CNG

K KA MM NA PG PH PL S TA TB TC WA WB WH WW XA XB P 30 M5 x 0.8 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 M5 x 0.8 21.5 2 65 141 (149) 11 11 88 15 (16) 23 5.5 3 12 30 M6 x 0.75 M5 x 0.8 depth 7.5 5.5 8 M10 x 1.25 29 M5 x 0.8 26.5 2.5 73 151 (159) 11 11 98 15 (16) 25 6 3 12 25 M8 x 1.0 M5 x 0.8 depth 8 5.5 10 M10 x 1.25 35.5 Rc 1/8 26.5 2.5 73 154 (162) 11 10 (11) 99 15 (16) 28.5 6 3 12 20 M10 x 1.25

Applicable Auto Switch Model

J wRefer to p.5.3-68 for the details.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

B (F) R 2-V PB PA A B Pilot port threaded type (mm) Dimensions A B C D E F G H J K L M N P Q R V Model LVD1-S LVD2-S LVD3-S LVD4-S LVD5-S 4 (5/32") 20 20 45 39 9.5 46 23 11.5 4.5 11 30 5 21 28 22.5 M5 x 0.8 30 30 54.4 56 11 67 28.5 13 4 20 44 7 23 31.5 17 M5 x 0.8 6 35 35 79.5 62 17.5 83 45.5 14.5 6 22 50 7 37 6 36 21 M5 x 0.8 35 35 82 62 20 93 48 14.5 6 22 50 7 39 6 36 21 M5 x 0.8 45 45

MHL2

D(Finger closing port) M5 x 0.8 (Finger closing port) M5 x 0.8 Auto switch mounting groove (4 locations) 204-M8 x 1.25 (Piston rod and rack screw) Width across flats 13 (4 locations) Closed E Open F 4-M8 x 1.25 through (Thread for mounting attachment) (mm) A B C D E F G H 66 120 138 J 146 244 282 Note 1) J dimension is at fully closed.

Modular Type Filter Regulator Series AW

N R W Z AW10 AW30 to 40 B C D E G H 1 2 6 8 C J N R W Z Accessories Optional specifications 56 AW10 to 40 Standard specifications AW10 M5 x 0.8 AW20 1/8, 1/4 AW30 1/4, 3/8 Air 1.5MPa 1.0MPa 0.05 to 0.85MPa AW40 1/4, 3/8, 1/2 AW40-06 3/4 Model Port sizes Fluid Proof pressure Maximum operating pressure Set pressure range Pressure gauge port size Note 1) 0.05 to 0.7MPa Rc 1/16 Note 2) Rc, NPT

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

J M5 x 0.8 4.3 DM6 x 1 7.3 -X M8 x 1.25 17.5 20Data 3. Please observe the specified torque limits when tightening screws to mount the attachment.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

J M5 x 0.8 4.3 DM6 x 1 7.3 -X M8 x 1.25 17.5 20Data 3. Please observe the specified torque limits when tightening screws to mount the attachment.

CL

With Air Cushion/Basic: CLG1BA Bore (mm) Stroke range A B1 BC BN BZ C D E GA GB GC GD GK GL GQ GR I J K KA MM NA AL 20 25 32 40 to 200 to 300 to 300 to 300 15.5 19.5 19.5 27 18 22 22 30 13 17 17 19 57.5 69 69 76 8 10 12 16 M4 X 0.7 depth 7 M5 X 0.8 depth 5 M5 X 0.8 depth 8 M6 X 1 depth 12 5 5.5 5.5 6 10 14 24 29 35.5 44 12 14 18 25 14 16.5 20 26 38 45 45 52 M8 X 1.25 M10 X 1.25 M10 X 1.25

JIS Standard Hydraulic Cylinder

K d Part no. +0.07 0 IH2-03B IH2-04B IH2-05B IH2-06B IH2-08B IH2-10B IH2-03B IH2-05C IH2-06C IH2-06B IH2-10C 25 16 76 60 25 32 M16 x 1.5 26 M5 x 0.8 16 CHQ +0.07 0 25 16 76 60 25 32 M20 x 1.5 31 M5 x 0.8 16 F J E +0.084 0 31.5 20 90 70 30 40 M24 x 1.5 36 M5 x 0.8 20 dH10 CHK B-series +0.1 0 40 31.5 145 115 45 60 M30 x 1.5 50 M6 x 1.0 30 +0.1 0 40 31.5 145 115 45 60 M39 x 1.5 61 M6 x 1.0 30

15

NZ M5 x 0.8 9 70 50 4 44 89.8 85 M3 x 12 M5 x 45 14 NY M4 x 0.7 8 70 50 4 44 89.8 85 M3 x 12 M5 x 45 14 NX M5 x 0.8 9 63 50 5 47.2 89.8 85 M4 x 12 M5 x 45 9 NW M5 x 0.8 9 70 50 5 45 89.8 85 M4 x 12 M5 x 45 9 NV M4 x 0.7 8 63 50 5 47.2 89.8 85 M4 x 12 M5 x 45 9 NU M5 x 0.8 9 70 50 5 45 89.8 85 M4 x 12 M5 x 45 11 NT M5 x 0.8 9 70 50 4 44 89.8 85 M3 x 12 M5 x 45 12 NM2 M4 x 0.7

10

J dimension is different from the value which is subtracted stroke from G dimension. 8 MHL2 Series Dimensions MHL2-16DmZ 8 8 10 2 x M5 x 0.8 thread depth 7 (Mounting thread) D Closed J View K (Fingers closed) The above figure shows the MHL2-16D1Z/16D2Z.

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

K + 0.07 0 + 0.07 0 + 0.084 0 + 0.1 0 + 0.1 0 + 0.1 0 + 0.07 0 + 0.084 0 + 0.1 0 + 0.1 0 + 0.1 0 32 40 50 63 80 100 40 50 63 80 100 IH2-03B IH2-04B IH2-05B IH2-06B IH2-08B IH2-10B IH2-03B IH2-05C IH2-06C IH2-06B IH2-10C 25 16 76 60 25 32 M16 x 1.5 26 M5 x 0.8 16 25 16 76 60 25 32 M20 x 1.5 31 M5 x 0.8 16 F J E 31.5 20 90 70 30 40 M24 x 1.5 36 M5 x 0.8 20 dH10 B series rod 40 31.5 145 115

MVGQ

MVGQM, MVGQL Common Dimensions ML2B Applicable solenoid valve B C DA G GA H J K L MM ML NN Q R S T V W X YY YL Z Bore size (mm) Standard stroke (mm) TA TB U Over 10 st 10 st C J G5-S 12 6 29 50 13 18 58 39 22 56 2 5 36 40 14 7 12 29 5 48 20 30 16 M4 x 0.7 10 M4 x 0.7 M4 x 0.7 10, 20, 30, 40, 50, 75, 100 16 CV 8 33 54 64 15 22 43 25 62 2.5 5.5 38 42 16 8 13 33 7 52 23 30 18 M5 x 0.8 13 M5

Modular Type Air Filter Series AF

Note 3) Bowl assembly for AF30 to 60 models comes with a bowl guard (steel band material). 26 AF10 to 60 Dimensions L AF10, 20 AF50, 60 A G D Bracket (Option) L Bracket (Option) F D M G K K F M J J B E E B H OUT IN C OUT IN H C Port size OUT OUT Port size o s AF10: 25 AF20: 40 Drain A P Min. clearance for maintenance AF30, 40, 40-06 L Bracket (Option) A D G F M K J B E Drain Min. clearance

PSxx-OMR0001CN

() 2 n (12 ) (1n ) -31No.PS-OMR0001CN-J 3 () M5() 3.5 mm (22) M5()2 1.6 mm (22) -32No.PS-OMR0001CN-J 3 / ISA3 ,ISA3 (ISA-15) 2 4 6 (0.75 Nm10) -33No.PS-OMR0001CN-J 3 () 1 DC(+) 2 N.C. 3 DC(-) 4 OUT1 -34No.PS-OMR0001CN-J 3 () 1 DC(+) 2 N.C. 3 DC(-) 4 OUT1 ZS-31-B() ZS-31-C() -35No.PS-OMR0001CN-J 3 ISA-19-() 4 1 3 2 ISA-19-2/3(5 ) ISA-19-4/5/6(8 ) M12 -36No.PS-OMR0001CN-J

MXF

0.030 0 5H9 depth 5 +0.030 0 92 DNN-4.2 26 11.5 NN-8 -X 208.5 H 2-M5 x 0.8 thread depth 12 Data 5.5 NN-M5 x 0.8 NN 2 ( 1) x H 13 G Section AA A M 12 Operating port 2-M5 x 0.8 0.5 25 (Table length) N 2 ( 1): The number of pitches 27 7 12 J 3 Z Max. 9.5 ZZ H G 33.5 (mm) 6 Z M J NN H G N ZZ Model 5H9 +0.030 0 depth 5 MXF20-30 91 91 57 4 30 29 4 104 MXF20-50 113 113 77 4 45 36 4 126 MXF20-

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

fitting for 4 Elbow bottom ported With One-touch fitting for 6 M5 threads Elbow with mixed port sizes Nil None Back pressure check valve on all stations Note 2) C3 C4 C6 M5 CM B D D G1 G2 G3 J K N R S With DIN rail (Rail length: Standard) With DIN rail (Rail length: Special) Note 3) Regulator unit with 1 unit Note 4) U side n Regulator unit with 2 units Note 4) L3 8 7 6 5 4 3 2 1 Regulator

MRHQ

2.5 MHW 3-R1.5 4.5 11.5 23 11 2 MRHQ 18 25 15.5 41.5 Misc. 5 Angle adjustment bolt 33 33 63 D3-R1.5 2011 +0.025 0 2-4.5 through 2-8 depth of counter bore 2.5 3-3H9 depth 4 (one each on three sides) 2 10 +0.025 0 3-3H9 long groove depth 3 (one each on three sides) 0 -0.062 37h9 M5 x 0.8 Port A M5 x 0.8 Port B 4-M4 x 0.7 depth 6 I N J E A D P A A M N 2 R SMC R E O P P T 6 A I R R G Y R A I

JA/JAH/JB/JS

ExampleRod end nut for JS40 CV MVGQ CC RB J D-X 20Data 10-19-13 14 Series JS Dimensions JS10, 16 Center of sphere M M U D J U F B G H C E P Use the precision spanner for clock 4 mm in the case of mounting male thread of JS10.

JA/JAH/JB/JS

A R JS20, 32, 40, 63 Center of sphere M M U U D J F H B E G P R A Max. thread depth P Model Center of sphere R Allowable eccentricity U Max. operating tension and compression force (N) (mm) M A B C D E F G H J JS10-4-070 JS16-5-080 0.5 0.5 0.5 0.5 0.75 1 4.7 5.8 7.3 8.5 11.6 14.3 M4 x 0.7 M5 x 0.8 26 34.5 8.5 12 15.5 17.5 18.5 23 9.5 13.5 12 16 21 24 31 41 1.5 2 4.5 5 5 7 4 6 7 8 11 14 4