VY511, VYU5

VY1200-00-N VEX3222-5M Description E-P HYREG valve 3 position valve No. q w VE VY Exclusive controller VYU5-D G Rotary switch, Trimmer container 4-4.5 AL STOP START SEL. SW RESET RUN2 RUN1 OV SET UP 68 0.2 SET UP 7 31 BALANCE CONTROLLER VYU5-D 80 56 ERR.

Vacuum

Air Operating pressure -6 -3oinHq C150 760mmHq) Applicable adsorption nozzle diamelr (smil) 00.G00.7 (re'er 10 grapn 1)l 00.5^01.2 (rete'to oraph 2l Hystaresis 0.'

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

NPT M5 x 0.8, C4 P port P port T NPTF A port size A 1/8 1/8 M5 M5 x 0.8 R port Applicable blanking plate assembly Refer to page 610. 1/8 A port M5 x 0.8, C4 C4 4 One-touch fitting N3 5/32" One-touch fitting Note) For more than 8 stations, supply/exhaust air to/from both sides of P port and R port. 611 3 Port Pilot Solenoid Valve 10-SYJ300 Type 20 Manifold: Top Ported/10-SS3YJ3-20Stations -00

Series AP3100

Manually operated type (For high pressure and high flow) Diaphragm Valve for Ultra High Purity Series AP3100 Suitable for UHP gas supply line Body material: 316L SS secondary remelt High pressure type: 20.7 MPa and 9 MPa Designed for bulk specialty gas (BSGS) delivery LOTO standard with AP3157, optional AP3125 How to Order (Inlet) (Outlet) AP31 00 2PW MV8 MV8 S Model Ports Code Maximum operating

EX600-WEN_WSV.eng

Parameter Setting Hardware Configuration (EDS file) I/O Map SWEDEN (46) 8 603 12 00 Ekhagsvgen 2931, SE-141 71 Segeltorp, Sweden (7) Set the Ethernet port Refer to the SMC website (URL https://www.smcworld.com) to obtain more detailed information about these setting above.

EXxx-OMV0028.eng

Parameter Setting Hardware Configuration (GSDML file) I/O Map SWEDEN (46) 8 603 12 00 Ekhagsvgen 2931, SE-141 71 Segeltorp, Sweden Refer to the SMC website (URL https://www.smcworld.com) to obtain more detailed information about these setting above.

HRX-OM-M090

13c, Granfoss Nringspark, N-1366 Lysaker Poland SMC Industrial Automation Polska Sp. zo.o (48) 22 211 96 00 ul.

HRX-OM-R016

13c, Granfoss Nringspark, N-1366 Lysaker Poland SMC Industrial Automation Polska Sp. zo.o (48) 22 211 96 00 ul.

HRX-OM-W038

13c, Granfoss Nringspark, N-1366 Lysaker Poland SMC Industrial Automation Polska Sp. zo.o (48) 22 211 96 00 ul.

HRX-OM-O021

13c, Granfoss Nringspark, N-1366 Lysaker Poland SMC Industrial Automation Polska Sp. zo.o (48) 22 211 96 00 ul.

HRX-OM-R005

13c, Granfoss Nringspark, N-1366 Lysaker Poland SMC Industrial Automation Polska Sp. zo.o (48) 22 211 96 00 ul.

JXCx-OMT0005CN

(P.12) ) 84 - 21. 1byte 2byte 4byte 2byte 4byte (1)2byte 2byte Output Byte6,Byte7 100mm/s IO Output 12byte 100mm/s 16 0064h 00 64 h (2)4byte 64h 00h Byte6 Byte7 Bit7 Bit0 4byte Output Byte8Byte11 700.00mm IO Output 12byte 0.01mm 700.00mm 10 7016 00011170h 00 01 11 70 h (3) 11h 70h Byte8 Byte9 (6) 01h 00h Byte10 Byte11 ALM Bit7 Bit0 4byte Output Byte8Byte11 -700.00mm IO

A

COMBINATION UNITS MODULAR TYPE (N)AC1000(N)AC6000 M51" C o m b i n a t i o n o f f i l t e r, re g u l a t o r a n d l u b r i c a t o r i n c l u d i n g mounting bracket and pressure gauge H O W T O O R D E R FILTER/REGULATOR/LUBRICATOR (N)AC 00 G T E C H N I C A L SPECIFICATIONS D R A I N Manual drain D Auto drain Japanese N North American Model NAC1000 NAC2000 NAC3000 NAC4000 NAC5000

ø2 One-touch Fittings Series KJ

(mm) Applicable fitting size Model KJY02-M3 KJY02-M5 2 M3 x 0.5 M5 x 0.8 KJR02-04 4 2 KJU02-00 2 KJU02-23 KJU02-04 2 Bulkhead union KJE Plug KJP Applicable tubing O.D. (mm) Model Applicable fitting size Model KJE02-00 2 KJP-02 2 2 Polyurethane tubing Series TU 2 Miniature fittings Series M

AC Servo Motor Driver (CC-Link Type)

Please select the station 00, if you want to use for the first time.

OMU0023

Binary digit (decimal value) 0 to 50 ASCII hex "00" to "32" (d) Target position (encoder count value): This item is valid in Pulse Input Type control signal mode only. The target position data is sent as an encoder count value. Count value 1,000,000 has been fixed for 0 mm as a reference point.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

5 10 15 20 25 30 kPa Pressure loss [kPa] Pressure loss [kPa] 750 kPa 50 kPa 30 0 kPa 0 kPa 20 30 kPa 50 kPa 70 kPa 750 kPa 350 kPa 10 70 kPa 350 kPa 00 10 20 30 40 50 Flow [L/min] Flow [L/min] PF2M711(-L) 100 L/min PF2M721(-L) 200 L/min 40 90 80 70 60 50 40 30 20 10 00 50 100 150 200 Pressure loss [kPa] Pressure loss [kPa] 750 kPa 30 30 kPa 0 kPa 0 kPa 20 750 kPa 30 kPa 50 kPa 50 kPa 350

ZSE1/ISE1

Connector Socket Lead wire Hook 16-6-4 5 Compact Pressure Switch Series ZSE1/ISE1 Dimensions Grommet type: ZSE1-00-14/-15/-18/-19 Connector type: ZSE1-00-14C/-15C/-18C/-19C 23.4 Indicator light (Red) Indicator light (Red) 23 23 15 15 H HYS SET L H L H HYS SET L H Hysteresis setting trimmer Pressure setting trimmer Pressure setting trimmer Hysteresis setting trimmer ZSE ISE 23.4 23.4 Indicator

Prevents Micro-Bubbles

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3 LLC 2 A 02 11 S VXA Tubing size for P port and R side connection Body class Tubing size for P port and L side connection VN Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Tubing size Plug

V

-25(L)-X105 ZSE4-00-26(L)-X105 Model (N)ZL112 (N)ZL112-G (N)ZL112-E (N)ZL212 Nozzle Diameter 1.2mm 1~5V + -5% FS load impedence 1k 1.2mm x 2 Output Specification 1 output, NPN open collector 30V 80mA Max Suction Flow 100 l/m (ANR) 200 l/m (ANR) 126 l/m (ANR) Air Consumption 63 l/m (ANR) Fluid Air Max Vacuum Pressure -84kPa (-12PSI) -12PSI Setting PressureRange 0~-101kPa, -760mmHg, -14.7PSI