Magnet: Built-in, Mounting: Basic Style, Style: Aluminum Tube, Bore Size: 63mm, Thread: Rc, Stroke: 125mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewied Connector: -, Number: -

Magnet: Built-in, Mounting: Basic Style, Style: Aluminum Tube, Bore Size: 63mm, Thread: Rc, Stroke: 125mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewied Connector: 3m, Number: -

Magnet: Built-in, Mounting: Basic Style, Style: Aluminum Tube, Bore Size: 63mm, Thread: Rc, Stroke: 150mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewied Connector: 0.5m Cord Length, M12-4 Pin Connector, Number: -

Magnet: Built-in, Mounting: Basic Style, Style: Aluminum Tube, Bore Size: 63mm, Thread: Rc, Stroke: 75mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewied Connector: -, Number: -

Magnet: Built-in, Mounting: Basic Style, Style: Aluminum Tube, Bore Size: 63mm, Thread: Rc, Stroke: 75mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewied Connector: 3m, Number: -

Magnet: Built-in, Mounting: Basic Style, Style: Aluminum Tube, Bore Size: 63mm, Thread: Rc, Stroke: 125mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: A54--Reed, DC Volt >5<24, AC Volt <200, LED, Lead Wire or Prewied Connector: 3m, Number: -

Magnet: Built-in, Mounting: Basic Style, Style: Aluminum Tube, Bore Size: 63mm, Thread: Rc, Stroke: 150mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: K59--Solid State, Gen. Purpose, 2 Wire, Lead Wire or Prewied Connector: 3m, Number: -

Magnet: Built-in, Mounting: Basic Style, Style: Aluminum Tube, Bore Size: 63mm, Thread: Rc, Stroke: 175mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: A54--Reed, DC Volt >5<24, AC Volt <200, LED, Lead Wire or Prewied Connector: 3m, Number: -

Magnet: Built-in, Mounting: Basic Style, Style: Aluminum Tube, Bore Size: 63mm, Thread: Rc, Stroke: 200mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: A54--Reed, DC Volt >5<24, AC Volt <200, LED, Lead Wire or Prewied Connector: 3m, Number: -

Magnet: Built-in, Mounting: Basic Style, Style: Aluminum Tube, Bore Size: 63mm, Thread: Rc, Stroke: 250mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: A54--Reed, DC Volt >5<24, AC Volt <200, LED, Lead Wire or Prewied Connector: 3m, Number: -

CV/MVGQ

22 26 0 0.033 -X Up to 300 16 50 7 88 154 16 29.8 8 10 84.5 46.5 M14 x 1.5 21.5 42.5 M32 x 2 21 22 41 14 24 32 0 0.039 With Rod Boot 20l h B3 e f Bore size (mm) 1 to 50 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 Data 20 25 32 40 12.5 68 30 36 17 81 93 106 131 156 25 37.5 50 75 100 185 12.5 125

CV/MVGQ

32 26 0 0.033 -X Up to 300 16 50 154 16 7 88 29.8 8 10 84.5 46.5 21.5 42.5 M32 x 2 M14 x 1.5 14 24 21 22 41 32 0 0.039 With Rod Boot 20l h f B3 e Bore size (mm) 1 to 50 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 Data 20 25 32 40 68 12.5 17 30 36 81 93 106 131 156 25 37.5 50 75 100 72 12.5 17

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

mm L: With lead wire (Length 300 mm) M: With lead wire (Length 300 mm) MN: Without lead wire D, Y: With connector Nil: Non-locking push type D: Push-turn locking slotted type E: Push-turn locking lever type + + + + H: Lead wire length 600 mm LN: Without lead wire LO: Without connector MO: Without connector DO, YO: Without connector Light/Surge voltage suppressor + + Electrical entry

REA/REB

200, 250, 300, 350, 400, 450, 500 15 750 MK(2) 20 1000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 25 Made to Order Specifications (For details, refer to page 10-21-1.)

REA/REB

: Standard Stroke Standard stroke (mm) Maximum manufacturable stroke (mm) Bore size (mm) 25 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 4000 32 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 40 5000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 6000 63 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900,

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Bronze G: Grommet C U E 300 A T B IN F I M L K (D) 2 x Port size DS: DIN terminal DZ: DIN terminal with light GS: Grommet with PCB CS: Conduit U V E Applicable cable 6 to 12 U E 300 U E G1/2 500 NPT1/2 T T T DN: DIN terminal without connector WN: M12 connector E U E U T T [mm] Size Port size A B C D E F I K L M 70 1 1/4 132.6 26.5 42 125 21 51.5 43.5 67.5 57.5 53 80 1 1/2 139.3 30 42

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

71 M4 x 0.7 depth 7 M8 x 1.25 1/8 1/8 1/8 1/8 1/4 1/4 3/8 1/2 11 11 11 12 13 13 106(114) 12 14 18 25 30 32 40 50 69(77) 69(77) 71(79) 78(87) 90(102) 90(102) 108(122) 108(122) 11 11 2 2 2 2 2 2 3 3 12 12 12 13 14 14 20 20 Up to 200 Up to 300 Up to 300 Up to 300 Up to 300 Up to 300 Up to 300 Up to 300 201 to 350 29 M5 x 0.8 depth 7.5 10(12) M10 x 1.25 111(119) 301 to 400 35.5 M5 x 0.8 depth

CY1

6 e #1 @9 #0 i !0 !3 !1 !

Compact

LAT LZ LC3F2 177 Step Motor (Servo/24 VDC) Electric Actuator/Low Profile Slider Type Basic Type LEMB Series LEMB25, 32 Caution E-MY16 E-MY25 LEM25 LEM32 LEM series E-MY series How to Order 25 LEMB 300 T S q w e r t y !

High Vacuum Angle Valve

Dimensions XLA-100/160-X152: Air operated (b) C E D E C E Fn (KF flange) Fd (K flange) (a) Heater (Option) (c) H [mm] B A Model A B C D E1 Fn Fd G H XLA-100-X152 108 300 154 3 11 134 130 102 131 XLA-160-X152 138 315 200 3 11 190 180 153 112 1 The E dimension applies when the heater option is included.