IDUS/IDFS

Area: (800) 258-9200-www.stevenengineering.com Series IDUS Series IDUS Inlet air temperature C Model IDUS3E IDUS4E IDUS6E 500 310 55 740 Air flow capacity l/mim(ANR) 295 (300) 475 (430) 703 (640) 60 160 275 225 55 Power consumption W 165 (189) 230 (275) 280 (295) 60 ( ): Previous model IDU3D/4D/6D Series IDFS Series IDFS HA Inlet air temperature C Model IDFS6E IDFS8E IDFS11E AT 740 35 1200

KT10

0.07 to 10.3 MPa) 15 to 2500 psig (0.1 to 17.2 MPa) 25 to 4000 psig (0.17 to 27.6 MPa) 50 to 6000 psig (0.34 to 41.4 MPa) 100 to 10 psig (0.7 to 69 MPa) Operating Parameters Delivery pressure Gas Source pressure Select compatible materials of construction for the gas SS body (Material code C or S): 69 MPa (10 psig) 2), Brass body (Material code B): 41.4 MPa (6000 psig) 750 psig (5.1 MPa) 1200

Bag Filter

Required flow rate Recommended flow rate = Number of elements FGE 400 L/min or less 800 L/min or less 1200 L/min or less FGG [Recommended flow rate per one element] 400 L/min (Pressure drop 7 kPa to 8 kPa) When viscosity rate is equivalent to water.

Table of Contents

Note 3) Meter-in type is black zinc chromate plated. 15-9-26 4 Speed Controller: Standard Type Elbow Type (Metal Body) Series AS Dimensions: AS-1200-M3, AS120-M5, AS220, 320, 420 Dimensions: AS1400-M3 AS1200-M3 AS120-M5 AS120-U10/32 (Hexagon width across flats) AS220, 320, 420 AS ASP (Hexagon width across flats) ASN AQ ASV AK ASS ASR ASF Dimensions Max. Min. Max. Min.

Stainless Steel Heat

CAT.EX30-1 A Stainless Steel Heat Exchanger Type Air Dryer Series IDUS Series IDUS Inlet air temperature C Model IDUS3E IDUS4E IDUS6E 500 310 55 740 Air flow capacity l/mim(ANR) 295 (300) 475 (430) 703 (640) 60 160 275 225 55 Power consumption W 165 (189) 230 (275) 280 (295) 60 ( ): Previous model IDU3D/4D/6D Series IDFS Series IDFS Inlet air temperature C Model IDFS6E IDFS8E IDFS11E 740 35 1200

Stainless Steel Heat Exchanger Type Air Dryer Series IDUS/IDFS

Stainless Steel Heat Exchanger Type Air Dryer Series IDUS Series IDUS Inlet air temperature C Model IDUS3E IDUS4E IDUS6E 500 310 55 740 Air flow capacity l/mim(ANR) 295 (300) 475 (430) 703 (640) 60 160 275 225 55 Power consumption W 165 (189) 230 (275) 280 (295) 60 ( ): Previous model IDU3D/4D/6D Series IDFS Series IDFS Inlet air temperature C Model IDFS6E IDFS8E IDFS11E 740 35 1200 1650

Single Axis Electric Actuator Series LJ1H

Positioning distance (mm) 1200 600 100 10 1 10 120.5 60.5 10.5 1.5 0.6 Speed (mm/s) 100 12.5 6.5 1.5 0.6 0.5 250 5.4 3.0 1.0 0.6 0.5 500 3.1 1.9 0.9 0.6 0.5 Values will vary slightly depending on the operating conditions.

Single Axis Electric Actuator Serriies LJ1S Slider Guide

Positioning distance (mm) 1200 600 100 10 1 10 120.5 60.5 10.5 1.5 0.6 Speed (mm/s) 100 12.5 6.5 1.5 0.6 0.5 150 8.5 4.5 1.2 0.6 0.5 300 4.6 2.6 0.9 0.6 0.5 Values will vary slightly depending on the operating conditions.

MY1

) (1200) (1200) (1200) MY1MW25 MY1MW25 MY1CW25 MY1CW25 (1000) (1000) (1000) (1000) MY1MW20 MY1MW20 30 30 (1000) (900) (1000) (900) (1000) (1000) Caution MY1CW20 MY1CW20 MY1CW16 MY1MW16 MY1MW16 MY1CW16 (900) (900) (900) (900) (900) (900) 20 20 1.

Air Cylinder

I J 20 Up to 350 18 15.5 13 14 8 12.5 12 2 12 12 35 5 25.3 37 26 M4 x 0.7 depth 7 25 Up to 400 22 19.5 17 16.5 10 12.5 14 2 12 12 40 6 28.3 40 31 M5 x 0.8 depth 7.5 32 Up to 450 22 19.5 17 20 12 12 18 2 12 12 40 6 31.3 43 38 M5 x 0.8 depth 8 40 Up to 800 30 27 19 26 16 15 25 2 13 13 50 8 38.3 52.5 47 M6 x 1 depth 12 50 Up to 1200 35 32 27 32 20 16.5 30 2 14 14 58 11 44.5 58.5 58 M8 x 1.25

42

0 200 400 600 800 1000 1200 1400 VQ4l5l (Plug lead type) ARBQ4000-00-B-5 B ARBQ4000-00-P-5 P Flow rate [L/min(ANR)] ARBQ4000-00-P (P B) 0.7 Dimensions 0.6 Outlet pressure [MPa] 0.5 0.4 SMC 0.3 0.2 59 50 147 0.1 B 2 SMC 1400 0 0 200 400 600 800 1000 1200 12 1 P 5 3 R2 R1 Flow rate [L/min(ANR)] PE 4 A 55.5 Pressure Characteristics 25 218.5 Conditions Inlet pressure: 0.7 MPa Outlet pressure:

High Vacuum Angle Valve

Model XLm-100(-1)-X152 XLm-160(-1)-X152 Rated voltage for heater 90 to 240 VAC Heater assembly quantity 2 3 100 V 800/220 1200/350 H4 100C Heater assembly quantity used Heater power W (Nominal value) Inrush/Power consumption (Option symbol, Operating voltage) 200 V 3200/220 4800/350 Heater assembly quantity 3 4 100 V 1200/300 1600/400 H5 120C 200 V 4800/300 6400/400 The inrush current of

RSH/RS1H

REC RSH20, 32 Graph (1) Graph (2) 1.0 CX RSH20 RSH32 0.9 Bore size 50, 63, 80/ = 0 Bore size 50, 63, 80/ = 0.1 Operating pressure P [MPa] CY 0.8 1300 1300 80 0.7 1200 1200 MQQ M 0.6 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1100 1100 0.5 RHC 1000 1000 0.4 900

1

D-X Shock absorber 20Data ZZ + Stroke S MH ZZ Bore (mm) 20 25 32 40 50 63 Stroke range Shock absorber 10 to 350 RBAC0806 77 23.5 135.5 10 to 400 RBAC1007 77 31 148 15 to 450 RBAC1412 55 79 174 15 to 800 RBAC2015 62.5 87 199.5 15 to 1200 RBAC2015 102 55.5 215.5 25 to 1200 RBAC2725 92.5 102 252.5 6-17-97 78 Made to Order Common Specifications: -XC51: With Hose Nipple -XC52: Mounting Nut with

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

CX DSymbol Specifications 1200 -XB11 Long stroke (2001 mm and up) -X -XB13 Low speed specifications (7 to 50 mm/s) 1100 40 40 -X116 Hydro specifications 20-X132 Axial ports 1000 -X160 High speed specifications Data 900 -X168 Helical insert thread specifications -X206 Added mounting tap positions for slider Theoretical thrust (N) 800 -X210 Oil-free exterior specifications -X322 Outside of

LG1H

Refer to pages starting with 181 for mounting. 30 100 95 95 B 8(4)-6.2 (160) () () 110 95 20 95 A () () (140) A B 100 200 300 400 500 600 700 800 900 1000 1200 Stroke Model LG1H202SC-100-F LG1H202SC-200-F LG1H202SC-300-F LG1H202SC-400-F LG1H202SC-500-F LG1H202SC-600-F LG1H202SC-700-F LG1H202SC-800-F LG1H202SC-900-F LG1H202SC-1000-F LG1H202SC-1200-F 50 150 250 350 450 550 650 750 850 1050

Compressed Air Preparation Filter

Inlet pressure 0.3 MPa 14 12 10 Inlet pressure 0.5 MPa 12 Inlet pressure 0.5 MPa 10 Inlet pressure 0.5 MPa 8 Pressure drop [kPa] Pressure drop [kPa] Pressure drop [kPa] 10 Max. flow capacity line 8 Max. flow capacity line Max. flow capacity line 8 6 6 6 4 4 4 2 2 Inlet pressure 0.7 MPa 2 Inlet pressure 0.7 MPa Inlet pressure 0.7 MPa 0 150 0 0 300 50 250 200 150 100 300 600 450 300 750 1200

HRX-OM-W038

(HRS050-A-20-(BJMTW)) 9.5.2 HRS040-W-20-(BJMTW) 1500 1500 Facility water temperature Facility water temperature 1200 1200 Heating capacity[W] Heating capacity[W] 40 40 900 900 32 32 25 25 600 600 20 20 5 5 300 300 0 0 5 10 15 20 25 30 35 40 5 10 15 20 25 30 35 40 Circulating fluid temperature[] Circulating fluid temperature[] 60H 50H Fig. 9-6 Heating capacity(HRS050-W-20-(BJMTW)) HRS Series

HRX-OM-W002

1600/1800 1000/1200 1600/1800 2000/2400 2500/3000 Heating capacity(50/60Hz)4 W 400/500 450/500 550/700 Temperature stability 5 0.1 0.13(at 7L/min)/0.18(at 7L/min) Pump capacity (50/60Hz) 6 MPa For option T : 0.42(at 10L/min)/0.4(at 14L/min) 0.13at 7L/min/0.18(at 7L/min) For option MT : 0.32(at 10L/min)/0.32(at 14L/min) For option -T/MT0.36at 7L/min/0.42(at 10L/min) For option T1 : 0.28(

HRX-OM-X071

1100/ 1200 Temperature stability 6 0.1 7 MPa 0.34(at 15L/min)/ 0.34(at 23L/min) Pump capacity (50/60Hz) Pump capacity of option T1 7 MPa 0.35(at 16L/min) Pump capacity of option T2 7 MPa 0.40(at 24L/min) Rated fiow (50/60Hz) 8 L/min 15/ 23 Rated fiow of option T1 8 L/min 16 Circulating Rated fiow of option T2 8 L/min 24 fluid system Flow display range9 L/min 5 to 40 Electric conductivity