3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

75 85.5 5 4 64 87.5 98 6 7 8 11 9 10 12 29 18 VFS L1 L2 L3 75 86 97 108 141 119 130 152 100 112.5 125 125 162.5 137.5 150 175 110.5 123 135.5 135.5 173 148 160.5 185.5 VS n L L1 L2 L3 13 14 16 17 18 21 22 24 15 19 20 23 163 174 196 207 218 251 262 284 185 229 240 273 VS7 187.5 187.5 212.5 225 237.5 262.5 275 300 200 250 250 287.5 198 198 223 235.5 248 273 285.5 310.5 210.5 260.5 260.5 298

ZP

Body A 1 Brass Electroless nickel plated Body B 2 Brass Electroless nickel plated Valve 3 Aluminum O-ring 4 HNBR Spring 5 Stainless steel Pad side Element 6 BC ZP2V-AZP2V-BGasket 7 NBR + Stainless steel 63 Series ZP2V Vacuum Saving Valve Dimensions Vacuum generator side Vacuum generator side M2 M2 H1 H1 Vacuum generator side L2 L1 L3 L2 M2 H1 L2 L33 (L4) (L4) No.0.8 No.0.8 L1 L3 L2 L3

Electric Slide Tables

[mm] L3 [mm] L3 [mm] 150 300 L3 100 200 50 100 0 0 Yawing Pitching Yawing Rolling 0 0.2 0.4 0.6 0.8 1 0 1 2 3 4 5 0 0.5 1 1.5 2 2.5 3 Work load m [kg] Work load m [kg] Work load m [kg] 300 600 0 50 100 150 200 250 300 350 250 500 L4 200 400 L4 [mm] L4 [mm] L4 [mm] 150 300 100 200 Mey 50 100 m 0 0 0 0.2 0.4 0.6 0.8 1 0 1 2 3 4 5 0 0.5 1 1.5 2 2.5 3 Work load m [kg] Work load m [kg] Work load

Metal Seal/Rubber Seal Series VQ Body Ported

31 50 60.5 75 100 110.5 53 75 85.5 86 112.5 123 64 87.5 98 97 125 135.5 108 125 135.5 119 137.5 148 130 150 160.5 141 162.5 173 152 175 185.5 n L 13 14 15 16 17 18 19 20 21 22 23 24 174 187.5 198 L1 L2 L3 163 187.5 198 185 200 210.5 196 212.5 223 207 225 235.5 218 237.5 248 229 250 260.5 240 250 260.5 251 262.5 273 262 275 285.5 273 287.5 298 284 300 310.5 How to Order Double check block

ZP

Body A 1 Brass Electroless nickel plated Body B 2 Brass Electroless nickel plated Valve 3 Aluminum O-ring 4 HNBR Spring 5 Stainless steel Pad side Element 6 BC ZP2V-AZP2V-BGasket 7 NBR + Stainless steel 63 Series ZP2V Vacuum Saving Valve Dimensions Vacuum generator side Vacuum generator side M2 M2 H1 H1 Vacuum generator side L2 L1 L3 L2 M2 H1 L2 L33 (L4) (L4) No.0.8 No.0.8 L1 L3 L2 L3

VZ100/300/500

M5 L3 47 63 79 95 111 127 143 159 175 191 207 223 239 255 271 287 303 319 335 L1 L2 Rc 1/8 63 54 80 71 97 88 114 105 131 122 148 139 165 156 182 173 199 190 216 207 233 224 250 241 267 258 284 275 301 292 318 309 335 326 352 343 369 360 L3 48 65 82 99 116 133 150 167 184 201 218 235 252 269 286 303 320 337 354 L plug connector (L) DIN terminal (D) M plug connector (M) 300 (Lead wire length

Rotary Actuator/Vane Type

L1 = E2 = E4 = L3 = X = [mm] Size CRB2, CRBU2 Y L1 max L4 D2 10 4 to 8 Y-2.5 L2 + 1.5 3 15 4.5 to 9 Y-3 L2 + 1.5 3 to 4 20 5 to 10 Y-3.5 L2 + 2 3 to 5 30 7 to 13 Y-5 L2 + 3 3 to 6 [mm] Size CRB2 CRBU2 X L1 max L3 D1 X L1 max L3 D1 10 6 to 14 X-4.5 L1 + 1.5 3 4 to 14 X-2.5 L1 + 1.5 3 15 7 to 18 X-5.5 L1 + 1.5 3 to 4 4.5 to 18 X-3 L1 + 1.5 3 to 4 20 8 to 20 X-6.5 L1 + 2 3 to 5 5 to 20 X-3.5

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

L3 L1 L2 L3 Port size M5 Rc (PT)1/8 One-touch fitting 2.2-32 3 Port Pilot Solenoid Valve Rubber Seal Series SYJ700 Model Weight (g) (1) SY Valve model Actuation Port size Effective area (mm2)(Cv) Grommet L plug connector, M plug connector.

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

1) (Station n) (Station 1) (Station n) (Light/surge voltage suppressor) (Light/surge voltage suppressor) + + + + + + + + 54.1 [61.1] 54.1 [61.1] 38.7 38.7 25.5 25.5 A A A A (Pitch) P=16 19.5 (Pitch) P=17 M5 x 0.8 (A port) 8.5 1/8 (A port) 8.5 19.5 Station n L1 L2 L3 L1 L2 L3 Station 2 62 53 47 63 54 48 Station 20 350 341 335 369 360 354 3 78 69 63 80 71 65 4 94 85 79 97 88 82 5 110 101 95

3 Port Solenoid Valve

U side D side 8 For F2 (9.4) 50.3 9.9 (8.9) 6.7 (1.2) 3.3 1 3 (6.3) 56.9 6.7 3.2 AB AB AB AB AB 4.4 L2 4 4 x M3 for mounting (Bracket) 30.6 L3 Approx. 300 (Lead wire length) (Station 1) (Station n) 1 3 Solenoid No. Light/surge voltage suppressor SOL.a: Orange SOL.b: Green 2 4 Solenoid No. Note) For manifold dimensions including elbow fitting, see page 11.

LEC-OM02904

AC200230V AC100120V 40 M5 3.24[Nm] M5 3.24[Nm] 6 AC100120V AC200230V AC100120V AC200230V L1 L1 PE PE L2 2-M5 2-M5 L2 L3 CNP1 CNP1 N N P1 P1 M4 1.2[Nm] P2 P2 M4 1.2[Nm] P P C C CNP2 D CNP2 D L11 L11 L21 L21 U U CNP3 V CNP3 V W W 9 2 9 (2) LECSS-S8 [mm] 5 40 6 6 6 (80) (170) 6 6 () CN4 CN2L CN2 CN1B CN1A CN3 CN5 CNP1 L1 L2 L3 N P1 P2 P C D L11 L21 U V W L1 L2 () L3 N P1 CNP2 P2

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

V or less L3: Analog output: 1 to 5 V or 0 to 10 V can be selected.

F

Applicable Applicable Model D1 L1 L2 P Q A M Minimum Tube OD Fitting Size Hole Applicable Applicable Model D1 L1 L2 P Q A M Effective Tube OD mm Fitting Size Orifice (mm2) Inch d Diameter d Nylon/Urethane 1/8 3.2(1/8) KQU01-99 9.6 52 17.5 9.6 9 36.5 15.5 2 3.2 3.2 KQU23-99 9.6 52 17.5 9.6 9 36.5 15.5 3.4/2.9 5/32 4(5/32) KQU03-99 10.4 53 18 10.4 9.7 37 16 2.5 4 4 KQU04-99 10.4 53 18 10.4

Table of Contents

Bracket B Bracket assembly 16-2-53 10 Series ISE70/75/75H Specific Product Precautions 2 Be sure to read before handling. Set pressure range and rated pressure range Caution 1. Set the pressure within the rated pressure range. The set pressure range is the range of pressure that is possible in setting.

Integrated Controller

[mm] L3 [mm] L3 [mm] L3 [mm] m 600 600 600 600 L3 Z 400 400 400 400 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 L4 [mm] L4 [mm] L4 [mm] L4 [mm] L4 600 600 600 600 X 400 400 400 400 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10

SV

= 10.5 x n1 + 53 L4 = L3 + 81 + 21 x n2 L5 = (L1L4)/2 L6 = 10.5 x n1 + 42 L7 = 21 x n2 + 81 B A B A B A B A Dimensions are the ones for SV1300--.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

Rubber 12.6 (0.7) VQZ235 20 or less 15 or less 53 VQZ200 Metal 10.0 (0.55) VQZ225 18 or less 14 or less N.O. Rubber 12.6 (0.7) VQZ245 20 or less 15 or less Metal 16.2 (0.9) VQZ315 22 or less 17 or less N.C. Rubber 21.6 (1.2) VQZ335 33 or less 25 or less 77 VQZ300 Metal 15.3 (0.85) VQZ325 22 or less 17 or less N.O.

Electric Actuator/Slider Type

L3 [mm] L3 [mm] L3 [mm] L3 [mm] 1,000 1,000 1,000 Mer m 500 500 500 500 0 60 50 40 30 20 10 0 0 2 4 6 8 10 Work load [kg] 0 0 Work load [kg] 0 0 Work load [kg] 0 Work load [kg] 5 10 15 20 10 20 30 40 1,500 2,000 2,000 2,000 1,500 1,500 1,500 1,000 L4 [mm] L4 [mm] L4 [mm] L4 [mm] 1,000 1,000 1,000 500 500 500 500 Mep m 0 0 0 1 2 3 4 5 Work load [kg] 0 0 5 10 15 Work load [kg] 0 0 20 0 25

Miniature Fittings M3, R(PT) 1/8, M5 Series M

L4 L1 L2 L3 M d O.D.

KF

area (mm2) Weight (g) L4 A Model L1 L2 L3 M d thread R I.D.