70pvpump

Refer to pages 17-6-3 to 17-6-10 for Safety Instructions and Solenoid Valve Precautions. Operating Environment Maintenance Warning Warning 1.

Precision Regulator

6 @1 @1 !8 e VEX Main valve e @1 Exhaust tValve guide tValve guide tValve guide SRH IR2120 IR3120 SRP @0 !1 SRF @5 !1 ITV @0 @6 !9 @0 @6 IC SUP side passage OUT side passage SUP side passage OUT side passage ITVH o o !0 ITVX !0 PVQ y q q IN !1 VY1 w IN !1 Bleed Bleed VBA VBAT y !2 @2 Bleed Bleed r !3 !2 !5 w AP100 @4 !7 u @3 OUT (2) SUP (1) SUP (1) OUT (2) !8 @3 !

ITV

Output deviation (%F.S.) 0.5 0.5 Out VE 40 0 0 Return VY G 60 0.5 0.5 AL 80 1.0 1 0 2 4 6 8 10 0 25 50 75 100 0 25 50 75 100 Input signal (%F.S.) Input signal (%F.S.)

F

11 47 6 25 22.2 7.2 11.8 16.5 11.4 50 6.2 NAS2001F 3/16 33.6 28.6 17.1 AS2001F 11.8 14.5 4 8.9 43.8 5.2 32.6 27.6 11.4 17 13.2 52.2 7.1 1/4 34.5 29.5 20.1 15.5 6 11 48.5 6.3 33.7 28.7 12.4 16.5 11.4 52.2 6.2 3/16 34.6 29.6 24 AS2051F 14.8 15.5 6 11 50.7 6 34.4 29.4 19.4 14.8 17 13.2 54.4 7.1 NAS2051F 1/4 35.5 30.5 25.1 18 8 15.2 59.8 8.1 36.5 31.5 30.3 18 15.2 59.8 8.1 5/16 36.5 31.5 30.3

q"s

0.1 o -1 2 4 6 a 1 0 0.0 0 25 50 75 lnputsignal (%F.S.) 1 . 0 1 0 25 50 75 Inputsignal (%F.S.) 500 1000 1500 Flow rale (l/min (ANR)) :':i ::l Relief flow characterjslics supp y pressure: 0.7 Mpa Flow characteristics suppty pressure: 0.7 Moa Pressufe chafaCtgristics set oressue: 0 2 MHa 0.8 0-7 t'. I { 0 s l I l 6 l ; D.0 t' 6 l 0.6 0.5 o.4 0.3 6 ' ) !

I

E U N I T T Y P E D I M E N S I O N S S I N G L E U N I T: DIN R A I L M O U N T No. of Sensors 2 3 4 5 6 L1 70 105 140 175 210 L2 105 140 175 210 245 L3 140 175 210 245 280 No. of Sensors 2 3 4 5 6 L1 70 105 140 175 210 L2 36 71 106 141 Courtesy of Steven Engineering, Inc. !

IR1000/2000/3000

Standard part number X1 Clean room specifications Specifications Non-grease specifications Cleanliness Bleed port Class 10 With M5 fitting (applicable tube O.D. 6) Manifold Specifications (except type IR2120 and series IR3000) 6 IR1000/2000: M5 fitting (applicable tube O.D. 6) IR3000: Rc(PT) 1/2 female thread EXH port Grease Teflon grease 2 to 8 station manifold type regulators.

Size: 3000 (3/8 Basis), Thread: N (NPT), Port Size: 02 (1/4), Accessory: B (Bracket), Option: 6 (Nylon Case)

Size: 3000 (3/8 Basis), Thread: Rc(PT), Port Size: 02 (1/4), Accessory: B (Bracket), Option: 6 (Nylon Case)

Size: 3000 (3/8 Basis), Thread: N (NPT), Port Size: 03 (3/8), Accessory: B (Bracket), Option: 6 (Nylon Case)

Size: 3000 (3/8 Basis), Thread: Rc(PT), Port Size: 03 (3/8), Accessory: None, Option: 6 (Nylon Case)

Size: 3/8 Basis, Thread: Rc(PT), Port Size: 1/4, Accessory: Bracket, Option: Nylon Case

Size: 3/8 Basis, Thread: NPT, Port Size: 3/8, Accessory: Bracket, Option: Nylon Case

Size: 3/8 Basis, Thread: Rc(PT), Port Size: 3/8, Accessory: None, Option: Nylon Case

Size: 30, Thread Type: NPT, Port Size: 1/4, Accessory: Bracket, Case options: Nylon case, Drain outlet options: With drain cock, Flow direction options: Left > Right, Recommended flow rate(L/min (ANR)): 200

Clean Air Filter

How to order SFD 1 1 0 C08 Option Symbol Option Nil None B Bracket Port size Symbol C04 4 C06 6 C08 8 02 N02 F02 Connection size Clean One-touch fittings (KP series) Rc1/4 NPT1/4 G1/4 7 Document No.DOC1018377 4. Construction and Replacement parts SFD110-C** SFD110-*02* Component Parts No.

tTV2000/3000

.:..aiu.lu:.it:rit spqtrcatrons iet pressure max. 0.1MPa 1 a o iet Dressure max. 0.5MPa o a o iet oressure max. 0.9MPa a o )onnection Rc(Pfl 1/4 02 o o o E EE .ti'6 u, at CL ]onnection Rc(PT) 3/8 03 o o )onnection Rc(PT) 12 04 o Bracket B o o Bracket o o @ L-bracket Connection NPTl/4 N02 a o Connection NPT3/8 N03 a o o tr 6 . 9 o u t = ^ O v o EL o Connection NPTl/2 N04 o Connection G(PD

PSxx-OMH0002CN

-27-67 6 7. 0 ISE75 / ISE75H 8.

Process Pump <Fluororesin Type> Series PA3000

AN200-N02 for NPT.

A

Such vessels require EC type examination and then CE marking. 14-21-6 SMC Product Conforming to International Standards national Standards you to comply with EC directives and CSA/UL standards.