Environment

LEFS16/Ball Screw Drive Horizontal Vertical 16 6 14 Lead B Lead B 12 Work load: W [kg] Work load: W [kg] 4 10 Lead A 8 Lead A 6 2 4 2 0 0 0 100 200 300 400 500 600 0 100 200 300 400 500 600 700 800 Speed: V [mm/s] Speed: V [mm/s] LEFS25/Ball Screw Drive Horizontal Vertical 20 30 Lead B 25 15 Work load: W [kg] Work load: W [kg] Lead B 20 10 15 Lead A Lead A 10 5 Lead H Lead H 5 0 0 0 100 200

MGP

10 PB 2-Rc 3/8 (plug) Q PA + Stroke 10 S FB FA C + Stroke B + Stroke E A + Stroke J JA JB K G Refer to "Manufacture of Intermediate Strokes" on page 19 for intermediate strokes.

Rotary Actuator/Vane Style Series CRB2

(mm) E (g6) F (h9) M L K G D C B A Model A port B port CDRB2BWU10-S 4 9 10 0.5 9 3 14 45.5 15 29 CDRB2BWU15-S 5 12 15 0.5 10 4 18 47 20 34 CDRB2BWU15-D Rotary actuator CDRB2BWU20-S 6 14 20 0.5 10 4.5 20 51 29 42 B port A port CDRB2BWU20-D (34.5: Connector type) Angle adjuster CDRB2BWU30-S 2 x R 8 16 30 1 12 5 22 55.5 40 50 CDRB2BWU30-D Switch unit R Q Y P N Model 90 100 180 270 CDRB2BWU10

SV

With External Pilot Specifications (Pitch) 13.5 P = 10.5 18.3 14.1 8.4 60.6 SV 8.6 45.5 10 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 24.6 SZ 23 59.5 5 3 E 3 5 E 3/5 E 3/5 E 43 56.5 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 SY 1 P 1 P 1 P 1 P One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 10 5/16" One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 3.2, 1/8" 4, 5/32" 6,

Series VQ Base Mounted Metal Seal/Rubber Seal

](2) EX120-SFU1(-XP)(1) [EX123-SFU1](2) SX EX120-SDN1 [EX124-SDN1](2) EX120-SCS1(-XP)(1) [EX124-SCS1](2) VK EX120-SCS2(-XP)(1) [EX124-SCS2](2) EX120-SMJ1(-XP)(1) [EX124-SMJ1](2) AXT100-1-P (4) U S w e r U S U S VZ AXT100-1-F (4) U S AXT100-1-GU20 Note 1) Suffix XP for dust-proof SI unit.

A

) Bracket AMG150 BM51 AMG250 BM52 AMG350 BM53 AMG450 BM54 AMG550 BM55 AMG650 BM56 AMG850 BM57 Model Port NPT A mm B mm C mm S Y M B O L S AMG150 14 170 63 10 AMG250 38 191 76 10 AMG350 12 220 90 10 AMG450 34 241 106 10 AMG550 1 279 122 10 AMG650 1 12 388 160 10 AMG850 2 479 220 10 H O W T O O R D E R W AT E R S E P A R AT O R S E R I E S AMG AMG S U B-S TA N D A R D S P E C I F I C AT I O

Electric Actuator with Integrated Guide

Guide Series LTF Lead screw lead mm Mounting orientation Motor type Series Page Model Guide type Ground ball screw Rolled ball screw 6 10 20 10 20 10 20 10 20 6 10 20 10 20 10 20 10 20 LTF6 LTF8 LTF6 LTF8 LTF6 LTF8 LTF6 LTF8 P.2 Horizontal 10 10 P.10 Standard motor 6 6 P.18 Vertical 10 10 P.26 Frame-type linear guide LTF 6 6 P.34 Horizontal Courtesy of Steven Engineering, Inc.-230 Ryan Way

SX

28 A COM B + A B A B A 42 18.4 2-4.2 Manual override (Press and turn for the locking type.) 2-One-touch fittings (Mounting hole for manifold) 71.9 2-4.2 42 18.4 (Light/Surge voltage suppressor) Applicable tubing O.D.: 8 10 (A, B port) (A, B port) 2-One-touch fitting (Mounting hole for manifold) 71.9 (5.5) Applicable tubing O.D.: 8 10 (5.5) 48.6 (Light/Surge voltage suppressor) 33.3 48.6 31.5

Integrated Controller

Weight [g] JX-CDS-E-1-S 68 JX-CDS-E-3-S 125 JX-CDS-E-5-S 200 JX-CDS-E-10-S 387 JX-CDA-E-1-S 68 JX-CDA-E-3-S 125 JX-CDA-E-5-S 200 JX-CDA-E-10-S 387 Connector type: Right angled (35) L 35 5 B end A end Connector type: the right angled type cannot be used for the parallel mounting type. (15) PIN 2 PIN 3 45 PIN 4 PIN 1 62 Slider Type Rod Type EQFSH/EQYH Series Battery-less Absolute Encoder

Table of Contents

size 01 B 1 8 B 1 4 B 3 8 04 B 1 2 06 B AFF 1 Standard 11 2 Standard Nil Rc Thread type 02 03 JIS Symbol AME AM F G N NPT P . 14-20-57 3 4 1B Misc. 10 14 1 B 1 2 20 2B Caution Note) Refer to How to Order Bowl Assembly on page 14-20-59.

Free Mount Cylinder

Single Acting, Spring Return D-M9, D-F9W D-M9V, D-F9WV D-A9, D-A9V Bore size (mm) Stroke A B W A B W A B W 6 4.5 6.5 4 4 2.5(5) 0 17.5 17.5 All stroke 13.5 16.5 21.5 20 25 24 29 26.5 31.5 27.5 32.5 16.5 21.5 20 25 24 29 26.5 31.5 27.5 32.5 5, 10 15 5, 10 15 5, 10 15 5, 10 15 5, 10 15 12.5 17.5 16 21 20 25 22.5 27.5 23.5 28.5 10 0.5 2.5 7.5 7.5 1.5(1) 3.5 16 0.5 2 8 8 2(0.5) 4 2 20 0 10 10

Aluminum High Vacuum Angle Valve

Flange type Symbol Nil KF(NW) K(DN) D Leakage (Pam3/s or less) Note) Symbol Changed part Quantity Valve open/closed Valve open Valve closed Mounting position Internal 1.3 x 10-9 (FKM) 1.3 x 10-7 External Type XLA Nil 1.3 x 10-9 (FKM) 1.3 x 10-7 None A B C A B C r 2-1 8-1 o 8-2 XL XL 1.3 x 10-7 1.3 x 10-9 (FKM) 1.3 x 10-7 2-1 8-1 1.3 x 10-9 (FKM) r o 8-2 XLQ Note) Values at normal temperature

CXS

/s 1 Graph V = up to 300mm/s 2 0.5 0.4 CXSL6 0.05 CXSM6 Weight m (kg) Weight m (kg) 0.1 CXSL6 0.05 CXSM6 5 0.03 5 0.01 10 20 30 40 50 100 10 20 30 40 50 100 Overhang L (mm) Overhang L (mm) 10 to 32 Graph V = up to 200mm/s 3 Graph V = up to 400mm/s 4 4 20 3 10 32 5 25 1 Weight m (kg) Weight m (kg) 32 20 25 0.5 1 20 15 0.5 15 10 CXSM CXSL CXSM CXSL 10 5 0.1 5 0.1 10 20 30 40 50 100 10 20 30

JXCx-OMU0004

LEHZ 3 5mm/s LEHZ10 LEHZ16 LEHZ2025 LEHZ LEHZ 32 40 6 2(3) 6 3(4) 16 11 52 84 10 4 10 5.5 28 19.5 91 147 [N] 14 6 14 8 40 28 130 210 *LEHZ1016 30%F.S.LEHZ2025 25%F.S.LEHZ32 40 20%F.S. * (LEHZJ ) 53 No.JXC-OMU0004-A LEHF LEHF10 LEHF20 LEHF32 LEHF40 2] 2] 2] 2] [mm/s] [mm/s [mm/s] [mm/s [mm/s] [mm/s [mm/s] [mm/s 0 5 100 5 100 5 100 5 100 1 10 150 10 150 10 150 10 150 2 15 200 15 200 15

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

CDRBU2W10, 15-S CDRBU2W20, 30-S CRB2 CRBU2 CRB1 2 x S2 2 x S1 2 x S1 MSU 2 x S2 CRJ Rotary actuator CRA1 CRQ2 2 x S1 2 x S1 2 x S1 2 x S1 Rotary actuator MSQ (34.5: Connector type) MSZ A port B port CRQ2X MSQX 2 x R A port B port 2 x R MRQ 1 Auto switch Auto switch 2 5 20.5 (26.5: Connector type) 1.

MG

Slide Bearing Felt Holder Ball bushing Spacer Aluminum alloy Replacement Parts: Seal Kit Bore size (mm) Contents Kit no. 20 25 32 40 50 MGP20-B-PS MGP25-B-PS MGP32-B-PS MGP40-B-PS MGP50-B-PS Set of nos. above @1, @2, @3, @4, #2, #3, $1, $2 Seal kit includes @1 to @4, #2, #3, $1, $2.

ZP3

across flats 10 2 2 C Model A B C Vacuum inlet direction q Pad dia.

V

n d a d j u s t m e n t i s p o s s i b l e w i t h o u t d i s a s s e m b l y o f the manifold H O W T O O R D E R NZM V A C U U M E J E C T O R M A N I F O L D (N)ZZM B NUMBER OF STATIONS 01 ... 1 Station 02 ... 2 Stations to 10 ... 10 Stations EXHAUST PORT 04 ... 1/2 06 ... 3/4 PORT THREAD Nil ...PT* Remove (N) when ordering T .NPTF Fitted with an Optional Silencer Series NAN: see section

2/3 Port Valve

Table w Voltage-Electrical Entry-Options Table q Connection Size and Applicable Model Insulation Electrical entry Options 1 (100V) 2 (200V) 3 (110V) 4 (220V) 7 (240V) 8 (48V) 5 (24V) 6 (12V) Class H Applicable model VXD2142-03 VXD2142-04 VXD2152-06 VXD2262-10 VXD2272-32 VXD2382-40 VXD2392-50 Class B G _ S L, Z _ S L, Z C D, T G, C S T (1) Connection Size 3 8 1 2 3 4 Thread 1 32A 40A 50A AC

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

(B contact) 2 pcs.