Vacuum System Peripherals:

Connection 3.2, 4 6, 8, 10, 12, 16 KQ2 Nylon, Soft nylon, Polyurethane M5, M6, R 1/8 to 1/2 From 100 kPa One-touch fittings One-touch fittings/Manifold Series KM Applicable tubing: Nylon, Soft nylon, Polyurethane Tubing O.D.: 4, 6, 8, 10, 12 Port A piping port Port B port size No. of port A Piping specifications Port A Port B Model Model 4 6 8 8 10 12 Rc Rc 6 8 10 6, R 6, R 6, R 8, R 8, R

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

(mm) G GP H HB HG HP A HS HT HA D FB FA d EA EB B C Model CY1S6 CDY1S6 CY1S10 CDY1S10 6.5 3 17 7.6 6 32 27 8 5 4 8 26 8 19 8 4 18 12 7.5 6 5 40 34 12 10 3 6.5 10 12 33 14 25.5 PA J x K LD (N) PB PW Q S ta tb TT T QW W Z L Model CY1S6 CDY1S6 M4 x 0.7 x 6.5 40 3.5 10 25 25 50 52 16 42 10 16 46 68 CY1S10 CDY1S10 M5 x 0.8 x 9.5 45 4.3 9.5 25 38 60 60 24 47 12.5 20.5 0.5 1.0 58 80 PA

51

A A1 E1 L1 MM R1 U1 ND NZ L NX M22 x 1.5 38 21 21 27 M26 x 1.5 44 21 24 31 Y-G02 Y-G03 Y-G04 Y-G05 Y-G08 Y-G10 16 20 +0.4 +0.2 +0.4 +0.2 +0.5 +0.3 +0.5 +0.3 +0.5 +0.3 +0.5 +0.3 A knuckle pin and retaining rings are included. 34 41 42 56 71 79 8.5 25 30 30 40 50 55 M8 x 1.25 10.3 11.5 8 10 10 14 18 22 16 20 36 44 56 64 21 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 Knuckle

KR

(mm) Note) A Weight (g) D1 D2 L1 M L2 Model Nylon Urethane Applicable tubing KGW04-M5 KGW04-01 8 18 30 37.5 32 38.5 M5 x 0.8 11 3.0 3.0 8 10.4 1 8 4 16 23 M5 x 0.8 14 10 10 4.0 4.0 1 4 KGW04-02 43.5 42.5 38 11 26 KGW06-M5 KGW06-01 30.5 40 33.5 42.5 3.0 3.0 8 8 1 8 10 6 12.8 17 20 10 1 4 KGW06-02 46 46.5 17 14 10.9 8.6 41 3 8 KGW06-03 48 48 67 1 8 1 4 KGW08-01 KGW08-02 43.5 49.5 47 51

LEC-OM02904

AC DC 2. 10 3 10 (2) ()40 10(555) (10.1) A P (10.1) KT [m2] [W] [] [56] A P T K (10.1),P 10.1A 10.1 40() () () 10.2 10 4 10 10.3 (E6) OFF 10 11000 (EM1) (EM1) 10.3.1 (1) 10.3 (10.2) ((2)(a)(b)) ON EM1 (EM1) OFF V0 te 10.3 t 1J Lmax V L 0 (10.2) e 60 J M Lmax VO JM JL te [mm] [mm/min] [kgcm 2] [kgcm 2] [s] [s] 7kW10ms11k22kW (50ms) 10 5 10 (2) (10.2) (a) 200V 25 73 20 23

VQZ1000/2000/3000

448 34 485.5 37 473 36 39 498 38 40 L dimension 510.5 Blanking plug KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 L A Dimensions Applicable fittings size d Model A L D D KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 3.2 31.5 16 Color: White 6 32 16 8 35 18 10 39 20.5 12 43 22 Silencer (For EXH port) Silencer is installed in the EXH port. 63 38 22 Dimensions

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

9.5 11 11 1.5 30 5.1 B A 11.5 29 11.5 29 H G (NN 1) x H Section AA Section BB (mm) Model F 50 50 50 60 35 60 70 70 80 ZZ 121 121 121 131 146 185 238 292 344 M 83 83 83 93 108 147 200 254 306 Z 81.5 81.5 81.5 91.5 106.5 145.5 198.5 252.5 304.5 K 31 41 51 61 71 96 121 146 171 J 44 44 44 54 69 108 113 155 190 I 10 10 10 10 10 10 58 70 87 NN 2 2 2 2 3 4 5 6 7 H 45 45 45 55 35 35 35 38 44 G 15

MG

C 0.2 C 0.2 B 0.2 B 0.2 A 0.2 A 0.2 D Bore size (mm) A (mm) B (mm) C (mm) Bore size (mm) A (mm) B (mm) C (mm) D (mm) (mm) Hexagon socket head cap screw Hexagon socket head cap screw MGPM MGPL 12 50 50 18 41 10 8 M4 x 0.7 140 50 116 32 M12 x 1.75 16 80 56 22 46 12 10 M5 x 0.8 214 66 170 47 M16 x 2 Connection thread size Proper tightening torque (Nm) a dimension 20 72 24 54 14 12 M5 x 0.8 25

CQS

size (mm) E C OA D OB Q RA RB T H I K M N With/Without auto switch A 45.5 45.5 55.5 59 F 7.5 7.5 9 11 B 32 32 41 44 L 13.5 13.5 14.5 15 A 25.5 25.5 34 37.5 B 22 22 29.5 32.5 F 5 5 5.5 5.5 L 3.5 3.5 4.5 5 B 17 17 19.5 22.5 F 5 5 5.5 5.5 L 3.5 3.5 4.5 5 6 8 10 12 M4 x 0.7 25 29 36 40 6 8 7 12 6.5 6.5 9 9 7.5 7.5 9 11 7 7 10 10 4 4 7 7 0.5 0.5 1 1 M3 x 0.5 5 6 8 10 32 38 47 52 15.5 20 25.5

CG5-S

(mm) Stroke range A Bore size (mm) AL P B1 B C D FX FD FT GA GB H H1 I J K KA M MM NA S ZZ 20 15.5 to 350 1/8 18 13 50 16.5 8 36 5.5 6 18 12 35 5 31 M4 x 0.7 5 6 3 M8 x 1.25 29 83 121 25 19.5 to 400 1/8 22 17 50 18.5 10 36 5.5 6 18 12 40 6 33 M5 x 0.8 5.5 8 3.5 M10 x 1.25 29 83 126.5 32 19.5 to 450 1/8 22 17 50 20 12 38 6.6 6 18 12 40 6 38 M5 x 0.8 5.5 10 3.5 M10 x 1.25 35.5 85 128.5 40 27

I/O Configurator (NFC version)

Unit No. : Refer to the "Unit address order" of (A) Master unit setting (page 22) or (A) Slave unit setting (page 38) for IO mapping position. -50No.EX-OMV0017-A (c).

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

Manifold: Top Ported/SS3YJ3-20Station Grommet (G), (H) L2 3.5 6 2.5 10 17.5 21.5 2-M3 X 0.5 2-3.5 (Mounting holes) (Bracket mounting screw) (Pitch) P=10.5 12.5 33.5 n-M3 X 0.5 5 (A port) 2 5 2.5 21 2 10 5 46.9 (GZ, GS: 47.6) [48.6] 10.7 10 5 P R P R 25 26 A A A A A 2-3.5 (Lead wire length) 4-M5 X 0.8 (Mounting holes) (P/R port) G: 300 H: 600 L2 3.5 L1 Manual override Depress and turn to

I/O Configurator (NFC version)

Unit No. : Refer to the "Unit address order" of (A) Master unit setting (page 22) or (A) Slave unit setting (page 38) for IO mapping position.

I/O Configurator (NFC version)

A Wireless Remote can then be registered to the dummy area at a later time, without having to change the I/O map Dummy Remote E Export Function to save the configured values of a wireless unit by exporting them to a PC. F Fieldbus Network protocol to establish digital communication between an automated industrial system such as a measurement tool or manipulation tool and a PLC.

MTS

) 18 28 (35) 5 (17) D-A9, D-A9V 0 (15) 0 0 32 32 (47) 22 22 (37) 0 (15) 16 D-M9, D-M9V 10 (17) 0 0 32 37 (49) 22 32 (39) 5 (17) D-F9W, D-F9WV 10 (17) 0 0 32 37 (49) 22 32 (39) 5 (17) D-A9, D-A9V 0 (15) 0 0 38 38 (53) 26 26 (41) 0 (15) 20 D-M9, D-M9V 10 (17) 0 0 38 38 (55) 26 36 (43) 0 (17) D-F9W, D-F9WV 10 (17) 0 0 38 38 (55) 26 36 (43) 0 (17) D-A9, D-A9V 0 (15) 0 0 40 40 (55) 32 32 (47)

CJ2

B C d H NTJ-010A 7 8.1 M4 x 0.7 3.2 8 9.2 M5 x 0.8 4 NTJ-015A ZZ Z U S R NB NA MM CB KA CA BB H GB BA GA A CD (cd) CX Bore size (mm) 10 16 93 82 8 46 5 22.5 12.5 M4 x 0.7 14 4.2 17 12 28 18 15 8 15 3.2 3.3 99 85 10 47 8 27.5 12.5 M5 x 0.8 20 5.2 20 18.3 28 23 18.3 8 15 6.5 5 T-bracket Dimensions TY TX TW TV TH TC Bore size (mm) 10 16 12 32 22 40 29 4.5 16 38 28 48 35 5.5 6-3-37 38 38 Air

CXS

Kit components CXSL 6PS CXSL 10 B PS CXSL 15 A PS CXSL 20 A PS CXSL 25 A PS CXSL 32 A PS Chromium steel Nickel plated 6 10 15 20 25 32 15 Nickel plated Special steel Synthetic resin 16 17 Items 22 through 24 from the chart above Note 1) Anodized aluminum alloy for CXSL6.

LEC-OM02704CN

[0][0]0) OFFONCC-Link 14 39 14 14.5.9 (1) 0()5( 6) (a) [3][3][1][0][1][5]14.4.1 (b) 0 0 10 0032AL.3200FFAL.__() (2) (a) [3][3][2][0][2][5] 14.4.1 (b) 10 16 10 01F5501 (3) [8][2][2][0] [8][2] [2][0] 1EA5 14 40 14 14.5.10 (1) (a) [0][2][0][0] [0][2] [0][0] (b) 0 0 10 0032AL.3200FFAL.__() (2) (a) [3][5][8][0][8][E] 14.4.1 (b) 0 0 32bit 16 () 0 10 1 16 0 11 22

High Power Cylinder Series RHC

47.3 M26 x 1.5 41 100 NT-10 3 High Power Cylinder Series RHC Construction (20 to 40) A A Parts list Section A enlarged view Description Material Note No.

CA2

B A B A B A B A B A B A B Hs Hs Hs Hs Ht Hs Ht Hs Hw Hs Hw 3.5 1.5 6.5 4.5 0 0 0.5 0 2 0 4 2 11.5 9.5 40 37 38.5 69 81 69 71.5 31.5 81.5 38 31.5 73 3.5 1.5 6.5 4.5 0 0 0.5 0 2 0 4 2 11.5 9.5 50 42 42 77 86.5 77 76.5 35.5 86.5 42 35.5 78.5 6 5 9 2.5 1.5 3 2 8 4.5 3.5 6.5 5.5 14 13 63 49 46.5 91 93.5 91 83.5 43 93.5 47 43 85.5 9.5 7.5 4.5 12.5 6 4 6.5 4.5 8 6 10 8 17.5 15.5 80 107 57.5 53.5