VMW-140-B-N09 With Bracket, 5/16" Push to Connect Fitting $62.00 VMW-140-N01 1/8" NPT Fitting $122.00 VMW-140-N02 1/4" NPT Fitting $124.00 VMW-140-N07 1/4" Push to Connect Fitting $61.00 VMW-140-N09 5/16" Push to Connect Fitting $61.00

VMW-140-B-N09 With Bracket, 5/16" Push to Connect Fitting $62.00 VMW-140-N01 1/8" NPT Fitting $122.00 VMW-140-N02 1/4" NPT Fitting $124.00 VMW-140-N07 1/4" Push to Connect Fitting $61.00 VMW-140-N09 5/16" Push to Connect Fitting $61.00

VMW-140-B-N09 With Bracket, 5/16" Push to Connect Fitting $62.00 VMW-140-N01 1/8" NPT Fitting $122.00 VMW-140-N02 1/4" NPT Fitting $124.00 VMW-140-N07 1/4" Push to Connect Fitting $61.00 VMW-140-N09 5/16" Push to Connect Fitting $61.00

VMW-140-B-N09 With Bracket, 5/16" Push to Connect Fitting $62.00 VMW-140-N01 1/8" NPT Fitting $122.00 VMW-140-N02 1/4" NPT Fitting $124.00 VMW-140-N07 1/4" Push to Connect Fitting $61.00 VMW-140-N09 5/16" Push to Connect Fitting $61.00

VMW-140-B-N09 With Bracket, 5/16" Push to Connect Fitting $62.00 VMW-140-N01 1/8" NPT Fitting $122.00 VMW-140-N02 1/4" NPT Fitting $124.00 VMW-140-N07 1/4" Push to Connect Fitting $61.00 VMW-140-N09 5/16" Push to Connect Fitting $61.00

VMW-140-B-N09 With Bracket, 5/16" Push to Connect Fitting $62.00 VMW-140-N01 1/8" NPT Fitting $122.00 VMW-140-N02 1/4" NPT Fitting $124.00 VMW-140-N07 1/4" Push to Connect Fitting $61.00 VMW-140-N09 5/16" Push to Connect Fitting $61.00

VMW-140-B-N09 With Bracket, 5/16" Push to Connect Fitting $62.00 VMW-140-N01 1/8" NPT Fitting $122.00 VMW-140-N02 1/4" NPT Fitting $124.00 VMW-140-N07 1/4" Push to Connect Fitting $61.00 VMW-140-N09 5/16" Push to Connect Fitting $61.00

VMW-140-B-N09 With Bracket, 5/16" Push to Connect Fitting $62.00 VMW-140-N01 1/8" NPT Fitting $122.00 VMW-140-N02 1/4" NPT Fitting $124.00 VMW-140-N07 1/4" Push to Connect Fitting $61.00 VMW-140-N09 5/16" Push to Connect Fitting $61.00

1

3 2 B 2 B 2 B 2 B 2 B PCI BUS IN BUS OUT 8 7 1 2 3 4 5 Valve stations For N, sizes are in inches.

2

(See Fig. 2.)

Secondary Batteries

Standard Type 1(P): One-touch fitting 2(A): One-touch fitting Applicable tubing O.D. (mm) Bracket assembly no. 1(P) 2(A) 4 90-VHK-B1A 4 4 6 90-VHK-B1A 6 1(P): One-touch fitting 2(A): One-touch fitting 1(P): Male thread 2(A): One-touch fitting 6 8 90-VHK-B1A 8 2(A) Applicable tubing O.D. (mm) 2(A) Applicable tubing O.D.

Vacuum System Peripherals:

Connection NPT 1/8 N01 Connection NPT 1/4 N02 Port size Connection NPT 3/8 N03 Applicable model IRV1000 Option Connection NPT 1/2 N04 Size Symbol IRV3000 IRV2000 Connection G 1/8 F01 01 02 03 04 1/8 1/4 3/8 1/2 Connection G 1/4 F02 Connection G 3/8 F03 Connection G 1/2 F04 13-14-2 3 Vacuum System Peripherals: Electronic Vacuum Regulator: ITV209 Specifications ITV2090 ITV2091 Model 24 VDC

70pvpump

(A) 2 N.O.

ITV

Exhaust port 35.7 G G OUT 2 EXH (3) PPA SUP (2) SUP (1) 22 8 AL 36 Flat bracket P3020114 (Optional) 2 x Rc1/4, 3/8, 1/2 Port size 4 x M5 x 0.8 thread depth 6 mm through Mounting hole L-bracket G OUT 2 22 30 R3.5 25 15 25 7 36 L-bracket INI-398-0-6 (Optional) (10) 30 45 2.3 2 x Rc1/4, 3/8, 1/2 SUP port, OUT port (7) 36 14-8-25 26 Series ITV1000/2000/3000 Made to Order Specifications: Please

Precision Regulator

(Option) 30 2 ARJ 2.3 48 Pressure gauge (Option) AR425 to 935 Pressure gauge (Option) ARX 5.5 9.5 M5 depth 7 AMR 9 M5 depth 7 2 x Rc 1/8 15.5 IN 119 Pressure gauge port 83 75 Bleed Bleed IN ARM Exhaust IN OUT(2) Bleed Bleed SUP(1) IN G 2 OUT 144 43 G ARP 76 22 2 x Rc 1/8 Pressure gauge port 50 50 (17.7) 2 x Rc 1/4 Port size IR-A EXH(3) OUT 2 OUT(2) SUP(1) 60 Rc 1/2 Exhaust port 66 2 x Rc

IR1000/2000/3000

. 144 IN 2-Rc(PT) 1/4 to 1/2 Port size 2-Rc(PT) 1/8 Pressure gauge port Bleed 43 EXH(3) SUP(1) OUT(2) OUT Rc(PT) 1/2 Exhaust port Approx. 68 66 66 2-Rc(PT) 1/4 to 1/2 Port size 2-Rc(PT) 1/8 Pressure gauge port 4 Series IR1000/2000/3000 Series IR1000 Flow rate characteristics Relief characteristics Pressure characteristics Testing methods conform to JIS B8372.

ITV

35.7 Exhaust port OUT 2 SUP (1) OUT (2) EXH (3) 22 8 25 Flat bracket P3020114 (optional) 2-Rc(PT) 1/4, 3/8, 1/2 m36 Port size 4-M5 X 0.8 thread depth 6mm through Mounting hole G OUT 2 30 25 22 R3.5 15 25 m36 7 (10) 30 L-bracket INI-398-0-6 (optional) 2-Rc(PT) 1/4, 3/8, 1/2 (7) 36 SUP port, OUT port 1.12-8 Series ITV2000/3000 Made to Order Specifications Contact SMC regarding detailed dimensions

I

from the VY Valve. 02 14 2.0 3 03 38 3.3 body Ported Type 04 12 3.9 Terminal Designations are as follows: 04 12 7.2 5 06 34 8.9 1 = 24v Power Supply 2 = Control Signal 3 = Common Negative for both power and signal. 10 1 10 5% 2% + -2% 7 10 1 114 17 12 114 18 9 14 112 2 33 20 2 37 Courtesy of Steven Engineering, Inc. !

V

, 03, 04 14, 38, 12 67 36 36 NAK6000-N06, 10 34, 1 95 50 50 H O W T O O R D E R ( N ) A K 2 0 0 0 S E R I E S 000 (N)AK P O R T S I Z E M O D E L 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 P O R T T H R E A D 2 1/4 4 1/2 6 1 Nil Rc(PT)* N NPT F G(PF)* * Remove N when ordering Courtesy of Steven Engineering, Inc. !

PSxx-OMH0002CN

Nm 1.52 FG *() 6 33 2 () ( etc.) 10 m10 m DC(-)() -6No.PS-OMH0002CN-D * () CE (FKM) * 2030 1 LCD * ()(), (ISE70 ) O -7No.PS-OMH0002CN-D ISE ISE ISE ISE ISE ISE ISE ISE 70 01 MPa 02 43 70 75H 02 43 2 75 010 MPa A 75H 015 MPa 1 02 Rc1/4 N02 NPT1/4 S M12 (5m) F02 G1/4(ISO1179) L M12 (5m) 1 27 2 NPN 2 M SI 2 43 NPN 1 1 PNP 1 P psi() 1 65 PNP 1 1 2MPa 67 2 PNP 2 ZS-31-A A