Vacuum Pad: Ball Joint Type

width across flats 14 Hexagon width across flats 19 3 3 I 5 5 D C J H I Hexagon width across flats 8 M5 x 0.8 J H F Hexagon width across flats 10 Hexagon width across flats 2 Hexagon width across flats 12 F M8 x 1.25 Y D C Hexagon width across flats 12 Hexagon width across flats 3 2 A B 3 2 A B Dimensions: 10 mm Stroke (mm) B Stroke: 10 mm A C D F H I J Y Model ZPT10F10-B5-A10 10 12 10 12.5

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

= 4, 8, 12, 16) Note 2) 80 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 90 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 2 (Different surfaces, same surface), 1 20 95 100 105 110 D-Y7BA n (n = 2, 4, 6, 8) Note 1) 20 + 45 (n 2) 2 (n = 4, 8, 12, 16) Note 2) 95 + 45 (n 4) 2 100 + 45 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 105 + 45 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 110 + 45 (n 4) 2 (n = 4, 8, 12, 16)

MHS

M40.7 2.1 8 MHSJ3-20D MHSH3-20D M40.7 2.1 8 MHSJ3-25D MHSH3-25D M40.7 2.1 8 M40.7 2.1 8 MHSJ3-32D MHSH(J)3-32D M50.8 3.2 10 M40.7 2.1 8 MHSJ3-40D MHSH(J)3-40D M50.8 3.2 10 M50.8 3.2 10 MHSJ3-50D MHSH(J)3-50D M61 7.3 12 M61 7.3 12 MHSJ3-63D MHSH(J)3-63D M81.25 18 16 M61 7.3 12 MHSJ3-80D MHSH(J)3-80D M81.25 18 16 MHSH(J)3-DAMHSH(J)3-DB Nm mm MHSH(J)3-32DA MHSH(J)3-32DB M50.8 3.2 10 MHSH(

CJ5-S

CE2 + 0.048 0 Y-J010SUS 3.3 3.2 8 10 + 0.048 0 Y-J016SUS 5 6.5 12 10 ML2B Rod End Cap T-bracket C J G5-S Flat type/CJ-CF CV MM Double clevis style cylinder A 7 TH 4-TC MVGQ C0.5 + 0.2 0 TU D D 0.1 0.3 TN 12 C0.5 N CC W L TX TV TK RB Round type/CJ-CR MM TDH10 A J TY TT C0.5 DTW RR L N -X Material: Stainless steel 304 W Part no.

CJ5-S

CE2 + 0.048 0 Y-J010SUS 3.3 3.2 8 10 + 0.048 0 Y-J016SUS 5 6.5 12 10 ML2B Rod End Cap T-bracket C J G5-S Flat type/CJ-CF CV MM Double clevis style cylinder A 7 TH 4-TC MVGQ C0.5 + 0.2 0 TU D D 0.1 0.3 TN 12 C0.5 N CC W L TX TV TK RB Round type/CJ-CR MM TDH10 A J TY TT C0.5 DTW RR L N -X Material: Stainless steel 304 W Part no.

ISO Standard Hydraulic Cylinder

CD E F GA GB H M J LH LT LX LY P PJ S SS C K B D G MA A MM 40 25 to 800 52 90 M6 x 1 25.5 51.5 7.5 M16 x 1.5 11 16 12 58 107 34 33 70 3/8 58 40 12 19 47 8 22 22 19 50 65 103 M8 x 1 32 64.5 9 M20 x 1.5 25 to 800 11 16 12 58 108 50 42 15 34 59 11 83 3/8 65 24 28 28 25 63 77 115 M8 x 1 38 76.5 9 M27 x 2 25 to 800 11 50 19 31 18 74 12 95 1/2 66 115 68 58 13 36 30 32 36 80 M10 x 1.25 25 to 800

2/3 Port Valve

Option Symbol and Configuration Fluid and Options Option symbol Seal material Coil insulation Body, Shading coil material Option symbol and body material Brass SUS304 F L X F, B L, J B J B J J T A H A H A H D N G, J S Q E P V M Y A H K K A H A H B J V M V M Y D, E N, P B J Fluid(Application) Standard A B C D E F NBR FPM Argon Argon(long life) Ethyl Alcohol Ethylene glycol Ozone(low

RB/RBL/RBQ

J J N m/s2 1.

1

, I: 6 mm or less J: 4 mm or more, I: 6 mm or less XA2 XA17 H: M8 or more, X: 26.5 mm or less H: M8 or less 20 20 J: 5 mm or more, I :11 mm or less J: 5 mm or more, I: 11 mm or less H : M10 or more, X: 33 mm or less H: M10 or less 25 25 J: 6 mm or more, I: 13 mm or less J: 6 mm or more, I: 13 mm or less H: M5 or more, X: 20 mm or less H: M5 or less For 12 For 12 H: M4 or less H: M4 or less

Table of Contents

LXFH5 Without brake Direct acting guide 5 phase stepper 210 2 5 6 12 Without brake 218 LXPB2 2 phase stepper 2 5 6 12 With brake 226 LXP Ball bushing 2 5 6 12 Without brake 234 LXPB5 5 phase stepper 2 5 6 12 With brake 242 2 5 6 12 Without brake 250 LXSH2 2 phase stepper 2 5 6 12 With brake 258 High rigidity direct acting guide LXS 2 5 6 12 Without brake 266 LXSH5 5 phase stepper 2 5 6 12

Floating Joint

12 12 16 16 20 24 27 27 33 19 20.5 20.5 27 27 27 34.5 34.5 43.5 52 52 60 86 D-X Technical Data 1147 JA Series Foot Type: JAL20 to JAF160 JAL20 to 100 Center of sphere 2 x J R JAL125 to 160 4 x J Center of sphere R (mm) Maximum operating tension and compression force (N) Applicable bore size (mm) Model Pitch Nominal size Center of sphere R Allowable Maximum thread depth P M A Weight (kg)

Modular F.R.L. Unit

12 Q 65 64 66 74 74 K 12 14 14 18 18 L 5.5 7 7 9 9 M 3.2 4 4 4 4.6 N J 33 L 5.5 7 7 9 9 F 43 57 57 75 80 G 30 41 41 50 50 H 24 35 35 40 40 B 132 184 187 222 224 E 41.5 55 55 72.5 77.5 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 AC20C AC25C AC30C AC40C 50 71 71 88 88 2 Note 1) 80 80 80 105 105 126 167 167 220 235 114 143 146 183 185 26.5 28 31 36 36 0 3.5 3.5 3 AC40C-06 Note 1) For AC20C

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Note 3) 12, with switch: Rubber bumper is standard. 20Minimum Operating Pressure (MPa) Non-rotating Accuracy Data 12 16 20 25 32 40 50 63 12 16 20 25 32 40 50 63 Bore size (mm) Bore size (mm) Rod non-rotating accuracy Minimum operating pressure 2 1 0.8 0.07 0.07 0.05 0.05 0.05 0.05 0.05 0.05 Allowable Kinetic Energy (J) Standard 12 16 20 25 32 40 50 63 80 100 Bore size (mm) 0.022 0.038 0.055

C85

Lubrication CG1 Piston speed 50 to 1500 mm/s Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Allowable kinetic energy 0.02 J 0.03 J 0.04 J 0.09 J 0.27 J 0.4 J MB Front side mounting Stroke tolerance 0/+1 0/+1.4 MB1 CA2 Weight (g) CS1 Bore size (mm) 25 20 16 12 10

MK

Auto switch model 12 16 20 25 32 40 50 63 CC D-A7/A80 D-A7H/A80H D-A73C/A80C 12 12 12 11 10 12 RB Applicable bore size (mm) Electrical entry (Fetching direction) Type Model Features D-A79W D-A9/A9V 13 13 13 14 14 16 6 7.5 9.5 9.5 9.5 11.5 J D-A80 D-A80H D-A80C D-A90 D-A90V Grommet (Perpendicular) Grommet (In-line) Connector (Perpendicular) Grommet (In-line) Grommet (Perpendicular) D-F7

High Purity Fluoropolymer

Model (L) 3 E J M H W ( T ) L N LQ1F41 LQ1F42 LQ1F51 LQ1F52 LQ1F61 LQ1F62 12 10 19 12 25 19 60 53 34 SMC 30 12 33.1 28 21 65.2 58 (M) W N J SMC 58 41 36 14 40 32 26 3/4 19 63.2 (E) (T) H 69 51 81.5 36 14 49 39.5 Class 4, 5 JIS 10K flange Inch sizes H Applicable tubing O.D.

51

Basic, Foot, Rod flange, Head flange, Clevis (Used for changing the port location by 90) Mounting Male rod end Female rod end 0.2 J 0.29 J 0.46 J 0.84 J 1.4 J 2.38 J 4.13 J 6.93 J Allowable kinetic energy Symbol Specification 0.11 J 0.18 J 0.29 J 0.52 J 0.91 J 1.54 J 2.71 J 4.54 J -XA Change of rod end shape Operate the cylinder within the allowable kinetic energy.

CNA

, 16 90 + 40 n = 4, 8, 12, 16 85 + 40 n = 4, 8, 12, 16 80 + 40 n = 4, 8, 12, 16 15 + 40 n = 2, 4, 6, 8 n n = 4, 8, 12, 16 2 (Different sides, Same side), 1 10 65 75 80 90 D-Y69/Y7PV D-Y7WV (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 n 90 + 30 80 + 30 n = 4, 8, 12, 16 75 + 30 n = 4, 8, 12, 16 65 + 30 n = 4, 8, 12, 16 10 + 30 n = 2, 4, 6, 8 n = 4, 8, 12, 16 2 (Different sides, Same side),

CNA

, 16 90 + 40 n = 4, 8, 12, 16 85 + 40 n = 4, 8, 12, 16 80 + 40 n = 4, 8, 12, 16 15 + 40 n = 2, 4, 6, 8 n n = 4, 8, 12, 16 2 (Different sides, Same side), 1 10 65 75 80 90 D-Y69/Y7PV D-Y7WV (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 n 90 + 30 80 + 30 n = 4, 8, 12, 16 75 + 30 n = 4, 8, 12, 16 65 + 30 n = 4, 8, 12, 16 10 + 30 n = 2, 4, 6, 8 n = 4, 8, 12, 16 2 (Different sides, Same side),

CY1

NN M10 x 1.0 M10 x 1.0 M10 x 1.0 S 63 63 83 W 25 30 35 X 10 16 19 Model CY1B6 CY1B10 CY1B15 ZZ 81 81 103 Port size M5 x 0.8 M5 x 0.8 M5 x 0.8 CY1B20 to 40 CY1B50, 63 (mm) B 36 46 60 70 86 100 MM x J M4 x 0.7 x 6 M5 x 0.8 x 8 M6 x 1.0 x 8 M6 x 1.0 x 10 M8 x 1.25 x 12 M8 x 1.25 x 12 C 32 38 D 22.8 27.8 35 43 53 66 E 30 32 G 8 8 9 11 14 14 H 20 20.5 22 29 33 33 I 28 34 40 50 58.2 72.2 K 8 10