Table of Contents

Note) Not applicable with the cases of standard dew point 20C (Nil), 15C (symbol H).

VM

plunger VM220-02-05 VM230-02-05 Polyacetal roller Hard steel roller Roller plunger VM220-02-06 VM220-02-06S VM230-02-06 VM230-02-06S Cross roller plunger VM220-02-07 VM220-02-07S VM230-02-07 VM230-02-07S Polyacetal roller Hard steel roller Toggle lever VM220-02-08 VM230-02-08 VM230-02-30R VM230-02-30B VM230-02-30G VM230-02-30Y VM220-02-30R VM-30AR Red Push button (Mushroom) VM-30AB Black

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

AS3301F-02 AS TMH ASD AS AS-FE KE AS-FG AS-FP Meter-in type Meter-in type AS3211F-02 AS3311F-02 AS-FM AS-D AS-T AS-D AS-T ASP ASN AQ ASV AK VCHC ASS Component Parts Component Parts No.

Modular Type Filter Regulator Series AW

Symbol Note 1) Drain guide is NPT1/4 (applicable to AW30 to 40) Note 2) Drain guide is G1/4 (applicable to AW30 to 40). 20 30 40 30 40 01 02 03 04 06 1/8 1/4 3/8 1/2 3/4 02 03 04 06 1/4 3/8 1/2 3/4 Option Note 3) Option Note 3) Description With bracket Applicable model AW30, 40 AW30, 40 AW30, 40 Symbol Nil B G Note 4) H Description With bracket Applicable model AW20 to 40 AW20 to 40 AW20

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

AS-FG A (2) L2 (1) L3 T1 T2 H L1 D1 D2 Model Min.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

ASS Dimensions ASR AS220M-01 02 AS120M ASF H 8 (Hexagon width across flats) L1 T2 24.8 (MAX. 29.8) 28.2 (MAX. 33.2) M5 x 0.8 L2 A L3 D1 9 10.3 10 M5 x 0.8 10-32 UNF D2 T1 9 Dimensions A L2 L3 T1 T2 H L1 D1 D2 Model Min. Min. Max. Max.

Series AS-FM/AS-M/ASD-FM

Dimension AS220M01 02 AS120M H (width across flats) 8 L1 T2 24.8 (Max. 29.8) M5 x 0.8 28.2 (Max. 33.2) L2 A D1 9 10.3 L3 10 M5 x 0.8 10-32UNF D2 T1 9 Dimensions A L2 L3 T1 T2 H L1 Model D1 D2 Min. Min. Max. Max.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

AS-D AS-D (Hexagon width across flats) AS-T D3 ASP D4 ASN A1 L5 AQ A2 L6 ASV AK VCHC T ASR ASQ Metric Size d Model H D1 D2 D3 D4 L1 L2 L3 L4 L5 L6 A1 A2 M1 T Weight (g) 17 ASD230F-M5-04D ASD230F-M5-06D ASD330F-01-06SD ASD330F-01-08SD ASD430F-02-06SD ASD430F-02-08SD ASD430F-02-10SD ASD530F-02-06SD ASD530F-02-08SD ASD530F-02-10SD ASD530F-02-12SD ASD530F-03-06SD ASD530F-03-08SD ASD530F-03-

NCQ8

Snap rings (2) PC-01 PC-02 PC-03 PC-03 PC-05 Snap rings (2) PC-01 PC-02 PC-03 PC-03 PC-05 Clevis (1) RCS-015 RCS-02 RCS-03 RCS-04 RCS-05 Pin (1) PS-015 PS-02 PS-03 PS-03 PS-05 Clevis (1) RCD-015 RCD-02 RCD-03 RCD-04 RCD-05 Pin (1) PS-015 PS-02 PS-03 PS-03 PS-05 056 (9/16") 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2"), 250 (2-1/2") 056 (9/16") 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

ASD430F-02-06ST ASD430F-02-08ST ASD430F-02-10ST ASD530F-02-06ST ASD530F-02-08ST ASD530F-02-10ST ASD530F-02-12ST ASD530F-03-06ST ASD530F-03-08ST ASD530F-03-10ST ASD530F-03-12ST ASD630F-04-10ST ASD630F-04-12ST 12.9 13.7 13.7 18.5 17 18.5 21 17 18.5 21 22 17 18.5 21 22 21 22 17.5 20.6 22.9 28.2 25.2 28.2 31 25.2 28.2 32.6 34.4 25.2 28.2 32.6 34.4 32.6 34.4 29.4 32.5 38.5 44.8 43.5 46.5 49.3

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

Elbow type Meter-out AS3201F-02 Meter-out AS3311F-02 Meter-out AS3301F-02 Component Parts Component Parts No.

LEC-OM02704CN

RX0F RX00 1 1 FROM E 1 H RX 1 F RX 1 0 M15 M10 M5 M0 E 2 H E 2 H R X F R X 0 0 0 0 0 0 0 0 0 0 0 0 0 0 1 1 RX 2 F R X 2 0 2 E 3 H 2 E 3 H RX 3 F RX 3 0 2 E4 H RX4F RX40 E5 H 3 RX5F RX50 M31 M26 M21 M16 15E H RX1F RX10 1 0 RX 7E F RX 7E 0 64 15F H RX 7F F RX 7F 0 . 1 Ready bit0 1 (1) M0(RD) M1(INP) M2(CPO) M3(ZP) M4(TLC) M5 M6(MBR) M7(PUS) M8 (MOF) M9 (COF) M10(WNG)

•

Deep type (mm) G I H 533 71.1 25 197 G I H 15187 17 1:!

44

Stainless Steel 316 Fittings KFG2 Series RoHS Compact and Light Compact and Light Compact and Light KQ2 KQB2 Approx.44% KS KX New New Current model Shorter Dimensions KM KFGL0806-02S KFG2L0806-02 KFG2L0806-02 31.2 mm 17 .4 mm KF Approx.37% M Lighter Weight H/DL L/LL KFG2L0806-02 KC 38 g 24 g KK KK130 Material DM KDM KB Grease-free/Can be used with steam.

SV

specifications Double wiring specifications Double wiring specifications 09 02 04 02 12 02 04 02 9 stations 4 stations 12 stations 4 stations 2 stations 2 stations 2 stations 2 stations (2) (2) (2) (2) Specified layout (Up to 8 solenoids possible.)

VCC

Model K VCKL0604-02F H KFN-06-X2 K VCKL0806-02F H KFN-08-X2 K VCKL1075-02F H L Union nut C3604BD + Ni plated 1 1 set unit KFN-10-X2 K VCKL1008-02F H K VCKL1209-02F H KFN-12-X2 K VCKL-02F H K VCKL0604-02F H KFS-06 K VCKL0806-02F H KFS-08 K VCKL1075-02F H M Sleeve Nylon 1 1 set unit KFS-10 K VCKL1008-02F H VNA VNB K VCKL1209-02F H KFS-12 SGC SGH N Gasket VCKK-4-1 Nylon 1 10 set unit VNC VNH

Prevents Micro-Bubbles

A (OUT) port A A LLH2A-03-02-C 1 set 1 set Manifold base part no. Non-locking Locking LVH20A-02-C 2 sets 2 sets Valve part no. (stations 1 & 2) LVH20AL-02-C 1 set 1 set Valve part no.

JXCx-OMT0061CN

Sub Function(RWw1) RWw1Sub Function = (0012)h No.1 []D0412 RWw23: Address RWw2:Address = (0412)h RWw3:Address = (0)h RWw45:50.00[mm]DATA RWw4:DATA(H) = (0)h RWw5:DATA(L) = (1388)h (3)RWw0,bit4:ON(2) RWr0,bit2:ON (4)RWr0,bit2:OFFRW0,bit3:ON (5)RWw0,bit4:OFFRWr0,bit3:OFF ((6)(7)) (6)(2)[2 ](02)hNo.1 [](D0412) RWw1Sub Function = (0002)h RWw2:Address = (0412)h RWw3:Address = (0)h (7) (3)(4)

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

Free Mount Cylinder

Applicable bore size (mm) d H1 B1 C1 Width across flats L 6 10 16 20 25 32 NTP-006 NTP-010 NTJ-015A NT-015A NT-02 NT-03 M3 x 0.5 1.8 5.5 6.4 2-P through 4-T counterbore M4 x 0.7 2.4 7 8.1 H + Stroke A' Auto switch M5 x 0.8 4 8 9.2 M6 x 1.0 5 10 11.5 M8 x 1.25 5 13 15.0 M10 x 1.25 6 17 19.6 (mm) Bore size (mm) A P A' Q QA B R C T D V E GA GB H J K L MM NN 6 10 16 20 25 32 M3 x 0.5 depth