.5 63.5 63.5 4-Rc (PT)1/4 (P/R port) 14 1 21.5 21.5 A A 14 1 9.5 C6: MAX. 6 C8: MAX. 6.5 9.5 (Pitch) n-Rc (PT)1/8 (A port) P=19 21 22.5 22.5 43

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

How to Order Manifold Assemblies (Example) Example (OMRON Corporation compatible serial unit) Double solenoid (24VDC) SZ3260-5LOZ-C6 (3 sets) Single solenoid (24VDC) SZ3160-5LOZ-C6 (2 sets) Supply/Exhaust block assembly SS5Z3-60SRID-05U-C6 . 1 set (manifold part number) SZ3160-5LOZ-C6. 2 sets (single solenoid part number) SZ3260-5LOZ-C6. 3 sets (double solenoid part number) (U side mounting

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

-m-L3m-mmm : 0 x 00016F (367) PF2M701-m-L4m-mmm : 0 x 000170 (368) PF2M725-m-Lm-mmm : 0 x 00017D (381) PF2M725-m-L2m-mmm : 0 x 00017E (382) PF2M725-m-L3m-mmm : 0 x 00017F (383) PF2M725-m-L4m-mmm : 0 x 000180 (384) PF2M702-m-Lm-mmm : 0 x 000171 (369) PF2M702-m-L2m-mmm : 0 x 000172 (370) PF2M702-m-L3m-mmm : 0 x 000173 (371) PF2M702-m-L4m-mmm : 0 x 000174 (372) PF2M750-m-Lm-mmm : 0 x 000181

SZ3000

When entry of part numbers becomes complicated, indicate on the manifold specification sheet. 1-3-25 26 Series SZ3000 How to Order SZ3 5 1 C6 M 60 Type of actuation A, B port size 2 position single solenoid C4: One-touch fitting for 4 C6: One-touch fitting for 6 (A) 4 (B) 2 1 Pilot type 5 (EA) 1 (P) 3 (EB) A 4 Nil R Internal pilot Manual override 2 position double solenoid External pilot

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

(25P) kit, with 3.0 m cable D-sub connector (25P) kit, with 5.0 m cable Flat ribbon cable (26P) kit, without cable Flat ribbon cable (26P) kit, with 1.5 m cable Flat ribbon cable (26P) kit, with 3.0 m cable Flat ribbon cable (26P) kit, with 5.0 m cable Flat ribbon cable (20P) kit, without cable F kit U side D side 16 stations 1 to 12 stations 24 D side D-sub connector kit P kit Note 1)

Flow Rate Range: 11 [2 to 100 (50 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: C8 [ø8 (5/16") One-touch Fitting], Piping Entry Direction: Bottom Side, Output Specification: 2 NPN Outputs, Unit Specification: Unit Switching Function, Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Panel

Flow Rate Range: 11 [2 to 100 (50 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: ø1/4 One-touch Fitting, Piping Entry Direction: Bottom Side, Output Specification: C [1 NPN Outputs + Analog (1 to 5 V)], Unit Specification: Unit Switching Function, Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover],

Flow Rate Range: 11 [2 to 100 (50 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: G1/4, Piping Entry Direction: Straight, Output Specification: 2 PNP Outputs, Unit Specification: Unit Switching Function, Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Panel Mount Adapter for w/o Flow Adjustment

Flow Rate Range: 11 [2 to 100 (50 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: NPT1/4, Piping Entry Direction: Straight, Output Specification: 2 PNP Outputs, Unit Specification: Unit Switching Function, Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Panel Mount Adapter for w/o Flow Adjustment

Flow Rate Range: 11 [2 to 100 (50 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: ø1/4 One-touch Fitting, Piping Entry Direction: Bottom Side, Output Specification: 2 NPN Outputs, Unit Specification: Unit Switching Function, Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Panel Mount Adapter

Flow Rate Range: 11 [2 to 100 (50 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: NPT1/4, Piping Entry Direction: Bottom Side, Output Specification: 2 NPN Outputs, Unit Specification: Unit Switching Function, Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Panel Mount Adapter for w/o Flow

Flow Rate Range: 11 [2 to 100 (50 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: ø1/4 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: 2 PNP Outputs, Unit Specification: Unit Switching Function, Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Panel Mount Adapter

Flow Rate Range: 11 [2 to 100 (50 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: NPT1/4, Piping Entry Direction: Straight, Output Specification: D [1 NPN Outputs + Analog (4 to 20 mA)], Unit Specification: Unit Switching Function, Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Panel Mount

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

plug connector (M) 1 (P) 3 (R2) VQZ1000 M plug connector (M) 0.2 0.35 (A) 4 1 (P) 5 (R) DIN connector (Y) DIN connector (YZ) VQZ2000 N.C.

Secondary Batteries

ZS-24-E Qty. 1 Nil M With unit switching function Fixed SI unit Note) Panel mount + Front protection cover ZS-24-F 1 Note) Fixed units: For compound pressure : KPa For positive pressure : MPa 59 2-Color Display Digital Flow Switch 90-PFM7 Series Integrated display How to Order Integrated display 90 PFM7 10 C6 B M Option Nil None Bracket (For without flow adjustment valve) Series compatible

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

8.5 13 12.7 2-2.6 (For manifold mounting) 28.1 [35.1] (Light/surge voltage suppressor) 2-2.6 (For mounting) + 14.5 3 23 20 2.3 55.6 [57.8] 12.7 28.1 [35.1] 8 9 M5 x 0.8 (P, R port) 23 7 (Bracket) R P 11 11.5 1.4 (PE port) L plug connector (L): SYJ52-L-M5 (-F) M plug connector (M): SYJ52-M-M5 (-F) DIN terminal (D): SYJ52-D-M5 (-F) M8 connector (M0): SYJ52-W0-M5 (-F) Applicable cable O.D.