Integrated Controller

[mm] Double Clevis Size Stroke range [mm] A CL CB CD CT CU CW CX CZ L RR 16 30 to 100 128.4 119.4 20 8 5 12 18 8 16 10.5 9 25 30 to 100 166.2 156.2 10 5 14 20 18 36 14.5 10 101 to 200 191.2 181.2 32 30 to 100 185.6 175.6 10 6 14 22 18 36 18.5 10 101 to 200 215.6 205.6 Material: Cast iron (Coating) The A and CL measurements are when the unit is in the original position.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

A parallel key is used instead of chamfer for size 40. X Y (mm) Size Y X Body (B) 10 3 19 15 6.5 20.5 Body (A) 20 7.5 22.5 30 8.5 26.5 40 9 36 114

Cylinder with Lock Series CLS

Hs B 30 (33) 36 Auto switch Numbers in ( ) are for type D-F5LF. Approx. Hs D-A44 D-A5/A6 D-A59W 33 Auto switch A Auto switch A B 34.5 Approx. Ht Approx. Ht 56 36 Approx. Hs B Approx.

CNS

. 6.8 to 9.6) Auto switch A B 49 Ht Ht CL 56 56 34 CL1 A B Hs 30 (33) 36 Hs MLGC Auto switch ( ): Denotes the values of D-F5LF.

7ND9071en

Fig. 10 Control wiring, ND9000F/P, Ex ia for Zone 0 / Division 1 7 ND90 71 en 19 N O I T A C O L S U O D R A Z A H N O I T A C O L S U O D R A Z A H N O N ND9000F/P Valve Positioner FISCO ic Power Supply / Barrier Fieldbus Input X102 Ui (Vmax) = 32 V Ii (Imax) = 380 mA Pi (Pmax) = 5.32 W Li = 10 uH Ci = 5 nF + 1 Uo (Voc) 32 V Io (Isc) 380 mA Po 5.32 W 2 NOTE 1 NOTE 1 NOTE 1 3 SHD Earthing

VQZ1000/2000/3000

448 34 485.5 37 473 36 39 498 38 40 L dimension 510.5 Blanking plug KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 L A Dimensions Applicable fittings size d Model A L D D KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 3.2 31.5 16 Color: White 6 32 16 8 35 18 10 39 20.5 12 43 22 Silencer (For EXH port) Silencer is installed in the EXH port. 63 38 22 Dimensions

Cylinder with Lock

D-Z7m D-Z8m D-M9m D-M9mV D-M9mW D-M9mWV D-M9mA D-M9mAV D-A9m D-A9mV D-F5m D-J59 D-F59F D-F5NT D-A5m D-A6m D-A59W D-G39 D-K39 D-A3m D-A44 D-P3DWA D-P4DW Bore size A B A B A B A B A B A B A B A B A B A B 32 10 8 6 4 6.5 4.5 11.5 9.5 0 0 4 2 0 0 3.5 1.5 5.5 3.5 3 1 40 9 9 5 5 5.5 5.5 10.5 10.5 0 0 3 3 0 0 2.5 2.5 4.5 4.5 2 2 50 10 9 6 5 6.5 5.5 11.5 10.5 0 0 4 3 0 0 3.5 2.5 5.5 4.5 3 2 63 10

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Type 10-SS5YJ3-S31 Type 10-SS5YJ3-32 Type 10-SS5YJ3-S32 Type 10-SS5YJ3-32P Applicable manifold base Type 10-SS5YJ3-20 Type 10-SS5YJ3-21P Manifold base Applicable manifold base Type 10-SS5YJ3-41 Type 10-SS5YJ3-S41 Type 10-SS5YJ3-46 Type 10-SS5YJ3-S46 Manifold base Manifold base Protrusion for positioning A mark A mark Manifold gasket Manifold gasket Manifold gasket A A SYJ3000-14-7 SYJ3000

CLK1

140 14 Series CLK1P/CLK1G Auto Switches/Proper Mounting Position and Height for Stroke End Detection D-C7, D-C8 A 8.5 D-H7, D-H7W, D-H7F 8.5 A Hs B Hs B 16 14 14 26 29 (36) D-C73C 8.5 A D-H7C 8.5 A Hs B B Hs 14 36.7 38.2 D-G5NT D-B5, B6 B A Hs Hs B A 24.5 24.5 13 33 13 33 Hs D-A3 D-G3, D-K3 B A 49 B Hs A 49 34 56 18 36 18 36 B D-A4 Hs A 34.5 56 18 36 Minimum Strokes for Auto Switch Mounting

Table of Contents

Symbol 02 2 stations A, B P , EA, EB Symbol 04 06 Passage Porting specifications (A, B) EA, EB P 10 10 stations 1 2 Symbol 3 4 3 4 1 Side 2 Bottom M Mixed Common Common For bottom ported: 1/2 only.

MY1

MY1B (Basic type) B A 10 16 20 Mounting position A 27 35 20 B 133 165 90 Operating range l Note) 6.5 8.5 6 MY1M (Slide bearing type) B A 16 20 Mounting position A 90 70 B 110 90 Operating range l Note) 7.5 11 MY1C (Cam follower guide type) B A 16 20 Mounting position A 70 90 B 90 110 Operating range l Note) 11 7.5 MY1H (High precision guide type) B A 10 16 20 Mounting position A 27 35

Rotary Actuator/Vane Type

[mm] Size A B C D E (g7) F (h9) G H K L M N P Q R T U X Y1 Y2 Z Q2 Q3 Q4 10 29 22 19.5 14 4 0.004 0.016 9 0 0.036 1 7 9 0.5 16.5 9.5 3 M3 x 0.5 3.5 3.5 M3 x 0.5 10.6 3 31 25 17 41 15 34 25 21.2 18 5 0.004 0.016 12 0 0.043 1.5 6 10 0.5 19 10 3.2 M3 x 0.5 3.5 3.5 M3 x 0.5 12.6 3 36 29 21 48 20 42 34.5 25 20 6 0.004 0.016 14 0 0.043 1.5 8 10 0.5 25.5 13 4 M4 x 0.7 4.5 4.5 M5 x 0.8 16 4 44 36

Min. Dripping Flow Rate(l/min): 220, Oil Storage Capacity(cm³): 135, Case: [Resin] Polycarbonate Case, Inlet Side Connection Type: Rc, Inlet Side Plumbing Thread Nominal: 1, Outlet Side Connection Type: Rc, Outlet Side Plumbing Thread Nominal: 1, Drain Exhaust: [Not Provided] No Drain Cock, Flow Direction: [Right] From Left to Right, Size of Body: 60, Accessory: Without optional

Body Size: 60, Thread: Rc (Rc: for Sizes 20~60; M5: for Size 10), Port Size: 10 (1), Mounting: None, Semi-Standard, Body Size 10: Standard, Semi-Standard, Body Size 20: Standard, Semi-Standard, Body Size 30, 40, 50 & 60: Standard

MU

(mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 D 12 14 16 20 20 B1 17 19 22 27 27 C 54 68 86 104 124 B 24 28 32 39 50 BY 7 8 9 9 12 AL 19.5 23.5 27 32 32 BX 9 6.5 8 10 11 ET A 22 26 30 35 35 BS 42 50 54 64 63 K 5.5 5.5 6 7 7 BT Model MUB25 MUB32 MUB40 MUB50 MUB63 Standard stroke (mm) 5, 10 5, 10 5, 10, 15, 20 5, 10, 15, 20 5, 10, 15, 20 M5 x 0.8

MU

(mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 D 12 14 16 20 20 B1 17 19 22 27 27 C 54 68 86 104 124 B 24 28 32 39 50 BY 7 8 9 9 12 AL 19.5 23.5 27 32 32 BX 9 6.5 8 10 11 ET A 22 26 30 35 35 BS 42 50 54 64 63 K 5.5 5.5 6 7 7 BT Model MUB25 MUB32 MUB40 MUB50 MUB63 Standard stroke (mm) 5, 10 5, 10 5, 10, 15, 20 5, 10, 15, 20 5, 10, 15, 20 M5 x 0.8

LEC-OM07605CN

(2) (10.2) 50 [ms] 40 30 T8 T9 20 T7 10 T6 T5 0 0 1000 2000 3000 4000 5000 6000 [r/min] LE-T10.3.2 [] LE-T5LE-T6LE-T730 LE-T8LE-T910 6 10. 10.4 a 1 10 8 5 10 7 1 10 7 5 10 6 a: [ms] 1 10 6 5 10 5 b: SSCNET 1 10 5 5 10 4 1 10 4 b 5 10 3 1 10 3 4 7 10 20 40 70 100 200 [mm] 10.5 2500kVA1mAC240V()LECSS2T5LECSS2-T9AC200V (A0-P) (L1L2L3) (L11L21) LECSS2-T5LECSS2-T7 LECSS2-T8

5 Port Air Operated Valve

, 1/4 [4(A), 2(B)port] 2 x 4.3 (For mounting) 10 4A 1 26.4 20 10 1/8 (Pilot port: Upward) 2B 33 49 (56.5) 40.5 97 1/8 [Pilot port: Lateral (-P)] 31.5 36 17.5 7 20.5 2 x 4.2 (For mounting) 1/8, 1/4 [1(P)port] (18.4) (18.4) (Distance between ports) 1/8 [5(EA), 3(EB)port] 7.5 1P 3EB 8 7.5 5EA 2 x 2 (Breathing hole) 36 51.5 35.5 1503 VFA1000/3000/5000 Series Dimensions: VFA5000 Series/Body Ported

CLQ

Head Side flange style: CLQG/CDLQG ML1C DFV M -X Head Side Flange Style 4-FD Without auto switch With auto switch Bore size (mm) FZ FX A + Stroke L FT B + Stroke G Stroke range 20FD FT FV FX FZ G L L1 M B A A B 91 36 10 to 50 63 46 101 9 9 80 92 108 38 8 33.5 60 Data 101 46 75, 100 107.5 43.5 10 to 50 80 53.5 117.5 11 11 99 116 134 43 10 43.5 77 117.5 53.5 75, 100 126 53 10 to 50 Rod end

CLQ

A type mounting bracket B type mounting bracket Joint YA YB YU 56 67 83 100 18 22 28 36 6 8 10 12 55 100 195 340 YA-03 YA-05 YA-08 YA-10 32, 40 50, 63 80 100 Applicable mounting brackets Bore size (mm) Joint A type B type B type mounting brackets 32, 40 YU-03 YA-03 YB-03 50, 63 YU-05 YA-05 YB-05 80 YU-08 YA-08 YB-08 100 YU-10 YA-10 YB-10 Allowable eccentricity (mm) RS 32 40 50 63 80 100 Bore