CV/MVGQ

22 26 0 0.033 -X Up to 300 16 50 7 88 154 16 29.8 8 10 84.5 46.5 M14 x 1.5 21.5 42.5 M32 x 2 21 22 41 14 24 32 0 0.039 With Rod Boot 20l h B3 e f Bore size (mm) 1 to 50 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 Data 20 25 32 40 12.5 68 30 36 17 81 93 106 131 156 25 37.5 50 75 100 185 12.5 125

CV/MVGQ

32 26 0 0.033 -X Up to 300 16 50 154 16 7 88 29.8 8 10 84.5 46.5 21.5 42.5 M32 x 2 M14 x 1.5 14 24 21 22 41 32 0 0.039 With Rod Boot 20l h f B3 e Bore size (mm) 1 to 50 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 Data 20 25 32 40 68 12.5 17 30 36 81 93 106 131 156 25 37.5 50 75 100 72 12.5 17

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

mm L: With lead wire (Length 300 mm) M: With lead wire (Length 300 mm) MN: Without lead wire D, Y: With connector Nil: Non-locking push type D: Push-turn locking slotted type E: Push-turn locking lever type + + + + H: Lead wire length 600 mm LN: Without lead wire LO: Without connector MO: Without connector DO, YO: Without connector Light/Surge voltage suppressor + + Electrical entry

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Bronze G: Grommet C U E 300 A T B IN F I M L K (D) 2 x Port size DS: DIN terminal DZ: DIN terminal with light GS: Grommet with PCB CS: Conduit U V E Applicable cable 6 to 12 U E 300 U E G1/2 500 NPT1/2 T T T DN: DIN terminal without connector WN: M12 connector E U E U T T [mm] Size Port size A B C D E F I K L M 70 1 1/4 132.6 26.5 42 125 21 51.5 43.5 67.5 57.5 53 80 1 1/2 139.3 30 42

REA/REB

200, 250, 300, 350, 400, 450, 500 15 750 MK(2) 20 1000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 25 Made to Order Specifications (For details, refer to page 10-21-1.)

REA/REB

: Standard Stroke Standard stroke (mm) Maximum manufacturable stroke (mm) Bore size (mm) 25 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 4000 32 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 40 5000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 6000 63 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900,

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

71 M4 x 0.7 depth 7 M8 x 1.25 1/8 1/8 1/8 1/8 1/4 1/4 3/8 1/2 11 11 11 12 13 13 106(114) 12 14 18 25 30 32 40 50 69(77) 69(77) 71(79) 78(87) 90(102) 90(102) 108(122) 108(122) 11 11 2 2 2 2 2 2 3 3 12 12 12 13 14 14 20 20 Up to 200 Up to 300 Up to 300 Up to 300 Up to 300 Up to 300 Up to 300 Up to 300 201 to 350 29 M5 x 0.8 depth 7.5 10(12) M10 x 1.25 111(119) 301 to 400 35.5 M5 x 0.8 depth

CY1

6 e #1 @9 #0 i !0 !3 !1 !

High Vacuum Angle Valve

Dimensions XLA-100/160-X152: Air operated (b) C E D E C E Fn (KF flange) Fd (K flange) (a) Heater (Option) (c) H [mm] B A Model A B C D E1 Fn Fd G H XLA-100-X152 108 300 154 3 11 134 130 102 131 XLA-160-X152 138 315 200 3 11 190 180 153 112 1 The E dimension applies when the heater option is included.

Compact

LAT LZ LC3F2 177 Step Motor (Servo/24 VDC) Electric Actuator/Low Profile Slider Type Basic Type LEMB Series LEMB25, 32 Caution E-MY16 E-MY25 LEM25 LEM32 LEM series E-MY series How to Order 25 LEMB 300 T S q w e r t y !

CM2

x 1.5 64 19.5 17 32 6 8 37.5 M10 x 1.25 15 34.5 1/8 40 50 11 16 32 154 14 24 7 M32 x 2 88 21 22 41 8 10 46.5 M14 x 1.5 21.5 42.5 1/4 With Rod Boot l ZZ h Symbol f e B3 Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to

Smooth Cylinder/Low Speed Cylinder

11 12 12 77 11 119 12 1/8 12 M5 x 0.8 Up to 300 11 12 10 79 11 121 12 1/8 10 1/8 Up to 300 12 13 10 87 12 139 13 1/8 10 1/8 Up to 300 13 14 12 102 13 162 14 1/4 12 1/4 Up to 300 13 14 12 102 13 162 14 1/4 12 1/4 Up to 300 20 17 122 196 20 3/8 17 3/8 Up to 300 20 17 122 196 20 1/2 17 1/2 Up to 300 1206 Smooth Cylinder Series CG1Y With Mounting Bracket Axial foot style: CG1YL LH B LT 2

Table of Contents

D E ZPY02U 2 4 6 8 Applicable tube O.D.

CNG

A AL B1 BC BN BP BZ C D E F GA GB GC GK GL GR GQ H1 I 18 15.5 13 38 93 1/8 50.5 14 8 12 2 85 10 18 5.5 6 4 8 5 26 Up to 200 20 to 200 22 19.5 17 45 103 1/8 59 16.5 10 14 2 96 10 25 6.5 9 7 10 6 31 Up to 300 20 to 300 22 19.5 17 45 104 1/8 64 20 12 18 2 97 10 25 6.5 9 7 10 6 38 Up to 300 20 to 300 30 27 19 52 112 1/8 72.5 26 16 25 2 104 10 (13) 26 7 11 7 12 8 47 Up to 300 301 to 500

CM2

Please delete the unnecessary part. 1.4-15 Standard: Double Acting Single Rod Series CM2 Front Trunnion (U) CM2U Bore size Stroke CJ1 CJP CJ2 CM2 C85 CG1 MB C95 CA1 CS1 (mm) E 20 26 26 32 Stroke range 1 to 300 1 to 300 1 to 300 1 to 300 P 1/8 1/8 1/8 1/4 Bore size 20 25 32 40 K 5 5.5 5.5 7 N 15 15 15 21.5 B2 26 32 32 41 D 8 10 12 14 I 28 33.5 37.5 46.5 MM M8 X 1.25 M10 X 1.25 M10 X 1.25 M14

CNG

BN BP BZ C D E F GA GB GC GK GL GR GQ H1 I 18 15.5 13 38 93 1/8 50.5 14 8 12 2 85 10 18 5.5 6 4 8 5 26 20 to 200 to 200 22 19.5 17 45 103 1/8 59 16.5 10 14 2 96 10 25 6.5 9 7 10 6 31 20 to 300 to 300 22 19.5 17 45 104 1/8 64 20 12 18 2 97 10 25 6.5 9 7 10 6 38 20 to 300 to 300 30 27 19 52 112 1/8 72.5 26 16 25 2 104 10 (13) 26 7 11 7 12 8 47 20 to 300 301 to 500 to 300 301 to 500 (mm

Cylinder with Lock Series CNG

BN BP BZ C D E F GA GB GC GK GL GR GQ H1 I 18 15.5 13 38 93 1/8 50.5 14 8 12 2 85 10 18 5.5 6 4 8 5 26 20 to 200 to 200 22 19.5 17 45 103 1/8 59 16.5 10 14 2 96 10 25 6.5 9 7 10 6 31 20 to 300 to 300 22 19.5 17 45 104 1/8 64 20 12 18 2 97 10 25 6.5 9 7 10 6 38 20 to 300 to 300 30 27 19 52 112 1/8 72.5 26 16 25 2 104 10 (13) 26 7 11 7 12 8 47 20 to 300 301 to 500 to 300 301 to 500 (mm

SYJ3000/5000/7000

plug connector DIN terminal E: Push-turn locking lever type G: Lead wire length 300 mm L: With lead wire (Length 300 mm) M: With lead wire (Length 300 mm) MN: Without lead wire D: With connector WO: Without connector cable + + + + H: Lead wire length 600 mm LN: Without lead wire LO: Without connector MO: Without connector DO: Without connector + + LN, MN type: with 2 sockets.

REA/REB

500 10 150, 200, 300, 400, 500 750 15 1 axis 200, 300, 400, 500, 600 1000 20 200, 300, 400, 500, 600, 800 25 1200 25 2 axes 200, 300, 400, 500, 600, 800, 1000 1500 32 Note 1) Strokes exceeding the standard strokes are available as a special order.

Proposals for Energy Saving

300 300 300 300 300 600 600 600 600 600 600 KNL3-06-150 KNL3-06-200 KNL3-08-200 KNL3-08-250 KNL3-10-250 KNL3-10-300 KNL6-06-150 KNL6-06-200 KNL6-08-200 KNL6-08-250 KNL6-10-250 KNL6-10-300 O.D.