ZP

J J Model A B C2 D E F G H J K Vacuum inlet direction q Pad dia.

ZP

Note 3) ZP3-(015/02/035)U ZP3-Y(015/02/035)U;(J/K)3-@ ZP3-Y(015/02/035)U;(J/K)6-@ ZP3B-Y1(J/K)3-B3 ZP3B-Y1(J/K)6-B3 ZP3-Y(10/13/16)UM;(J/K)3-@ ZP3-Y(10/13/16)B;(J/K)3-@ ZP3-Y(10/13/16)UM;(J/K)6-@ ZP3-Y(10/13/16)B;(J/K)6-@ ZP3-Y(10/13/16)UM;(J/K)10-@ ZP3-Y(10/13/16)B;(J/K)10-@ ZP3-Y(10/13/16)UM;(JB/K)15-@ ZP3-Y(10/13/16)B;(JB/K)15-@ ZP3-Y(10/13/16)UM;(JB/K)20-@ ZP3-Y(10/13/16)B;(JB/K)20-@

Vacuum Pad

Note 3) ZP3-(015/02/035)U ZP3-Y(015/02/035)U;(J/K)3-@ ZP3-Y(015/02/035)U;(J/K)6-@ ZP3B-Y1(J/K)3-B3 ZP3B-Y1(J/K)6-B3 ZP3-Y(10/13/16)UM;(J/K)3-@ ZP3-Y(10/13/16)B;(J/K)3-@ ZP3-Y(10/13/16)UM;(J/K)6-@ ZP3-Y(10/13/16)B;(J/K)6-@ ZP3-Y(10/13/16)UM;(J/K)10-@ ZP3-Y(10/13/16)B;(J/K)10-@ ZP3-Y(10/13/16)UM;(JB/K)15-@ ZP3-Y(10/13/16)B;(JB/K)15-@ ZP3-Y(10/13/16)UM;(JB/K)20-@ ZP3-Y(10/13/16)B;(JB/K)20-@

Air Slide Table

J I Pilot port 2 x M5 x 0.8 5.5 +0.025 0 3H9 ( ) depth 1.5 +0.025 0 3H9 ( ) depth 1.5 4.1 (Maximum screw-in depth) 3.5 23 18.9 2.1 (Minimum screw-in depth) B 14 34 3 21 32 17 B N x M3 x 0.512 F 15 2 x M3 x 0.5 thread depth 5 Cross-sectional view B-B N 2 1 x F 11 20 16 18 M 0.5 Pilot port 2 x M5 x 0.8 (Plug: Width across flats 7) I J 5.5 Bottom view of MXQ6A-30Z Z ZZ (NN 1) x H G H 8.3 5.8

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

M1 M2 Body (B) N Body (A) 2-R A port S N A port B port 2-R Y Y A1 M1 A2 SMC SMC J 27 H X For single vane: Above illustrations show actuators for 180 when B port is pressurized.

Table of Contents

M1 M2 Body (B) N Body (A) 2-R A port S N A port B port 2-R Y Y A1 M1 A2 SMC SMC J 27 H X For single vane: Above illustrations show actuators for 180 when B port is pressurized.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

M1 M2 Body (B) N Body (A) 2-R A port S N A port B port 2-R Y Y A1 M1 A2 SMC SMC J 27 H X For single vane: Above illustrations show actuators for 180 when B port is pressurized.

Rotary Actuator/Vane Type

K,T* J* K* XA51 XA52 Change of short shaft length K* K* K* K* K* K* K* K* XA52 XA53 Change of double shaft length K* K* K* K* K* K* XA53 XA55 Change of short shaft length J* J* J* J* J* J* XA55 XA57 Change of double shaft length J* J* J* J* J* J* XA57 XA58 Reversed shaft, Change of double shaft length J* J* J* J* J* J* J* CRB2 CRB2 CRB1 MSU CRJ CRA1 CRQ2 MSQ MSZ CRQ2X MSQX MRQ

CRB2/CRBU2/CRB1

Applicable shaft types: J, K, T (mm) W1 X L1 max. L3 max. (mm) Shaft type J K T J K T J K T J K T Size Size Y W2 L2 max. L4 max.

Table of Contents

Fluid Name and Option Fluid Name and Option Option symbol and body material Brass or BC6 Stainless steel J A H A H A H D N G, J E P A H A H B J E N, P Option symbol and body material Brass or BC6 Stainless steel F, B L, J B J J A H A H A H D N G, J E P A H A H A H B J D, E N, P Fluid (Application) Fluid (Application) Caustic soda (25% ) Gas oil Silicon oil Fuel oil (up to 60C) Fuel oil (

Table of Contents

MTS Side support B MY-SB MY CY 2-J MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX E A B C D D(mm) -X Model Applicable bore size A B C 12 15 25 D E F G H J M4 x 0.7 M4 x 0.7 M5 x 0.8 A B A B A B MY-S10 MY-S16 MY-S20 43.6 53.6 65.6 75 84 105 131 158 200 236 MY1B10

CV/MVGQ

MK(2) RS Q G Width across flats Socket Bore size (mm) RS H A Nut JIS B 1181 Class 3 Intermediate M8 x 1.25 JIS B 1181 Class 3 Intermediate M10 x 1.25 JIS B 1181 Class 3 Intermediate M12 x 1.75 RZQ 40, 50 13 JIS B 4636 + 2 point angle socket 13 63 17 JIS B 4636 + 2 point angle socket 17 MI W S 80, 100 19 JIS B 4636 + 2 point angle socket 19 CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data

CV/MVGQ

MK(2) RS Q G Width across flats Socket Bore size (mm) RS H A Nut JIS B 1181 Class 3 Intermediate M8 x 1.25 JIS B 1181 Class 3 Intermediate M10 x 1.25 JIS B 1181 Class 3 Intermediate M12 x 1.75 RZQ 40, 50 13 JIS B 4636 + 2 point angle socket 13 63 17 JIS B 4636 + 2 point angle socket 17 MI W S 80, 100 19 JIS B 4636 + 2 point angle socket 19 CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data

SQ1000/2000

CP VVQZ2000 (For P, J kits) SSQ1000 4 B P 1 150 For station 1

Air Cylinder

0.4 J 0.65 J 1.2 J Rubber bumper CM3 Female thread 0.11 J 0.18 J 0.29 J 0.52 J Allowable kinetic energy Male thread 0.54 J (11.0) 0.78 J (11.0) 1.27 J (11.0) 2.35 J (11.8) Air cushion CG1 (Effective cushion length (mm)) Female thread 0.11 J 0.18 J 0.29 J 0.52 J Refer to pages 262 to 266 for cylinders with auto switches CG3 * Operate the cylinder with in the allowable kinetic energy.

Hydraulic

d (H8) M A B C D G L F E K J H N Applicable cylinder type Bore size (mm) Spring pin P Order no.

REA/REB

7 Hard anodized Aluminum alloy Plate B Aluminum alloy External slider tube w !8 Hard anodized Aluminum alloy Port cover C J G5-S Stainless steel Shaft e !

REA/REB

HP L 4-J Effective thread length E TC MQQ M X F WP WP RHC GW GP QW PW D 4-LD Piping port P Operating direction A MK(2) 7 W K G RS Q G HS CR Piping port P Operating direction B Piping port P (Plug) Operating direction B With switch rail Q + Stroke Z + Stroke HR Plug RS H A RZQ 22 8 Piping port P Operating direction B Piping port P (Plug) Operating direction B 8 Piping port P Operating direction

Table of Contents

Maintenance Caution Model A B C D E Mounting dimension J H L K G F Port size Nominal size (B) ID200 240 240 320 320 1.

Table of Contents

Flat Type Fingers [3] D4-MM thread depth L (Thread for mounting attachment) 20K J A A D G B D B K J F C S W O (mm) Model Open Closed Weight (g) F G A W B C D J K MM L MHZ2-63 (1) 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 +1.2 0.8 2H9 2.5H9 3H9 4H9 5H9 6H9 +0.2 0 2 2.45 3.05 3.95 4.9 7.3 8.7 5 1 1.4 1.4 1.6 2 3 3 4 5 8 10 12 15 18 3.5 6 8 10 12 20 24 7.2 5.2 8.3 10.5 13.1 18 22 7.5