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Rubber bumper (Magnet type) Standard Strokes Bore size (mm) Standard stroke (mm) Maximum manufacturable stroke (mm) 50, 100, 150, 200 Made to Order Made to Order: Individual Specifications (For details, refer to pages 1507 and 1508.) 300 6 50, 100, 150, 200, 250, 300 500 Symbol Specifications 10 -X116 -X168 -X210 -X322 -X324 -X431 -X2423 Air-hydro 50, 100, 150, 200, 250, 300, 350, 400, 450

Table of Contents

203 150 90 47 30 11-2-7 7 Series CRB2 Rotary Actuator: Replaceable Shaft A shaft can be replaced with a different shaft type except for standard shaft type (W).

CLQ

175 M5 x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 110l x 115l x 140l x 165l M5 x 85l x 90l x 95l x 100l x 105l x 110l x 115l x 120l x 125l x 150l x 175l 90 95 100 105 110 115 120 125 130 155 180 100 105 110 115 120 125 130 135 140 165 190 M6 x 90l 110 115 120 125 130 135 140 145 150 175 200 125 130 135 140 145 150 155 160 165 190 215 M10 x 110l -10D -15D -15D -15D x 95l x 115l Data -15D

Compact Cylinder with Lock Series CLQ

175 90 95 100 105 110 115 120 125 130 155 180 100 105 110 115 120 125 130 135 140 165 190 110 115 120 125 130 135 140 145 150 175 200 125 130 135 140 145 150 155 160 165 190 215 CDLQB20-5D CDLQB32-10D CDLQB50-10D CDLQB80-10D -10D -15D -15D -15D -15D -20D -20D -20D -20D -25D -25D -25D -25D -30D -30D -30D 10.5 -30D -35D -35D -35D 12.5 17 7 -35D -40D -40D -40D -40D -45D -45D -45D -45D -50D

AC Servo Motor Driver (CC-Link Type)

600 300 150 1000 500 250 800 400 200 Different from the initial value. *5.

Sine Cylinder Series REC

Up to 700 25 150 Up to 700 1500 32 150 Up to 1000 40 200 Up to 1000 Note 1) The cylinder performance may not as expected when stroke is longer than recommended stroke even they are available.

Sine Cylinder Series REC

Up to 700 25 150 Up to 700 1500 32 150 Up to 1000 40 200 Up to 1000 Note 1) The cylinder performance may not as expected when stroke is longer than recommended stroke even they are available.

3

When the arms moment of inertia is 1 x 103 kgm2, cylinder speed should be MK20/25: 82 mm/s or less, MK32/40: 150 mm/s or less. For calculating the moment of inertia, refer to page 387. Note) Maximum piston speed is equivalent to approximately 1.6x the average piston speed. (Rough indication) Note) Use 63 within a pressure range from 0.1 to 0.6 MPa.

Precision Cylinder Series MTS

314 235 490 358 804 603 1,256 942 8 12, 16 25, 50, 75, 100 25, 50, 75, 100, 125, 150, 175, 200 12 20, 25, 32, 40 16 Strokes other than the above are produced upon receipt of order. 20 Stud Bolt Part Numbers 25 32 Bore size (mm) Part no.

Sine Rodless Cylinder Series REBR Direct Mount Type

Load voltage Lead wire length (m) Note 1) Auto switch model Indicator light Special function Type Electrical entry Applicable load Wiring (output) 0.5 (Nil) 3 (L) 5 (Z) AC DC A90 5, 12V 24V IC circuit No 100V or less Reed switch 2 wire Relay, PLC A93 12V 100V Grommet Yes A96 3 wire (NPN equiv.) 5V IC circuit F9N 3 wire (NPN) Solid state switch F9P Relay, PLC 3 wire (PNP) 24V 12V

MK

A76H A96V A96 IC 5V A72 A73 A72H A73H 200V Yes Yes No No Yes Yes Grommet Reed switch 12V 100V A93V A90V A93 A90 Option Part No.

Microspeed Cylinder: Double Acting/Single Rod Series CQSX ø 12, ø 16, ø 20, ø 25 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Grease pack GR-L-005 (5g) GR-L-010 (10g) GR-L-150 (150g) 6

Microspeed Cylinder: Double Acting/Single Rod Series CUX ø 10, ø 16, ø 20, ø 25, ø 32 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Grease pack GR-L-005 (5g) GR-L-010 (10g) GR-L-150 (150g) Operation Warning 1. The speed may not be controllable during low speed operation with the meter-out controller. Caution 1. For Series CUX10, up to 0.1Nl/min (ANR) of internal leakage is anticipated due to cylinder structure. 4

AC Servo Motor Driver (CC-Link Type)

Electronic gear numerator *3 PA06 1 32768 Electronic gear denominator *3 PA07 1 2500 1500 750 3000 2000 1000 3750 2500 1250 Feel length multiplication (STM) (Multiplier) PA05 0 0(Less than stroke 1000)/ 0001(Stroke 1000 or more) Home position return type PC02 0 3Stopper type Home position return direction PC03 0001 1 (Motor side) Home position return Speed (rpm) PC04 500 90 150 300 75 113

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Lead wire electrical entry D-A90 Reed switch Grommet (In-line) D-A90V Grommet (Perpendicular) Type Model Features Without indicator light The normally closed type (NC = b contact) solid state switches (D-F9G/F9H) are also available.

3-Position Rotary Table

150 130 120 50 50 MSZA30A (High precision type) MSZA50A(High precision type) D70 60 50 40 30 20 10 0 120 100 80 60 40 20 0 Load N Load N 291 Rotary Table Air Consumption Air consumption is the volume of air which is expended by the rotary tables reciprocal operation inside the actuator and in the piping between the actuator and the switching valve, etc.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Series 10/11 -CQSX Series10/11 -CQ2X How to Order How to Order Clean room series 10 11 Clean room series 10 11 Relieving type Vacuum type Relieving type Vacuum type C(D)QSX B 20 10 30 A90 C(D)Q2XB 40 10 30 A73 D D With auto switch With auto switch (with built-in magnet) (with built-in magnet) Microspeed cylinder Microspeed cylinder Mounting Cylinder stroke (mm) Bore size Number of auto

Magnet: D (Built-in), Mounting: A (Both Ends Tapped), Overall Length: Z (Super Compact), Bore Size: 150 (1 1/2"), Stroke: 150 (1 1/2"), Body Option: Standard (Rod End Female Thread), Auto Switch: A90--Reed, AC Volt, Horizontal, Lead Wire or Prewired Connector: L (3m)

Magnet: D (Built-in), Mounting: B (Through Hole), Overall Length: Z (Super Compact), Bore Size: 150 (1 1/2"), Stroke: 150 (1 1/2"), Body Option: M (Male Rod End), Auto Switch: A90--Reed, AC Volt, Horizontal

Magnet: D (Built-in), Mounting: B (Basic), Bore Size: 150 (1 1/2"), Stroke: 0500 (5"), Cushion: No Cushion, Rod Boot: Without Boot, Auto Switch: A90--Reed, AC Volt, Horizontal