CG5-S

position (R) LT BB NB A NA X Y LX LZ S + Stroke Z + Stroke H 2-LC Mounting hole (mm) Bore size (mm) A BA BB CA CB D F GA GB H LB LC LH LT LX LY LZ MM NN NA NB S X Y Z 10 15 15 12 17 14 4 8 8 5 28 21.5 5.5 14 2.5 33 25 42 M4 x 0.7 M10 x 1.0 12.5 9.5 46 6 9 74 16 15 18 18 20 20 5 8 8 5 28 23 5.5 14 2.5 33 25 42 M5 x 0.8 M12 x 1.0 12.5 9.5 47 6 9 75 4 Series CJ5-S Dimensions R V Front flange

CG1

TT TV ZZ TW Z TX TY TZ Z 20 25 32 3.2 3.2 4.5 35.8 39.8 49.4 43.4 48 59.4 139 146 155 178 (187) 138+l 159+l CD-G02 CD-G25 CD-G03 42 42 48 118 125 131 150 (159) 16 20 22 28 28 28 147+l 168+l 153+l 177+l 198+l 170+l (179+l) 40 4.5 58.4 CD-G04 71.4 56 30 30 (207+l) 225+l 193+l (205+l) 173 (185) 205 (217) 50 6 86 72.4 CD-G05 64 36 36 (237+l) 235+l 198+l (210+l) 178 (190) 215 (227) 63 8 105.4

F

21 33.5 1/4 3/8 KQW07-U03 17.46 13.2 10 20.5 42 42.5 17 4.6 10 38 KQW10-U03 17 18.5 17 26.5 52.5 56 21 33.5 5/16 1/8 KQW09-U01 12.7 15.2 12 23.5 40 43.5 18.5 6 10 12 KQW10-U04 22 18.5 17 26.5 54.5 56 21 33.5 5/16 1/4 KQW09-U02 14.29 15.2 12 23.5 45 47 18.5 6 12 14 KQW12-U02 17 20.9 17 28.5 54 58.5 22 47.7 5/16 3/8 KQW09-U03 17.46 15.2 12 23.5 45.5 47 18.5 6 12 38 KQW12-U03 17 20.9 17 28.5

Table of Contents

(mm) Q1 = M Q1 = M (mm) Size Q1 = M Q1 = M 50 63 80 100 Size Shaft type Shaft type 50 63 80 100 K T K T K T K T L1 = L1 = Thread L1 = L1 = J X Z J X Z J X Z J X Z M5 x 0.8 Thread 4.2 4.2 4.2 4.2 M5 x 0.8 4.2 4.2 4.2 4.2 M6 x 1 5 5 5 5 M6 x 1 5 5 5 M8 x 1.25 6.8 6.8 L1 M8 x 1.25 Q1 Q1 K axis T axis Q1 Q1 6.8 L1 L1 L1 M10 x 1.5 8.6 J axis Z axis 11-4-17 83 Series CRB1 (Size: 50, 63, 80,

Rotary Actuator/Vane Type

CRB2 u CDRB2 B W 20 180 S Z L M9B With auto switch q r e !

100

Pressure switch for vacuum with energy saving function Circuit diagram ZL6 -K2 B2 5 Z -E F ZL6 -K2 B2 5 Z With supply valve and release valve With pressure switch for vacuum with energy saving function ZL6 -K1 B1 5 Z ZL6 -K15L0Z-V W With supply valve With supply valve and vacuum pressure switch Specific Product Precautions 30 A ZL1/ZL3/ZL6 Series Specific Product Precautions 1 Be sure to

51

NA P ZZ Z RR S TE TF TH TT TV TW TX TY TZ CA2 20 25 32 40 50 63 112 120 129 141 176 186 91 99 105 113 144 149 Up to 200 CD-G02 CD-G25 CD-G03 CD-G04 CD-G05 CD-G06 24 29 35.5 44 55 69 M5 x 0.8 M5 x 0.8 Rc1/8 Rc1/8 Rc1/4 Rc1/4 11 13 15 18 20 22 57 60 62 62 84 84 10 10 10 10 20 20 5.5 5.5 6.6 6.6 9 11 25 30 35 40 50 60 3.2 3.2 4.5 4.5 6 8 (35.8) (39.8) (49.4) (58.4) (72.4) (90.4) 42 42 48 56

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

ZZ (NN 1) x H G H 13 6.5 6.5 13 B A 3.2 6.5 7 7 15 1 3H9 ( ) depth 3 +0.025 0 4 NN x M4 x 0.7 thread depth 8 B A 3H9 ( ) depth 3 +0.025 0 HA GA Section AA Section BB (mm) ZZ 74 79 90 108 126 176 M 49 54 65 83 101 151 Z 48.5 53.5 64.5 82.5 100.5 150.5 K 23.5 33.5 43.5 53.5 63.5 88.5 J 19.5 29 39 56 60 96 I 13 8.5 9.5 10.5 24.5 38.5 NN 2 2 3 3 4 5 HA 20 30 20 28 46 56 H 28 30 20 28 23 28 GA

SMC

ZZ (NN1) x H G H 13 6.5 6.5 13 B A 3.2 6.5 7 7 15 1 3H9 depth 3 +0.025 0 4 NN-M4 x 0.7 thread depth 8 B A 3H9 depth 3 +0.025 0 HA GA Section AA Section BB (mm) ZZ 74 79 90 108 126 176 M 49 54 65 83 101 151 Z 48.5 53.5 64.5 82.5 100.5 150.5 K 23.5 33.5 43.5 53.5 63.5 88.5 J 19.5 29 39 56 60 96 I 13 8.5 9.5 10.5 24.5 38.5 NN 2 2 3 3 4 5 HA 20 30 20 28 46 56 H 28 30 20 28 23 28 GA 17 12 33 43

CLQ

Z (Example) A80CZ 3m . L (Example) A80CL None ...

Compact Cylinder with Lock Series CLQ

Z (Example) A80CZ 3m . L (Example) A80CL None ...

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

61 56 58.5 56 56.5 55.5 57.5 55.5 66 56 66 58.5 68 102.5 112.5 61.5 57.5 Auto switch model D-F5l D-J59 D-F5lW D-J59W D-F5BA D-F59F D-F5NT D-A3lC D-G39C D-K39C D-A44C Bore size Hs Ht Hs Hw Hs Hw 40 38 31.5 73 69 81 69 50 42 35.5 78.5 77 86.5 77 63 47 43 85.5 91 93.5 91 80 53.5 51 94 107 102 107 100 61 57.5 104 121 112 121 19 Series CLA2 Minimum Stroke for Auto Switch Mounting n: Number of

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Y + Stroke X Bearing type Mounting style Bore size Stroke 20-MGG Y X Bore size (mm) Q 86(94) 32 39 25 Copper-free 96(105) 40 46 29 Specifications 109(121) 50 57 31 20, 25, 32, 40, 50, 63, 80, 100 Bore size (mm) 112(124) 63 56 34 Action Double acting 137(151) 80 68 46 Fluid Air 138(152) 100 68 47 Maximum operating pressure 1.0 MPa ( ): Denotes the dimensions for long stroke.

Compact Type

How to order lead wire length (Example) L D-F9P Specifications Nil Lead wire length 0.5 m 3 m 5 m L Z CD-P11 CD-P12 24 VDC 50 mA 200 VAC 12.5 mA 100 VAC or less 25 mA Part no.

Compact Type Dual-Rod Cylinder Series CXSJ

How to order lead wire length (Example) L D-F9P Specifications Nil Lead wire length 0.5 m 3 m 5 m L Z CD-P11 CD-P12 24 VDC 50 mA 200 VAC 12.5 mA 100 VAC or less 25 mA Part no.

RSQ

A 152.5 154 B 52.5 54 E 52 64 I 69 86 J 5 7 M 40 50 N 5.5 6.6 O counterbore 9 depth 7 11 depth 8 T 44 56 Z 14 19 W 66 80 U 35 41 Bore size (mm) 40 50 Data Note 1) Dimensions without auto switch are the same as drawing above. Note 2) These figures show the dimensions when equipped with D-A73 or D-A80 auto switches.

CNG

36 30 85.7 4 12 M6 x 1 Without rod boot With rod boot Bore size (mm) 20 25 32 40 l ZZ H Z e f h Z ZZ 35 46 178 30 16 55 66 198 0.25 x Stroke 40 51 193 30 17 62 73 215 40 51 196 35 17 62 73 218 50 62 221 (230) 35 17 70 82 241 (250) Note) ( ): Denotes the dimensions for long stroke.

SX

of 0.5 MPa) Type of actuation Without light/surge voltage suppressor S, Z type 26 or less 2 position single 18 or less 22 or less 2 position double 32 or less 38 or less 3 position 19 or less SX7000 With light/surge voltage suppressor Response time (ms) (at the pressure of 0.5 MPa) Type of actuation Without light/surge voltage suppressor S, Z type 38 or less 2 position single 27 or less

CJ5-S

CEP1 BA CB D CE1 LH LB LY CE2 With head cover port in axial location (R) 0 0.3 LT BB NB A ML2B NA X Y LX LZ S + Stroke Z + Stroke H C J G5-S CV 2-LC Mounting hole MVGQ CC Bore size (mm) A BA BB CA CB D F GA GB H LB LC LH LT LX LY LZ MM NN NA NB S X Y Z 10 15 15 17 14 4 8 8 5 28 21.5 5.5 14 2.5 33 25 42 M4 x 0.7 M10 x 1.0 12.5 9.5 46 6 9 74 12 RB 16 15 18.3 20 20 5 8 8 5 28 23 5.5 14 2.5

CJ5-S

BA 0 0.3 CB D FY FB 2-FC With head cover port in axial location (R) Mounting hole NB A FX FZ NA F FT BB 0 0.3 S + Stroke Z + Stroke H Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A BA BB CA CB D F FB FC FT FX FY FZ GA GB H MM NN NA NB S Z Bore size (mm) 10 15