10

G G 2 x Rc P Width across flats KA E Width across flats KA TX D E E D B C MM MM H1 MB K Width across flats B1 TT ZZ + 2 x Stroke H S + Stroke H + Stroke N F A MA AL H1 Width across flats B1 C B N F A AL 2 x 4 x J K TY e d 10.2 10.2 f h l When the stroke is 1001 mm or longer, a tie-rod reinforcement ring is attached.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

E (J) of the load.

3 Port Solenoid Valve Metal Seal Series VZ200 1

port size) Built-in One-touch fittings Applicable tubing O.D. 8 C8 Applicable valve model Piping P, E port Port size Symbol VV3Z4-S50: only C6 & C8.

Cylinder with Lock

C DH7 E EN 0 0.1 ER (Max.)

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

A B N E J B (F) T 2-U PB PA A B Pilot port threaded type With flow rate adjustment (Max.

Made to Order

A + Stroke MGQM (Slide bearing) A, E Dimensions MGQL (Ball bushing bearing) A, E Dimensions A E A E Bore size (mm) Bore size (mm) 11 to 99 st 0 11 to 39 st 4 11 to 99 st 11 to 39 st 55 41 to 99 st 16 41 to 99 st 12 16 39 12 16 43 43 49 0 6 65 22 A E A E Bore size (mm) Bore size (mm) 21 to 74 st 0 21 to 39 st 10 21 to 74 st 61.5 21 to 39 st 74 76 to 199 st 14.5 41 to 199 st 27 76 to 199 st

5 Port Air Operated Valve Series SYA3000/5000/7000 1

E Symbol Type Stations A and B port sizes are same as port sizes in standard body size.

LJ1H

Nil W Power supply voltage A B E 10mm 25mm 40mm Standard motor 100/115VAC (50/60Hz) 200/230VAC (50/60Hz) Without motor Non-standard motor 1 2 0 100/110VAC (50/60Hz) 200/220VAC (50/60Hz) Cable entry direction: Axial Table Lead screw/Lead/Stroke combinations Lead screw type Stroke (mm) Model 400 Refer to Table below. 200 300 500 600 800 1000 1200 1500 P N S Ground ball screw Rolled ball screw

CL

Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No. Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

CP95

80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 100 Intermediate strokes are available.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Determination of load's kinetic energy (E) bore size E > Es E Es Determination of bore size Review of larger bore size E = m E 2 a ( ) 2 = (Refer to page 8-16-8.) 1000 P Ps P > Ps Determination of pressure for intermediate stop (p) (Refer to page 8-16-8.)

Series IDG

0 100 200 300 400 500 Outlet air flow rate l/min (ANR) Outlet air flow rate l/min (ANR) IDG60H IDG75H 0 P1 = 0.3MPa P1 = 0.3MPa 0 Outlet air atmospheric pressure dew point C Outlet air atmospheric pressure dew point C 10 10 P1 = 0.5MPa P1 = 0.5MPa P1 = 0.7MPa 20 20 P1 = 0.7MPa 30 30 40 40 50 0 200 400 600 800 50 0 200 400 600 1000 800 Outlet air flow rate l/min (ANR) Outlet air flow rate

Environment

0 i o e r t q u !1 !2 !3 !

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

Basic style: CG1YB GA GB 2-P (Port size) (Rc, NPT, G) 2-TC Section TA/TB Width across flats B1 H1 MM 0 -0.05 I 0 -0.05 TD E D E AL A TA TB 4-TC K F F H TE TF TG NA S + Stroke ZZ + Stroke KA C 0.1 8-J NA Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Section TA/TB

VP300/500/700

Common exhaust: VV3P7-41Stations 1-04 (G) (E) (T) (D, Y) N.C.

MGG

150, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 200, 250, 300 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100 63 MGGL Ball bush bearing 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100, 1200 80 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100, 1200, 1300 100 Intermediate strokes and short strokes other than the above are produced upon receipt of order.

VZ100/300/500

port R port P , E port R port Electrical entry Note) VZ52R is for manifold only.

E-P HYREG ® Series VY1 1

Description Material Body q Zinc alloy die-casted Pilot valve assembly w Adjusting piston e Aluminum alloy Spring r Stainless steel Valve guide t Stainless steel Valve y NBR Retainer u Aluminum alloy Rod i NBR 14-10-14 15 E-P HYREG Series VY1 VY1100 1, VY1200 1, VY1300 1, VY1400 1 (Pilot valve: VY1D00-00) VY1500 1, VY1700 1, VY1900 1 (Pilot valve: VY1B00-00) Working principle The pair

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

8 e w !7 t r o !8 e w @0 !7 t r o !8 e w @0 !7 t !5 !5 !5 !6 !6 !0 u !2 i q !1 y !9 !0 u !2 i q !1 y !9 !0 u !3 !2 i q !1 y !9 !4 !4 !4 Open condition Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Component Parts Note Note No. q Description Material No.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

2 w e !3 !4 r t y u i !5 !6 No.