ZX

Filter unit (F) ZX100-K8-F 1 41 51 2-R1.8 (Mounting hole) 3.6 (Mounting hole) 8.8 4.8 1 10 19 Filter unit (Mounting hole) 13-2-53 53 Series ZX Vacuum Pump System/Manifold Specifications Function Max. number of units 8 units Vacuum supply from PV port of the manifold is common supply. Air supply from PS port is common supply.

Stainless Steel One-touch Fittings Series KG

M5 Weight (g) Nylon Urethane D1 D2 L1 L2 M L3 Part No.

Series KG Stainless Steel One-touch Fittings

M5 Weight (g) Nylon Urethane D2 L1 D1 L2 M L3 Part No.

MXS Series Air Slide Table

When sum of load rate does not exceed 1, it is possible to use. n=1+2+3 1 < = < = 47 MXS Series Air Slide Table How To Select Allowable load: W(N) Fig.1 Overhung: Ln(mm), Correction value for moment center distance An (mm) Fig.2 Pitch moment Yaw moment Roll moment W My Mp Mr W W W Static moment Kinetic moment L1 A1 L3 A5 L2 A3 W Mp Mr My W W L3 A6 W L1 A2 L2 A4 W Mey Mep L2 A4 A2 L3 Work

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

35.5 59.6 [66.6] Approx. 300 (Lead wire length) 62.8 [65] 53 [55.2] 61.9 54.5 Refer to page 646 for dimensions with connector cable.

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

281.5 204.5 320 397 L3 101 139.5 178 255 370.5 293.5 216.5 332 409 L1 83 124.5 166 249 373.5 290.5 207.5 332 415 VV2CL4 L2 95 136.5 178 261 385.5 302.5 219.5 344 427 L3 107 148.5 190 273 397.5 314.5 231.5 356 439 Manifold composition 2 stns. x 1 3 stns. x 1 2 stns. x 2 3 stns. x 2 3 stns. x 3 2 stns. x 2 + 3 stns. 2 stns. + 3 stns. 2 stns. + 3 stns. x 2 2 stns. x 2 + 3 stns. x 2 Note) Manifold

AC Servo Motor Driver (SSCNET /H Type)

Save the displayed waveform screen (print screen). -53- 6.10 Display All Monitor List The method how to obtain the electric actuator condition is described with the display all function of the setup software. Click Monitor Display All of the setup software to display Display All window. The condition of each item is displayed.

Vacuum

L3 2.83 (72\ 3.46 (88) 4.09 (104) 4.72 (120\ 5.35 (136) 5.98 (152) 6.61 (168) 7.24 (18/.\ 7.87 (2001 Millimtef in parentheses 53 C Single-Stage Nozzle (o1.5) . Produces high suction flow with quick response time. . Interchangeable with all other nozzleldiffuser ass'ys.

ZMA

53 53 53 60 40 60 40 40 40 40 27 27 27 40 27 Suction flow rate Suction flow rate Suction flow rate Suction flow rate 20 13 13 13 13 20 0 60 40 20 0.6 0.3 0.5 0.4 0.2 0 0.1 0 60 40 20 0 0.6 0.5 0.4 0.3 0.2 0.1 Supply pressure (MPa) Flow rate (l/min (ANR)) Supply pressure (MPa) Flow rate (l/min (ANR)) 13-4-26 7 Series ZM Vacuum Ejector: With Solid State Timer Exhaust Characteristics/Flow Characteristics

Vacuum

.\ L3 2.83 (72\ 3.46 (88) 4.09 (104) 4.72 (120\ 5.35 (136) 5.98 (152) 6.61 (168) 7.24 (18/.\ 7.87 (2001 Millimtef in parentheses, 53 C Single-Stage Nozzle (o1.5) . Produces high suction flow with quick response time. . Interchangeable with all other nozzleldiffuser ass'ys.

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

AS-FM AS-D AS-T ASP ASN AQ Dimensions ASV Universal type AK Applicable tubing O.D. d VCHC Applicable tubing O.D. d Weight (g) T H1 H2 D1 D2 D3 L1 L2 L3 L4 L5 (1) A (2) M1 Max. Min. Max. Min.

C85

j g b e C d6 l Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com h (mm) (mm) f g c j a Bore Model Thread d3 M4 x 0.7 M4 x 0.7 M6 x 1 M6 x 1 M8 x 1.25 M10 x 1.25 dh7 h 27 27 30 30 36 43 d6 18 18 20 20 24 28 b3 b1 l 10 10 12 12 16 20 d7 11 11 13 13 16 19 l3 10 10 10

CQS

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Additional Weight (g) Bore size (mm) 12 25 16 20 1.5 12 3 6 Male thread Nut Rod end male thread 1 8 2 4 Rubber bumper (No need to add for long stroke) 0 3 1 2 55(53) 181(172) 65(61) 159(153) Foot style (Including mounting bolt) 58(56) 180(171) 70(66)

17

MY1B m2 m3 Moment (Nm) MY1M M1 = F1 x L1 F1 M2 = F2 x L2 M3 = F3 x L3 F3 F2 MY1C L2 L1 L3 MY1H 4. Accuracy Mechanically jointed rodless cylinders do not guarantee traveling parallelism. When accuracy in traveling parallelism and intermediate stroke position is required, please contact SMC sales representatives.

0.4

75 64 53 97 130 152 31 42 86 108 119 141 100 87.5 75 125 150 175 50 62.5 125 112.5 137.5 162.5 98 85.5 60.5 73 110.5 123 135.5 135.5 148 160.5 173 185.5 13 14 15 16 17 18 19 20 21 22 23 24 n L L1 L2 L3 185 207 229 262 284 163 174 196 218 240 251 273 200 225 250 275 300 250 187.5 187.5 212.5 237.5 262.5 287.5 198 198 210.5 223 235.5 248 260.5 260.5 273 285.5 298 310.5 How to Order Double

LX

= 1000 to 3000 m Mey a 5 9 0 L3 Transfer load m (kg) Refer to page 304 for deflection data. 260 53 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2 Phase Stepper Motor/With Motor Brake Series LXS Dimensions/LXSH2BD Scale: 25% F G x I +0.030 0 depth 5 +0.030 0 depth

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

M1 L3 A L4 L4 L5 A L5 D3 D3 T T D2 L1 D2 L1 L2 L2 Metric Size L5 (1) A (2) M1 Weight (g) d T Model H D1 D2 D3 L1 L2 L3 L4 Max.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Weight (g) d L4 Model L3 T D1 H D2 D3 L1 L2 Max. Min.

Series AS-FM/AS-M/ASD-FM

Weight g Model d T D1 H D2 D3 L1 L4 L2 L3 Min. Max.

A

Bore MM *NA P S W X Y LC LD LH LS LT LX LZ Without gaiter (mm) H ZZ 20 M8x1.25 24 1/8 77 10 15 7 4 5.5 20 53 3 32 44 35 147 25 M10x1.25 29 1/8 77 10 15 7 4 5.5 22 53 3 36 49 40 157 32 M10x1.25 36 1/8 79 10 16 8 4 6.6 25 53 3 44 58 40 159 40 M14x1.5 44 1/8 87 10 16.5 9 4 6.6 30 60 3 54 71 50 187 50 M18x1.5 55 1/4 102 17.5 22 11 5 9 40 67 4.5 66 86 58 218 63 M18x1.5 69 1/4 102 17.5 22 13 5