CV/MVGQ

Nut Mounting hole 16 [17] S + Stroke Z + Stroke H1 B1 Bore size (mm) 10 16 Mounting hole 7 3.2 8 4 [ ]: Denotes the values of AC. 5 to 15 st 16 to 30 st 31 to 45 st 46 to 60 st Bore size (mm) LA H F D LY NN C LX Y B LC LT MM X A LB LH LZ NA NB S Z Z S Z S Z S 96.5 [97.5] 104 [105] 96.5 [97.5] 105 [106] 116 [117] 117 [118] 128 [129] 129 [130] 10 16 28 8 4 M8 x 1 14 24 7 84 12 1.6 5 72 15

CV/MVGQ

Z + 2 x Stroke 7 3.2 8 4 C J G5-S [ ]: Denotes the values of AC. 5 to 15 st 16 to 30 st 31 to 45 st 46 to 60 st Bore size (mm) CV LA H F D LY NN C LX Y B LC LT MM X A LB LH LZ NA NB S Z Z S Z S Z S 128 [129] 129 [130] 116 [117] 117 [118] 96.5 [97.5] 104 [105] 96.5 [97.5] 105 [106] 10 16 28 8 4 M8 x 1 84 14 24 7 72 12 1.6 5 60 15 15 9 32 9.5 37.5 4.5 16.5 M4 x 0.7 12.5 52.5 MVGQ 28 8 5 M10

SY

type) U 5 24VDC 6 12VDC Note) For "Z", only positive COM specification is available.

MY1

ME 1 3 1 3 ME = x FE x Z = x 268.6 x 37.4 x 10= 3.35 (Nm) FE Load factor = M1E/M1E max = 3.35/35.9 = 0.09 M ME: Moment ME max (from 5 of graph MY1H/M3 where 1.4a = 420mm/s) = 27.6 (Nm) .

CJ2

0 NCM M6 x 1 .0 Exhaust air port M3 x 0 .5 NCA 7 3 D-X 8 15 3 2028 S + Stroke 5 Z + Stroke (mm) Data Stroke 5 to 15 16 to 30 31 to 45 46 to 60 S 30.5 39.5 43.5 57.5 Z 63.5 72.5 76.5 90.5 Note) 1.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

The load factor for each direction can be obtained as follows. x = 0/250 = 0 y = 50/180 = 0.27 z = 200/1000 = 0.2 5. x + y + z = 0.47 1 LER LEH LEY -X5 1000 1500 1500 11LEFS 800 11LEJS 1000 1000 Lz 600 L2 [mm] L1 [mm] L3 [mm] 25A400 500 500 LEC 200 Ly Lx LEC S 0 5 10 15 20 25 0 0 5 10 15 20 25 0 0 5 10 15 20 25 0 LEC SS-T Work load [kg] Work load [kg] Work load [kg] LEC Y LEC Y Motorless

MY1

Wn Y Y-axis Yn Z-axis Zn X-axis Xn X Wa 5 mm 0.88 kg 0 mm 65 mm 210 65 111 Z Wb 42.5 mm 4.35 kg 0 mm 150 mm 150 Wc 42.5 mm 0.795 kg 111 mm 150 mm Wd 42.5 mm 0.5 kg 210 mm 150 mm Y 42.5 5 n = a, b, c, d 3.

LJ1H

2m 3m 4m 5m F R L T B Axial entry Right entry Bottom entry Specifications Intermediate strokes 100 5.5 200 6.3 300 7.1 400 7.8 500 8.6 5 to 40 (with no condensation) 5 150 600 mm kg C kg N mm/s mm Standard stroke For manufacture of strokes other than the standard strokes on the left, add "-X2" at the end of the part number.

Smooth Cylinder/Low Speed Cylinder

(mm) B 12 18.3 C 14 20 D 4 5 F 8 8 FB 13 19 FC 4.5 5.5 FT 1.6 2.3 FX 24 33 FY 14 20 FZ 32 42 GA 8 8 GB 5 5 H 28 28 MM M4 x 0.7 M5 x 0.8 NA 12.5 12.5 NB 9.5 9.5 NN M8 x 1.0 S 46 47 T A 15 15 Z 74 75 Bore size (mm) 10 16 M10 x 1.0 Double Clevis Style (D) Bore size Stroke CJ2XD Z + Stroke S + Stroke Rod end nut Piping port 2 x M5 x 0.8 Clevis pin CZ 0 -0.3 B 0 -0.3 T-bracket For details, refer

High Vacuum Angle Valve

Add M to the end of the part number for 1 m, L for 3 m, and Z for 5 m.

Table of Contents

3 8 1 2 3 4 S L, Z S L, Z S Note ) Thread PB 1 32A 40A 50A AC Flange DC Note) Surge voltage suppressor is attached in the middle of lead wire.

Table of Contents

time (s/90) MHY2-20D MHW2-32D 6 50 Moment of inertia (x 10-4 kgm2) Moment of inertia (x 10-4 kgm2) 5 40 4 30 3 20 2 10 1 0 0 0.2 0.4 0.6 0.8 0.2 0.4 0.5 0.3 0.6 Operating time (s/90) Operating time (s/90) MHY2-25D MHW2-40D 20 200 Moment of inertia (x 10-4 kgm2) Moment of inertia (x 10-4 kgm2) 15 150 10 100 5 50 0 0 0.2 0.4 0.6 0.8 1.0 0.2 0.4 0.6 0.8 1.0 Operating time (s/90) Operating time

15

The load factor for each direction can be obtained as follows. x = 0/250 = 0 y = 50/180 = 0.27 z = 200/1000 = 0.2 5. x + y + z = 0.47 1 1000 1500 1500 800 1000 1000 Lz 600 L2 [mm] L1 [mm] L3 [mm] 400 500 500 200 Ly Lx 0 5 10 15 20 25 0 0 5 10 15 20 25 0 0 5 10 15 20 25 0 Work load [kg] Work load [kg] Work load [kg] 808 A Model Selection LEFB Series Motorless Type Table Accuracy (Reference

Table of Contents

VQ7-8-FG-S-A03 VQ7-6-FG-S-A03 VQ7-8-FG-S-A04 VQ7-6-FG-S-RA02 VQ7-8-FG-S-RA03 VQ7-6-FG-S-RA03 VQ7-8-FG-S-RA04 3-10-5 6 For details about certified products conforming to international standards, visit us at www.smcworld.com.

5

(mm) Bore size A B C D F GA GB H LB LC LH LT LX LY LZ MM NA NB NN S X Y Z 10 15 12 14 4 8 8 5 28 15 4.5 9 1.6 24 16.5 32 M4 x 0.7 12.5 9.5 M8 x 1.0 46 5 7 74 16 15 18.3 20 5 8 8 5 28 23 5.5 14 2.3 33 25 42 M5 x 0.8 12.5 9.5 M10 x 1.0 47 6 9 75 144 Smooth Cylinder Double Acting, Single Rod CJ2Y Series Dimensions Double foot (M) CJ2YM Bore size Stroke Z REA H Mounting nut Mounting nut F

V100

Rated voltage For DC 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC B: Locking slotted type Electrical entry 24 VDC, 12 VDC, 6 VDC, 5 VDC, 3 VDC Grommet L plug connector M plug connector G: 300 mm lead wire L: 300 mm lead wire M: 300 mm lead wire MN: Without lead wire Light/Surge voltage suppressor Nil S Z R U Without light/surge voltage suppressor With surge voltage suppressor With light/surge

Battery-less

LEFS LEFB LEY LEYG LESYH LES LESH LEHF LER JXC51/61 JXC 1 LES25mEm Vertical Horizontal 6 6 Lead 8: LES25 EK 5 5 Lead 8: LES25 EK Work load [kg] Work load [kg] 4 4 3 Lead 16: LES25 EJ 3 Lead 16: LES25 EJ 2 2 1 1 0 0 0 100 200 300 400 500 Speed [mm/s] 0 100 200 300 400 500 Speed [mm/s] Cycle Time Graph (Guide) 1.80 100 mm/s 1.60 1.40 1.20 200 mm/s Time [s] 1.00 300 mm/s 0.80 0.60 0.40 400 mm

1

Dimensions Double acting, Single rod Single acting, Spring return Single acting, Spring extend Z + Stroke H + Stroke Z Z Z Double acting Single acting (Spring return) Single acting (Spring extend) Action F H F H Without switch With switch Without switch With switch Without switch With switch Bore size (mm) 5 10 15 5 10 15 5 10 15 5 10 15 6 8 9 42 42 9 8 47 52 57 47 52 57 52 62 67 52 62 67

Aluminum High Vacuum Angle Valve

to 60C Heater With 100C heater With 120C heater D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// H0 H4 H5 High temperature type 5 to 150C Solid state auto switch Note) Size 25 is not applicable for H4.

LJ1H

Left Top Bottom 2 3 4 5 2m 3m 4m 5m Axial entry Right entry Bottom entry Specifications Intermediate strokes 100 5.2 200 6.0 300 6.8 400 7.5 500 8.3 5 to 40 (with no condensation) 10 74 600 mm kg C kg N mm/s mm Standard stroke For manufacture of strokes other than the standard strokes on the left, add "-X2" at the end of the part number.